会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 6. 发明申请
    • METHOD FOR PRODUCING POLYCRYSTALLINE SILICON ROD, POLYCRYSTALLINE SILICON ROD, AND POLYCRYSTALLINE SILICON MASS
    • 生产多晶硅,多晶硅和多晶硅质量的方法
    • US20170073235A1
    • 2017-03-16
    • US15309218
    • 2015-05-27
    • SHIN-ETSU CHEMICAL CO., LTD.
    • Shuichi MIYAOJunichi OKADAShigeyoshi NETSU
    • C01B33/035
    • C01B33/035C30B29/06
    • A polycrystalline silicon rod is synthesized by the Siemens method (S101). After the polycrystalline silicon rod is covered from above with a plastic bag whose inner surface has been washed, and housed in the plastic bag in a reactor (S103), the polycrystalline silicon rod is removed out of the reactor (S104), and heat-sealed and stored in an enclosed state (S105). According to the present invention, steps conventionally considered as essential, such as washing, etching, and water washing, are not always necessary, and therefore the concentrations of fluorine ions, nitrate ions, and nitrogen dioxide ions remaining on the surface can each be less than 0.2 ppbw. In addition, by covering with the plastic bag, the metal contamination levels decrease significantly. Moreover, when the handling according to the present invention is performed, surface contamination hardly proceeds even if the polycrystalline silicon rod is stored for a long period.
    • 通过西门子方法合成多晶硅棒(S101)。 在多晶硅棒被内表面洗涤后的塑料袋上覆盖多晶硅棒(S103)后,多晶硅棒从反应器中取出(S104), 密封并以封闭状态存储(S105)。 根据本发明,通常认为是洗涤,蚀刻和水洗等必不可少的步骤并不总是必需的,因此残留在表面上的氟离子,硝酸根离子和二氧化氮离子的浓度各自可以更少 超过0.2 ppbw。 另外,通过覆盖塑料袋,金属污染水平显着下降。 此外,当执行根据本发明的处理时,即使多晶硅棒长期储存,表面污染几乎不进行。