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    • 10. 发明申请
    • ACRYLIC ESTER DERIVATIVE, HIGH-MOLECULAR COMPOUND AND PHOTORESIST COMPOSITION
    • 丙烯酸酯衍生物,高分子化合物和光催化剂组合物
    • US20130164675A1
    • 2013-06-27
    • US13820855
    • 2011-09-02
    • Osamu NakayamaManabu Yada
    • Osamu NakayamaManabu Yada
    • G03F7/004
    • G03F7/004C07D209/56C07D307/00C07D327/04C07D493/08C07D497/18C08F220/28C08F220/36C08F2220/1833G03F7/0397
    • The invention provides a novel acrylic ester derivative which can form a structural unit of a polymer to be incorporated into a photoresist composition; a polymer produced through polymerization of a raw material containing the acrylic ester derivative; and a photoresist composition which contains the polymer and which, as compared with the case of conventional ones, realizes formation of a high-resolution resist pattern having improved LWR. Specifically, the present invention provides, for example, an acrylic ester derivative represented by the following formula (1): wherein R1 represents a hydrogen atom, a methyl group, or a trifluoromethyl group; each of R2, R3, R5, R7, R8, and R10 represents a hydrogen atom, an alkyl group, a cycloalkyl group, or an alkoxy group; each of R4 and R6 represents a hydrogen atom, an alkyl group, a cycloalkyl group, or an alkoxy group, or R4 and R6 are linked together to form an alkylene group, —O—, or —S—; R9 represents a hydrogen atom, an alkyl group, a cycloalkyl group, an alkoxy group, or —COOR11; R11 represents an alkyl group; X represents —O— or >N—R12; R12 represents a hydrogen atom or an alkyl group; Y represents >C═O or >S(═O)n; n is an integer of 0 to 2; and the wavy lines represent that either R8 or R9 may be in an endo or exo position.
    • 本发明提供了一种新型的丙烯酸酯衍生物,其可形成待掺入光致抗蚀剂组合物中的聚合物的结构单元; 通过含有丙烯酸酯衍生物的原料的聚合制备的聚合物; 和含有聚合物的光致抗蚀剂组合物,与现有技术的情况相比,实现了具有改善的LWR的高分辨率抗蚀剂图案的形成。 具体地说,本发明提供例如由下式(1)表示的丙烯酸酯衍生物:其中R1表示氢原子,甲基或三氟甲基; R 2,R 3,R 5,R 7,R 8和R 10各自表示氢原子,烷基,环烷基或烷氧基; R4和R6各自表示氢原子,烷基,环烷基或烷氧基,或R4和R6连接在一起形成亚烷基,-O-或-S-; R9表示氢原子,烷基,环烷基,烷氧基或-COOR11; R11表示烷基; X表示-O-或> N-R12; R12表示氢原子或烷基; Y表示> C = O或> S(= O)n; n为0〜2的整数, 并且波浪线表示R8或R9可以处于内部或外部位置。