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    • 9. 发明申请
    • SHAPE MEASURING METHOD AND DEVICE
    • 形状测量方法和设备
    • US20150241206A1
    • 2015-08-27
    • US14433000
    • 2013-10-02
    • HITACHI, LTD.
    • Hiroaki KasaiTatsuo HariyamaMasahiro Watanabe
    • G01B11/14G01B11/24
    • G01B11/14G01B11/12G01B11/24G01B11/2441G01C3/08G01S7/4812G01S7/4813G01S7/4818G01S17/08G01S17/42G01S17/88G01S17/89
    • The purpose of the present invention is to provide a shape inspection device that improves, without making the device larger, durability and measurement precision by measuring a plurality of points with a single distance sensor. The present invention provides a shape measuring device that measures the shape of an object to be measured and that comprises: a distance sensor that calculates the distance to the object to be measure by irradiating a measurement light toward the object to be measured and detecting the reflected light from the object to be measured; a separating unit that separates the measurement light from the distance sensor into a plurality of measurement light rays to be irradiated onto a plurality of measuring points; and a selecting unit that selects, from the plurality of measurement light beams separated by the separating unit, the measurement light to irradiate the object to be measured.
    • 本发明的目的是提供一种形状检查装置,其通过用单个距离传感器测量多个点来改善而不使装置更大,耐久性和测量精度。 本发明提供了一种测量待测物体的形状的形状测量装置,包括:距离传感器,其通过向测量对象照射测量光并计算被反射物体的距离来计算要测量的物体的距离 来自待测物体的光; 分离单元,其将来自距离传感器的测量光分离成多个待照射到多个测量点上的测量光; 以及选择单元,其从由分离单元分离的多个测量光束中选择测量光以照射被测量物体。