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    • 10. 发明授权
    • Measuring apparatus including multi-wavelength interferometer
    • 测量装置包括多波长干涉仪
    • US09372068B2
    • 2016-06-21
    • US13711289
    • 2012-12-11
    • CANON KABUSHIKI KAISHA
    • Akihiro HatadaYoshiyuki Kuramoto
    • G01B9/02G01B11/24
    • G01B9/02096G01B9/02002G01B9/02007G01B9/02027G01B9/02061G01B9/02067G01B9/02068G01B9/02082G01B11/2441G01B2290/45G01B2290/50G01B2290/70
    • A measuring apparatus for measuring a position or a shape of a surface to be inspected includes a multi-wavelength interferometer and a control unit. The multi-wavelength interferometer includes an optical system that causes light to be inspected, which enters the surface to be inspected and is reflected by the surface to be inspected, and reference light to interfere with each other, a spectroscopic unit that divides interference light between the light to be inspected and the reference light into each wavelength, and a detector that detects the interference light and is provided for each divided interference light and an optical member that can adjust a position of a light guide portion that guides light from the spectroscopic unit to the detector. The control unit controls the optical member by using information related to inclination of the surface to be inspected to adjust the position of the light guide portion.
    • 用于测量要检查的表面的位置或形状的测量装置包括多波长干涉仪和控制单元。 多波长干涉仪包括使得检查光的光学系统,其进入待检查的表面并被待检查的表面反射,并且参考光彼此干涉;分光单元,其将干涉光 要检查的光和参考光到每个波长,以及检测器,其检测干涉光并为每个分开的干涉光提供;以及光学部件,其可以调节导光部分的位置,导光部分引导来自分光单元的光 到检测器。 控制单元通过使用与要检查的表面的倾斜相关的信息来控制光学构件,以调整导光部的位置。