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1. 发明公开

US20240027176A1 SYSTEM FOR TRACKING AN OBJECT 审中-公开
公开(公告)号：US20240027176A1
公开(公告)日：2024-01-25
申请号：US18017390
申请日：2021-07-22
申请人： UNIVERSITA' DEGLI STUDI DI SIENA
发明人： Valerio BIANCALANA , Piero CHESSA , Roberto CECCHI , Marco MANDALA' , Domenico PRATTICHIZZO
IPC分类号： G01B7/02 , G01B7/004 , G01R33/00
CPC分类号： G01B7/023 , G01B7/004 , G01R33/0094
摘要： A system (50) for tracking an object (1) comprises a magnetic field source (10) configured to be fixed to this object (1); a magnetometric data collection unit (20) that uses magnetic field sensors (22) fixed at predetermined positions on a support (23) to form an array (21), and that includes a sensor control unit (25) for controlling the magnetic field sensors (22); a data processing unit (30) configured to receive the magnetic field data from the sensor control unit (25) and to calculate from these data position coordinates of the magnetic field source (10) with respect to the array (21) forming a vector of such position coordinates which minimizes the distance between magnetic field values expected at the sensor positions (22) and magnetic field values collected by the collection unit (20), wherein the magnetic field source (10) is arranged to generate a local magnetic field (4), at the magnetic field sensors (22), of intensity set between 5 and 500 microtesla, so that the magnetic field sensors (22) detect both the local magnetic field (4) and the geomagnetic field (5), and wherein the data processing unit (30) is configured to recognize contributes of the local magnetic field (4) and of the geomagnetic field (5) in the magnetic field data, and is configured to determine location and of orientation coordinates of the magnetic field source (10) with respect to the array (21), as well as orientation coordinates of the array (21) with respect to the geomagnetic field (5). This way, an accurate tracking can be obtained of the displacements of the object (1) even if the array (21) is connected to a support that is movable with respect to an absolute reference system integral to the geomagnetic by fixing array to the subject's head.

2. 发明授权

US10847393B2 Method and apparatus for measuring process kit centering 有权
公开(公告)号：US10847393B2
公开(公告)日：2020-11-24
申请号：US16121183
申请日：2018-09-04
申请人： APPLIED MATERIALS, INC.
发明人： Charles G. Potter , Eli Mor
IPC分类号： G01R27/26 , H01L21/67 , G01B7/14 , G01B7/00 , G01B7/06 , G01B7/02
CPC分类号： H01L21/67259 , G01B7/003 , G01B7/023 , G01B7/08 , G01B7/087 , G01B7/14 , B65H2220/03 , B65H2511/13 , B65H2511/162 , B65H2515/712
摘要： Embodiments disclosed herein include a sensor wafer. In an embodiment, the sensor wafer comprises a substrate, wherein the substrate comprises a first surface, a second surface opposite the first surface, and an edge surface between the first surface and the second surface. In an embodiment, the sensor wafer further comprises a plurality of sensor regions formed along the edge surface, wherein each sensor region comprises a self-referencing capacitive sensor.

3. 发明授权

US10837803B2 Inspection system with grounded capacitive sample proximity sensor 有权
公开(公告)号：US10837803B2
公开(公告)日：2020-11-17
申请号：US16401324
申请日：2019-05-02
申请人： KLA-Tencor Corporation
发明人： Yang Xie , Feilong Lin , Rushford A. Ogden
IPC分类号： G01R27/26 , G01D5/241 , G01B7/14 , G01B7/02 , G01B7/00 , H03K17/955 , H03K17/96
CPC分类号： G01D5/2417 , G01B7/003 , G01B7/02 , G01B7/023 , G01B7/14 , H03K17/955 , H03K17/962 , H03K2017/9602 , H03K2217/960755
摘要： A capacitive proximity measurement system may include a sensor electrode configured to be positioned proximate to a conductive measurement area on a test surface of a sample, a plate connector configured to provide an electrical connection between a system ground and a conductive plate parallel to the test surface, and a controller. A measurement circuit may be formed between the sensor electrode and the conductive plate, where the test surface is electrically floating with respect to the sensor electrode and the conductive plate. The controller may further adjust a voltage of the sensor electrode with respect to the conductive plate, determine a capacitance associated with the measurement circuit, and determine a distance between the electrode and the measurement area based on the capacitance associated with the measurement circuit.

4. 发明申请

US20190170495A1 FULLY INTEGRAL EPOXY CAP PROBE 审中-公开
公开(公告)号：US20190170495A1
公开(公告)日：2019-06-06
申请号：US15832184
申请日：2017-12-05
申请人： UNITED TECHNOLOGIES CORPORATION
发明人： Eli Cole Warren , Peter J. Walsh
IPC分类号： G01B7/02 , G01B7/14 , F01D11/12 , F01D11/14
CPC分类号： G01B7/023 , F01D11/12 , F01D11/14 , F01D17/02 , F05D2270/80 , F05D2300/44 , G01B7/14
摘要： A fully integral epoxy cap probe may comprise a body having a cavity disposed radially outward of a fan blade and comprising a first material, a frame disposed within the cavity and comprising a second material, a first sensor element and a ground plane disposed within the frame, the first sensor element and the ground plane comprising a third material, and a first soft lead in electronic communication with the first sensor element and the ground plane.

5. 发明申请

US20180313665A1 DISPLACEMENT DETECTION DEVICE 审中-公开
公开(公告)号：US20180313665A1
公开(公告)日：2018-11-01
申请号：US15772831
申请日：2016-11-02
申请人： AMITEQ CO., LTD.
发明人： Daisuke GOTO , Nobuyuki AKATSU , Kazuya SAKAMOTO
IPC分类号： G01D5/20
CPC分类号： G01D5/2006 , G01B7/023 , G01D5/2026 , G01L5/00
摘要： A device has a construction capable of promoting miniaturization, and comprises: a coil; a magnetism-responsive member disposed so as to be displaced relative to the coil according to a position of a detection object; and a self-oscillation circuit that incorporates the coil therein as an oscillation element so that an oscillation frequency varies with an inductance variation of the coil responsive to an displacement of the magnetism-responsive member relative to the coil. An arithmetic section generates a measured value responsive to oscillation frequency based on an oscillation output of the self-oscillation circuit, calculates velocity data by differentiating successive measured values, and calculates displacement data by integrating the velocity data. An offset error component caused by the peripheral temperature or a mechanical attachment position of the detection device can be automatically cancelled or reduced by the differential operation for calculating the velocity data, and precise displacement detection can be realized.

6. 发明申请

US20180231398A1 PROXIMITY SENSOR 审中-公开
公开(公告)号：US20180231398A1
公开(公告)日：2018-08-16
申请号：US15751156
申请日：2017-01-06
申请人： OMRON Corporation
发明人： Masayuki KOIZUMI , Minami WAZUMI , Chunmei HUANG , Kenji HOMMA
IPC分类号： G01D5/22
CPC分类号： G01D5/2208 , G01B7/003 , G01B7/004 , G01B7/023 , G01D5/2225 , H03K17/9525
摘要： A proximity sensor is provided with coils (11, 12) disposed in a pre-set positional relationship, a first distance calculation unit (31) and a second distance calculation unit (32) for calculating first distance information (d1) and second distance information (d2), respectively, from the coils (11, 12) to a detection object (W) on the basis of reception results (voltages V1, V2) of the coils (11, 12), and a position estimating unit (33) for estimating the position, such as distance and azimuth, of the detection object (W) on the basis of the first distance information (d1), the second distance information (d2), and the positional relationship of the coils (11, 12) .

7. 发明申请

US20180216926A1 PROXIMITY SENSOR 审中-公开
公开(公告)号：US20180216926A1
公开(公告)日：2018-08-02
申请号：US15820453
申请日：2017-11-22
申请人： OMRON Corporation
发明人： Takaaki SANDA
IPC分类号： G01B7/02
CPC分类号： G01B7/023
摘要： The proximity sensor (1) includes a core (3) configured to hold a coil (2), a board (5) on which a proximity detection circuit is mounted, and an intermediate component which is a fixing member (4) formed of a resin to fix the board to the core and has a conductive pattern configured to electrically connect the coil and a wiring provided on the board.

8. 发明申请

US20180212602A1 Housings for Inductive Proximity Sensors 审中-公开
公开(公告)号：US20180212602A1
公开(公告)日：2018-07-26
申请号：US15410844
申请日：2017-01-20
申请人： Robert Hooper
发明人： Robert Hooper
IPC分类号： H03K17/945 , G01B7/02
CPC分类号： G01B7/023 , G01D11/245 , G01V3/10 , H03K17/9505
摘要： Inductive Proximity Sensors are non-contact sensing devices used in manufacturing processes to sense metal targets. In practice, it is common for objects to contact the sensor causing the sensor to malfunction. An inductive sensor with improved durability is required. An inductive proximity sensor includes an exterior housing, an interior sensing coil and electronic circuit, and a connector. The Exterior housing is produced from one piece of metal bar, bored from one end to the tip of the other end, leaving the cylindrical tube open only on one end. The Exterior Housing is produced with an Inside Dimension that is smaller than previous proximity sensors and places the coil and electronic circuit further away from the Outside Dimension of the Exterior Housing. The interior sensing coil and electronic circuit are protected by the thick casing of the Exterior housing to improve structural rigidity and the longevity of operation in manufacturing processes. The design of the Exterior Housing has the ability to withstand extreme shear forces from contact abuse.

9. 发明申请

US20180093695A1 DEVICE FOR DETECTING APPROACH DISTANCE OF LIVING BODY 审中-公开
公开(公告)号：US20180093695A1
公开(公告)日：2018-04-05
申请号：US15717504
申请日：2017-09-27
申请人： MAZDA MOTOR CORPORATION
发明人： Reiji HATTORI , Yuhei MORIMOTO , Yutarou ONO , Masayuki WATANABE , Nanae MICHIDA , Atsuhide KISHI , Kazuo NISHIKAWA
IPC分类号： B62D1/04 , G01B7/14
CPC分类号： B62D1/046 , B60Y2400/301 , G01B7/023 , G01B7/14
摘要： A device for detecting an approach distance of a living body is provided. The device detects hover touch. The surfaces of a first electrode and a second electrode are covered by an insulator to form an electrode section. A high-frequency power source is connected to the first electrode via an inductive element for forming a resonance circuit. An ammeter is connected to the second electrode. A correlation between a resonance frequency and a resonance resistance is obtained. It is determined that the living body is in hover touch with the electrode section when the resonance resistance is higher than an initial resistance corresponding to a leakage resistance between the first and second electrodes, and the resonance resistance increases or decreases whereas the resonance frequency decreases or increases, based on the correlation.

10. 发明授权

US09817146B2 Method and device for measuring distances by means of inductive sensors 有权
公开(公告)号：US09817146B2
公开(公告)日：2017-11-14
申请号：US15225316
申请日：2016-08-01
申请人： Gerd Reime
发明人： Gerd Reime
IPC分类号： G01B7/14 , G01V3/10 , H01F38/14 , G01B7/02
CPC分类号： G01V3/10 , G01B7/023 , G01B7/14 , H01F38/14
摘要： Disclosed is method for measuring influence of or propagation time of inductive fields including producing and detecting a first inductive temporal field change and a first change value, producing and detecting a further inductive temporal field change and further field change, at least one of the changes being influenced by an object, comparing the first and further change values to produce a comparison value used to produce amplitude values such that amplitude of the first or further change value are substantially of the same magnitude, detecting a clock pulse alternation signal corresponding to the field change, determining a difference value by a comparison of the clock pulse alternation signals, changing the difference value to change phase delay of the first or further field change until the difference value is zero, using the phase delay to determine influence/propagation time of the inductive change.

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