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1. 发明申请

US20170261440A1 METHOD AND APPARATUS TO DETECT DEFECTS IN TRANSPARENT SOLIDS 审中-公开
公开(公告)号：US20170261440A1
公开(公告)日：2017-09-14
申请号：US15607648
申请日：2017-05-29
申请人： Zeta Instruments, Inc.
发明人： Steven W. Meeks , Ronny Soetarman
IPC分类号： G01N21/958
CPC分类号： G01N21/958 , G01N21/47 , G01N21/8422 , G01N21/896 , G01N21/9505 , G01N21/9506 , G01N2021/4711 , G01N2021/4735 , G01N2021/8967
摘要： A method and apparatus to measure specular reflection intensity, specular reflection angle, near specular scattered radiation, and large angle scattered radiation and determine the location and type of defect present in a first and a second transparent solid that have abutting surfaces. The types of defects include a top surface particle, an interface particle, a bottom surface particle, an interface bubble, a top surface pit, and a stain. The four measurements are conducted at multiple locations along the surface of the transparent solid and the measured information is stored in a memory device. The difference between an event peak and a local average of measurements for each type of measurement is used to detect changes in the measurements. Information stored in the memory device is processed to generate a work piece defect mapping indicating the type of defect and the defect location of each defect found.

2. 发明申请

US20160169802A1 CLASSIFICATION OF SURFACE FEATURES USING FLUORESENCE 有权
标题翻译：使用荧光分类表面特征
公开(公告)号：US20160169802A1
公开(公告)日：2016-06-16
申请号：US15047563
申请日：2016-02-18
申请人： Seagate Technology LLC
发明人： Joachim Walter Ahner , David M. Tung , Samuel Kah Hean Wong , Henry Luis Lott , Stephen Keith McLaurin , Maissarath Nassirou , Florin Zavaliche
IPC分类号： G01N21/64 , G01N21/88 , G01N21/95
CPC分类号： G01N21/6456 , G01N21/47 , G01N21/63 , G01N21/64 , G01N21/8851 , G01N21/94 , G01N21/95 , G01N21/9501 , G01N21/9506 , G01N2021/8864 , G01N2201/06153 , G01N2201/0683
摘要： Provided herein is an apparatus, including a photon emitter configured to emit photons onto a surface of an article, a photon detector array configured to receive photons from surface features of the article; and a processing means configured for processing photon-detector-array signals corresponding to photons scattered from the surface features and photons fluoresced from the surface features, wherein the processing means is further configured for classifying the surface features of the article.
摘要翻译：本文提供了一种装置，包括被配置为将光子发射到物品的表面上的光子发射器，被配置为从制品的表面特征接收光子的光子检测器阵列; 以及处理装置，其被配置用于处理对应于从所述表面特征散射的光子和从所述表面特征发荧光的光子的光子检测器阵列信号，其中所述处理装置还被配置为对所述物品的表面特征进行分类。

3. 发明申请

US20160069814A1 ARTICLE EDGE INSPECTION 审中-公开
标题翻译：文章检查
公开(公告)号：US20160069814A1
公开(公告)日：2016-03-10
申请号：US14927291
申请日：2015-10-29
申请人： Seagate Technology LLC
发明人： David M. Tung , Joachim W. Ahner
IPC分类号： G01N21/88
CPC分类号： G01N21/8806 , G01N21/88 , G01N21/9503 , G01N21/9506 , G01N2201/061
摘要： Provided herein is an apparatus, including a photon emitter and a photon detector array. The photon emitter is configured to emit photons onto an entire surface edge of an article. The photon detector array is configured to receive scattered photons from the entire surface edge of the article, and includes a number of photon detectors. The scattered photons are photons emitted from the photon emitter that are scattered from features of the surface edge of the article.
摘要翻译：本文提供了一种包括光子发射器和光子检测器阵列的装置。光子发射器被配置为将光子发射到物品的整个表面边缘上。光子检测器阵列被配置为从物品的整个表面边缘接收散射的光子，并且包括多个光子检测器。散射的光子是从光子发射器发射的从物体的表面边缘的特征散射的光子。

4. 发明申请

US20160069799A1 REFLECTIVE SURFACES FOR SURFACE FEATURES OF AN ARTICLE 有权
标题翻译：表面特征的反射表面
公开(公告)号：US20160069799A1
公开(公告)日：2016-03-10
申请号：US14935097
申请日：2015-11-06
申请人： Seagate Technology LLC
发明人： Joachim W. Ahner , David M. Tung , Stephen Keith McLaurin , Travis W. Grodt
IPC分类号： G01N21/47 , G01N21/88
CPC分类号： G01N21/474 , G01N21/8806 , G01N21/95 , G01N21/9506
摘要： Provided herein is an apparatus including a photon emitter configured for reflecting photons from a surface of an article onto a first reflective surface. In addition, a second reflective surface is configured for reflecting photons from the surface of the article back onto the surface of the article. The apparatus also includes a detector configured to provide information corresponding to photons scattered from features of the article.
摘要翻译：本文提供了一种包括光子发射器的设备，其被配置用于将光子从物体的表面反射到第一反射表面上。此外，第二反射表面被配置为将来自物品表面的光子反射回到物品的表面上。该装置还包括检测器，其被配置为提供对应于从物品的特征分散的光子的信息。

5. 发明授权

US09036142B2 Surface features mapping 有权
标题翻译：表面特征映射
公开(公告)号：US09036142B2
公开(公告)日：2015-05-19
申请号：US13890470
申请日：2013-05-09
申请人： Seagate Technology LLC
发明人： Joachim W. Ahner , S. Keith McLaurin
IPC分类号： G01N21/00 , G01N21/88 , G01N21/17 , G01N21/47 , G01N21/94 , G01N21/95
CPC分类号： G01N21/8806 , G01N21/47 , G01N21/8851 , G01N21/94 , G01N21/95 , G01N21/9501 , G01N21/9506 , G01N2021/8864 , G01N2201/061 , G01N2201/12
摘要： Provided herein is an apparatus, including a photon emitting means for emitting photons onto a surface of an article, a photon detecting means for detecting photons scattered from features in the surface of the article; and a mapping means for mapping the features in the surface of the article, wherein the apparatus is configured to process more than one article every 100 seconds.
摘要翻译：本文提供了一种装置，包括用于将光子发射到物品的表面上的光子发射装置，用于检测从制品的表面中的特征散射的光子的光子检测装置; 以及用于映射制品表面中的特征的映射装置，其中该装置被配置为每100秒处理多于一个物品。

6. 发明申请

US20130286386A1 OPTICAL SURFACE DEFECT INSPECTION APPARATUS AND OPTICAL SURFACE DEFECT INSPECTION METHOD 审中-公开
标题翻译：光学表面缺陷检查装置和光学表面缺陷检查方法
公开(公告)号：US20130286386A1
公开(公告)日：2013-10-31
申请号：US13865406
申请日：2013-04-18
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Shigeru SERIKAWA , Toshiaki SUGITA , Keiji KATO , Fariz bin ABDULRASHID
IPC分类号： G01N21/95 , G01N21/956
CPC分类号： G01N21/9501 , G01N21/8851 , G01N21/9506 , G01N21/956
摘要： The invention provides an optical surface defect inspection apparatus and an optical surface defect inspection method that reduces an influence from a dead zone of a sensor array and that reduces the influence from reduction of a detected light amount in a case of extending over light receiving elements, thereby enabling a defect inspection with high sensitivity. According to the invention, a subject is irradiated with an inspection light, an image is formed on the sensor array including the light receiving elements separated by the dead zone insensitive to light scattered by a surface of the subject and arranged in a plurality of lines, outputs from two adjacent light receiving elements are added, and a defect on the surface of the subject is inspected for based on the result of the addition.
摘要翻译：本发明提供了一种光学表面缺陷检查装置和光学表面缺陷检查方法，其减少了传感器阵列的死区的影响，并且在延伸到光接收元件的情况下减少了检测光量的减小的影响，从而能够进行高灵敏度的缺陷检查。根据本发明，用检查光照射被检体，在由包含受到被检体的表面散射的光不敏感的死区分离的光接收元件的传感器阵列上形成图像，并配置在多条线上，添加来自两个相邻的光接收元件的输出，并且基于相加的结果来检查被检体的表面上的缺陷。

7. 发明授权

US08472020B2 Process for enhancing dye polymer recording yields by pre-scanning coated substrate for defects 失效
标题翻译：用于通过预扫描涂覆的基底以提供缺陷来提高染料聚合物记录产率的方法
公开(公告)号：US08472020B2
公开(公告)日：2013-06-25
申请号：US11057941
申请日：2005-02-15
申请人： Thomas I. Sweeney
发明人： Thomas I. Sweeney
IPC分类号： G01N21/00 , G11B7/24
CPC分类号： G11B7/261 , G01N21/9506 , G11B7/268
摘要： A method for enhancing recording yields by monitoring dye polymer formation on a glass substrate is provided. After the glass substrate is coated with a dye polymer layer and before pits are formed on the dye-polymer coated glass, the dye polymer coated glass substrate is scanned to detect defects. The dye-polymer coated glass is discarded on the one hand if the defects detected through the scanning are at or above an unacceptable threshold level, and on the other hand data is written on the dye-polymer coated glass if the defects detected through the scanning are below the unacceptable threshold level.
摘要翻译：提供了通过监测玻璃基板上的染料聚合物形成来提高记录产率的方法。在用染料聚合物层涂覆玻璃基板之后，在染料聚合物涂覆的玻璃上形成凹坑之前，扫描染料聚合物涂覆的玻璃基板以检测缺陷。如果通过扫描检测到的缺陷处于或高于不可接受的阈值水平，则一方面丢弃染料聚合物涂覆的玻璃，另一方面，如果通过扫描检测到缺陷，则将数据写在染料聚合物涂覆的玻璃上低于不可接受的阈值水平。

8. 发明申请

US20120205850A1 SUBSTRATE HOLDING APPARATUS, AND INSPECTION OR PROCESSING APPARATUS 有权
标题翻译：基板控制装置，检查或处理装置
公开(公告)号：US20120205850A1
公开(公告)日：2012-08-16
申请号：US13454897
申请日：2012-04-24
申请人： Kazuhiro ZAMA , Koichi Asami , Yusuke Miyazaki
发明人： Kazuhiro ZAMA , Koichi Asami , Yusuke Miyazaki
IPC分类号： B23Q1/25
CPC分类号： G01N21/9501 , G01N21/9506 , H01L21/68728
摘要： In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.
摘要翻译：为了实现基板的高精度定位和强压，本发明提供了一种基板保持装置，其包括：旋转台，其具有支撑基板的外周侧表面的下侧的倾斜面，该床在基板的法线与基板一起作为旋转轴; 位置限制单元，与旋转床一起旋转，并且在旋转之前通过在基板的外周侧表面的上侧按压圆周上的多个点将基板限制在旋转床上的预定位置; 以及与旋转床一起旋转的按压单元，并且通过在旋转期间按压基板的外周侧面的上侧的多个点，将基板压靠在倾斜面上。

9. 发明申请

US20120163698A1 Method for Inspection and Detection of Defects on Surfaces of Disc-Shaped Objects and Computer System with a Software Product for Carrying out the Method 有权
标题翻译：使用软件产品执行方法检查和检测圆盘形物体和计算机系统表面缺陷的方法
公开(公告)号：US20120163698A1
公开(公告)日：2012-06-28
申请号：US13293169
申请日：2011-11-10
申请人： Detlef Michelsson
发明人： Detlef Michelsson
IPC分类号： G06K9/78
CPC分类号： G06F17/153 , G01N21/9501 , G01N21/9506 , G01N21/956 , G01N2021/9513 , G06T7/001 , G06T2207/10024 , G06T2207/30121 , G06T2207/30148
摘要： An image (30) of a disc-shaped object (100) is recorded, wherein the entire surface (100O) is captured with a plurality of fields (60). A difference image (31) is formed, by subtracting a reference from each field (60) of the surface (100O) of the disc-shaped object (100), and subject to a color transformation, wherein by a suitable choice of transformation signals in one channel are maximized, while at the same time undesired variations, caused by production, of the fields (60) are moved to a different channel. That combination of transformation and detection channel is chosen for which the largest number of pixels of a field (60) with the defect to be found are located outside the spread of the pixels of the respective field (60) on the surface (100O) of the respective disc-shaped object (100) from production and provide the largest signals for the defect.
摘要翻译：记录盘形物体（100）的图像（30），其中，整个表面（100O）被捕获有多个场（60）。通过从盘形物体（100）的表面（100O）的每个场（60）中减去参考，并进行颜色变换，形成差分图像（31），其中通过适当的变换信号选择在一个通道中被最大化，同时由场（60）产生的不期望的变化被移动到不同的通道。选择变换和检测通道的组合，其中具有要找到的缺陷的场（60）的最大数量的像素位于相应场（60）的像素的扩展之外，表面（100）的表面（100O）相应的盘形物体（100）从生产中提供最大的缺陷信号。

10. 发明授权

US08183549B2 Substrate holding apparatus, and inspection or processing apparatus 有权
标题翻译：基板保持装置，检查或处理装置
公开(公告)号：US08183549B2
公开(公告)日：2012-05-22
申请号：US13175429
申请日：2011-07-01
申请人： Kazuhiro Zama , Koichi Asami , Yusuke Miyazaki
发明人： Kazuhiro Zama , Koichi Asami , Yusuke Miyazaki
IPC分类号： H01L21/68
CPC分类号： G01N21/9501 , G01N21/9506 , H01L21/68728
摘要： In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.
摘要翻译：为了实现基板的高精度定位和强压，本发明提供了一种基板保持装置，其包括：旋转台，其具有支撑基板的外周侧表面的下侧的倾斜面，该床在基板的法线与基板一起作为旋转轴; 位置限制单元，与旋转床一起旋转，并且在旋转之前通过在基板的外周侧表面的上侧按压圆周上的多个点将基板限制在旋转床上的预定位置; 以及与旋转床一起旋转的按压单元，并且通过在旋转期间按压基板的外周侧面的上侧的多个点，将基板压靠在倾斜面上。

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