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    • 6. 发明授权
    • MEMS-based rotation sensor for seismic applications and sensor units having same
    • 用于地震应用的基于MEMS的旋转传感器和具有相同的传感器单元
    • US09547095B2
    • 2017-01-17
    • US14104806
    • 2013-12-12
    • WESTERNGECO L.L.C.
    • Maxime ProjettiOlivier VancauwenbergheNicolas GoujonHans Paulson
    • G01V1/00G01V1/16G01P15/125G01V1/38G01V1/18G01C19/5712
    • G01V1/164G01C19/5712G01P15/125G01V1/003G01V1/18G01V1/189G01V1/38G01V1/3808
    • The present disclosure is directed to a MEMS-based rotation sensor for use in seismic data acquisition and sensor units having same. The MEMS-based rotation sensor includes a substrate, an anchor disposed on the substrate and a proof mass coupled to the anchor via a plurality of flexural springs. The proof mass has a first electrode coupled to and extending therefrom. A second electrode is fixed to the substrate, and one of the first and second electrodes is configured to receive an actuation signal, and another of the first and second electrodes is configured to generate an electrical signal having an amplitude corresponding with a degree of angular movement of the first electrode relative to the second electrode. The MEMS-based rotation sensor further includes closed loop circuitry configured to receive the electrical signal and provide the actuation signal. Related methods for using the MEMS-based rotation sensor in seismic data acquisition are also described.
    • 本公开涉及用于地震数据采集的基于MEMS的旋转传感器和具有其的传感器单元。 基于MEMS的旋转传感器包括衬底,设置在衬底上的锚和通过多个弯曲弹簧联接到锚固件的校验物质。 证明物质具有连接到其上并从其延伸的第一电极。 第二电极被固定到基板,并且第一和第二电极中的一个被配置为接收致动信号,并且第一和第二电极中的另一个被配置为产生具有对应于角度运动程度的幅度的电信号 的第一电极相对于第二电极。 基于MEMS的旋转传感器还包括闭环电路,其被配置为接收电信号并提供致动信号。 还描述了在地震数据采集中使用基于MEMS的旋转传感器的相关方法。
    • 7. 发明申请
    • MICROFABRICATION TECHNOLOGY FOR PRODUCING SENSING CELLS FOR MOLECULAR ELECTRONIC TRANSDUCER BASED SEISMOMETER
    • 用于生产用于分子式电子传感器的地震仪的感应电池的微生物技术
    • US20160291176A1
    • 2016-10-06
    • US15037449
    • 2014-11-20
    • Hongyu YuHai Huang
    • Hongyu YuHai Huang
    • G01V1/18G01H11/06G01P13/00
    • G01V1/18G01H11/06G01P13/00
    • The invention relates to microfabrication technology for producing sensing cells, for use, for example, in molecular electronic transducer (MET) based seismometers devices. In some aspects, a method for fabricating a sensing element is provided. The method includes providing a first wafer including a first substrate, a second substrate, and a first insulating layer between therebetween, etching a first fluid throughhole through the first substrate, the first insulating layer, and the second substrate, and coating the first substrate and second substrate with a first and second conductive coating, respectively. The method also includes providing a second wafer including a third substrate, a fourth substrate, and a second insulating layer therebetween, etching a second fluid throughhole through the third substrate, the second insulating layer, and the fourth substrate, and coating the third substrate with a third conductive coating from top and the fourth substrate with a fourth conductive coating from back.
    • 本发明涉及用于生产感测单元的微细加工技术,其用于例如基于分子电子换能器(MET)的地震仪装置中。 在一些方面,提供了一种用于制造感测元件的方法。 该方法包括提供包括第一衬底,第二衬底和第二衬底之间的第一绝缘层的第一晶片,通过第一衬底,第一绝缘层和第二衬底蚀刻第一流体通孔,以及涂覆第一衬底和 第二基板分别具有第一和第二导电涂层。 该方法还包括提供包括第三衬底,第四衬底和第二绝缘层的第二晶片,通过第三衬底,第二绝缘层和第四衬底蚀刻第二流体通孔,并且用第 来自顶部和第四基底的第三导电涂层,其后面具有第四导电涂层。
    • 8. 发明授权
    • Beam accelerometer
    • 光束加速度计
    • US09400337B2
    • 2016-07-26
    • US13834467
    • 2013-03-15
    • L-3 Communications Corporation
    • Sterling William JonesDavid Ralph Kimball
    • H01L41/113G01V1/18G01P15/09
    • G01V1/18G01P15/09G01V1/181H01L41/1132
    • Methods and devices are disclosed for measuring low levels of acceleration caused by low frequency seismic waves. For example, an omnidirectional beam accelerometer configured to measure low frequency waves is disclosed. The omnidirectional beam accelerometer may include three beam acceleration sensors. Each beam acceleration sensor may include a respective mass and a respective beam. Each respective beam may be comprised at least in part of a piezoelectric material. Each beam acceleration sensor may have a ratio of mass density [kg/m3] to beam stiffness [N/m] of at least 4.5×10−5 kg/Nm2. The omnidirectional beam accelerometer may also include a housing to ensure the sensors are operating in orthogonal directions and an interface circuit to interface between the sensor and external circuitry.
    • 公开了用于测量由低频地震波引起的低加速度的方法和装置。 例如,公开了一种配置成测量低频波的全向光束加速度计。 全向光束加速度计可以包括三个光束加速度传感器。 每个光束加速度传感器可以包括相应的质量和相应的光束。 每个相应的光束可以至少部分地由压电材料构成。 每个光束加速度传感器可以具有至少4.5×10-5kg / Nm2的质量密度[kg / m3]与光束刚度[N / m]的比率。 全向光束加速度计还可以包括壳体以确保传感器在正交方向上操作,以及接口电路以在传感器和外部电路之间进行接口。