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1. 发明申请

US20190187677A1 SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR FAULT DETECTION AND LOCATION IN POWER GRID 审中-公开
公开(公告)号：US20190187677A1
公开(公告)日：2019-06-20
申请号：US16285590
申请日：2019-02-26
申请人： International Business Machines Corporation
发明人： Xin Jie Lv , Lingyun Wang , Wei Da Xu , Chao Zhang , Ke Xu Zou
IPC分类号： G05B23/02 , H02J3/00 , H02J13/00
CPC分类号： G05B23/0262 , G05B2219/32222 , G06Q50/06 , H02J3/00 , H02J13/0006 , H02J2003/007 , Y02E60/74 , Y02E60/76 , Y02P90/22 , Y04S10/30 , Y04S40/22
摘要： A method, system, and computer program product, include recording high-frequency wave data of local arid adjacent fault curves of a power grid to compare the high-frequency wave data with historical fault data to detect an actual fault region in the power grid, the power grid having a plurality of sensors distributed in the power grid, each sensor being upstream of one adjacent sensor and downstream of an other adjacent sensor.

2. 发明授权

US09915932B2 System and method for equipment monitoring using a group candidate baseline and probabilistic model 有权
公开(公告)号：US09915932B2
公开(公告)日：2018-03-13
申请号：US14556728
申请日：2014-12-01
申请人： Applied Materials, Inc.
发明人： Paul Alexander Llanos , Roger Steele Cornell
IPC分类号： G05B19/42 , G05B19/042 , G05B19/418 , G05B23/02 , H01L21/66
CPC分类号： G05B19/0428 , G05B19/41875 , G05B23/02 , G05B23/0235 , G05B2219/32179 , G05B2219/32201 , G05B2219/32222 , G05B2219/45031 , H01L22/00 , H01L22/12 , H01L22/20 , Y02P90/22
摘要： Systems and methods are provided for monitoring equipment in a semiconductor manufacturing facility. A processing device maintains baseline measurement record generated from measurements performed by a plurality of tools over a first time range. A measurement record is received, the measurement record corresponding to a measurement performed on a wafer, the wafer having been processed by a first tool of the plurality of tools. The measurement record is stored in a drift candidate table corresponding to a second time range. A determination is made as to whether the measurement record satisfy a set of excursion rules in view of the drift candidate table, and, in response to the determination, the measurement record is stored in an alert table.

3. 发明申请

US20170058885A1 METHOD AND SYSTEM FOR PROTECTION AND DIAGNOSIS OF A LINEAR COMPRESSOR, AND A LINEAR COMPRESSOR 审中-公开
标题翻译：线性压缩机和线性压缩机的保护和诊断方法与系统
公开(公告)号：US20170058885A1
公开(公告)日：2017-03-02
申请号：US15251106
申请日：2016-08-30
申请人： Whirlpool S.A.
发明人： Dietmar Erich Bernhard Lilie , Mario Henrique Farias Santos , Daniel de Figueiredo Maria
IPC分类号： F04B49/06 , F04B35/04 , G05B23/02 , F04B49/10
CPC分类号： F04B49/06 , F04B35/04 , F04B35/045 , F04B49/065 , F04B49/10 , F04B49/103 , F04B51/00 , F04B2201/0202 , F04B2207/043 , F04B2207/045 , G05B23/0275 , G05B2219/23211 , G05B2219/32222
摘要： A method for protection and diagnosis of a linear compression (2), the linear compressor (2) including at least one electronic control (11), the protection method being configured to perform the following steps at each work cycle of the linear compressor (2): detecting a suction time (ts) of the linear compressor (2); detecting a compression time (tc) of the linear compressor; calculating, after the step of detecting a compression time (tc) of the linear compressor, a decision parameter (ΔT) equivalent to the difference between the previously detected suction time (ts) and the compression time (tc).
摘要翻译：一种用于保护和诊断线性压缩的方法（2），所述线性压缩机（2）包括至少一个电子控制器（11），所述保护方法被配置为在线性压缩机的吃饭周期中的以下步骤（ 2）： - 检测线性压缩机（2）的吸入时间（ts）; - 检测所述线性压缩机的压缩时间（t c）; - 在检测到所述线性压缩机的压缩时间（t c）的步骤之后，计算与先前检测到的吸入时间（t s）和压缩时间（t c）之间的差相当的判定参数（“T”）。

4. 发明申请

US20150045928A1 Automatic Process Control of Additive Manufacturing Device 有权
标题翻译：添加剂制造装置的自动过程控制
公开(公告)号：US20150045928A1
公开(公告)日：2015-02-12
申请号：US14448229
申请日：2014-07-31
申请人： Massachusetts Institute of Technology
发明人： Alfonso Alexander Perez , Christopher Michael Haid , Mateo Pena Doll , Forrest W. Pieper
IPC分类号： B29C67/00 , G06N99/00 , G05B19/418
CPC分类号： B29C47/1045 , B29C47/0002 , B29C47/0014 , B29C47/0806 , B29C47/0866 , B29C47/862 , B29C47/92 , B29C64/106 , B29C64/112 , B29C2947/92571 , B29C2947/9258 , B29C2947/926 , B29C2947/92904 , B33Y30/00 , G05B19/41875 , G05B2219/32222 , Y02P90/14 , Y02P90/18 , Y02P90/265
摘要： Automatic process control of additive manufacturing. The system includes an additive manufacturing device for making an object and a local network computer controlling the device. At least one camera is provided with a view of a manufacturing volume of the device to generate network accessible images of the object. The computer is programmed to stop the manufacturing process when the object is defective based en the images of the object.
摘要翻译：添加剂制造的自动过程控制。该系统包括用于制造物体的添加剂制造装置和控制该装置的本地网络计算机。至少一个摄像机被提供有该设备的制造体积的视图以产生该物体的网络可访问图像。计算机被编程为当对象在对象的图像上有缺陷时停止制造过程。

5. 发明申请

US20120154149A1 AUTOMATED FAULT ANALYSIS AND RESPONSE SYSTEM 有权
标题翻译：自动故障分析与响应系统
公开(公告)号：US20120154149A1
公开(公告)日：2012-06-21
申请号：US13329649
申请日：2011-12-19
申请人： Jeffrey Trumble
发明人： Jeffrey Trumble
IPC分类号： G08B21/00 , G06F19/00
CPC分类号： G05B19/41875 , G05B2219/32222 , Y02P90/22
摘要： A process for determining a root cause problem for an out-of-tolerance component manufactured by a plurality of operations performed on the component. The process can include providing manufacturing data from at least a subset of plurality of operations performed on a plurality of components and discovering an out-of-tolerance measurement on at least a subset of the plurality of manufactured components downstream from the plurality of operations. An auto-regression analysis between the out-of-tolerance measurement and the plurality of upstream operations can also be performed using the manufacturing data. A correlation between at least one of the upstream operations and the out-of-tolerance measurement can be found and the correlation can result in the identification of at least one upstream operation that is the root cause of the out-of-tolerance measurement.
摘要翻译：一种用于确定由对该部件执行的多个操作制造的超出公差部件的根本原因问题的处理。该过程可以包括从在多个组件上执行的多个操作的至少一个子集提供制造数据，并且在多个操作的下游的多个制造组件的至少一个子集上发现超出公差测量。也可以使用制造数据来执行超出公差测量和多个上游操作之间的自回归分析。可以找到上游操作和超出公差测量中的至少一个之间的相关性，并且相关性可以导致作为超出公差测量的根本原因的至少一个上游操作的识别。

6. 发明授权

US07849363B2 Troubleshooting support device, troubleshooting support method and storage medium having program stored therein 有权
标题翻译：疑难解答支持设备，故障排除支持方法和存储有程序的存储介质
公开(公告)号：US07849363B2
公开(公告)日：2010-12-07
申请号：US11942284
申请日：2007-11-19
申请人： Hiroaki Mochizuki , Masami Mochizuki
发明人： Hiroaki Mochizuki , Masami Mochizuki
IPC分类号： G06F11/00
CPC分类号： G05B19/4184 , G05B2219/32222 , G05B2219/45031 , Y02P90/14 , Y02P90/22
摘要： A troubleshooting support device includes a keyword file storage unit in which keyword files holding keywords constituted with character strings contained in logs related to trouble that occurs in the substrate processing apparatus stored in advance, are stored. A keyword to be used for log search, selected from a keyword file specified based upon input information provided via an input unit, is set and also, a category-specific log file to be used for log analysis is set based upon input information provided via the input unit. Logs in the category-specific log file having been set are extracted and incorporated, and an analysis log file is created by sorting the extracted logs in time sequence. When the logs in the analysis log file are displayed at a display unit, a log containing the keyword having been set is located by searching through the analysis log file and is displayed in a highlighted display.
摘要翻译：疑难解答支持装置包括关键字文件存储单元，其中存储了保存包含在与预先存储的基板处理装置中发生的故障相关的日志中的字符串构成的关键字的关键字文件。设置用于从基于通过输入单元提供的输入信息指定的关键字文件中选择的用于日志搜索的关键字，并且还将基于通过以下方式提供的输入信息来设置用于日志分析的类别特定日志文件：输入单元。提取并合并已设置的特定于类别的日志文件中的日志，并按时间顺序排列提取的日志来创建分析日志文件。当分析日志文件中的日志显示在显示单元上时，通过搜索分析日志文件来定位包含已设置的关键字的日志，并显示在高亮显示中。

7. 发明申请

US20080004823A1 Defect detection system, defect detection method, and defect detection program 失效
标题翻译：缺陷检测系统，缺陷检测方法和缺陷检测程序
公开(公告)号：US20080004823A1
公开(公告)日：2008-01-03
申请号：US11812398
申请日：2007-06-19
申请人： Hiroshi Matsushita , Yasutaka Arakawa , Junji Sugamoto
发明人： Hiroshi Matsushita , Yasutaka Arakawa , Junji Sugamoto
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G01N21/9501 , G05B2219/32221 , G05B2219/32222 , Y02P90/04 , Y02P90/22
摘要： A defect detection system includes a data acquiring section that acquires time series data of device parameter of each manufacturing device including an exposure device, and information on defect distribution in an area with a size smaller than a chip area size, a pattern classifying section that assembles the information on the defect distribution in units of shot or chip areas, and classifies the distributions to a defect pattern, a feature quantity calculating section that processes the time series data and calculates a feature quantity, a significant difference test section that calculates occurrence frequency distributions of the shot or chip area wherein the defect pattern to the feature quantity exists and does not exist, respectively, and determines the presence/absence of significant difference between the frequency distributions, and a defect detecting section that detects the device parameter corresponding to the feature quantity as the cause of defect of the defect pattern.
摘要翻译：缺陷检测系统包括数据获取部分，其获取包括曝光装置的每个制造装置的装置参数的时间序列数据以及尺寸小于芯片面积尺寸的区域中的缺陷分布的信息;模式分类部，关于以镜头或码片区域为单位的缺陷分布的信息，并将分布分类为缺陷图案，处理时间序列数据并计算特征量的特征量计算部分，计算出现频率分布的显着差异测试部分分别存在特征量的缺陷图案并且不存在的拍摄或切片区域，并且确定频率分布之间存在/不存在显着差异;以及缺陷检测部分，其检测与特征对应的设备参数数量作为缺陷模式缺陷的原因。

8. 发明授权

US06859756B2 Diagnostic method for manufacturing processes 有权
公开(公告)号：US06859756B2
公开(公告)日：2005-02-22
申请号：US10236450
申请日：2002-09-06
申请人： John R. Allen
发明人： John R. Allen
IPC分类号： G05B19/401 , G05B23/02 , G06F15/46
CPC分类号： G05B19/401 , B65G2207/14 , G05B19/41875 , G05B2219/32189 , G05B2219/32221 , G05B2219/32222 , G05B2219/35223 , G05B2219/37617 , Y02P90/22
摘要： A method for use in a system for diagnosing the causes of manufacturing defects involves process characterization. A set of forms is identified for a workpiece and for a piece of manufacturing equipment that acts upon the workpiece. The forms for the workpiece are preferably a hierarchic set of geometric forms. Each such geometric form corresponds to an aspect of the action of the manufacturing equipment upon the workpiece. A plurality of measurements is made on a defective workpiece following the hierarchical order of forms. The measurements are compared to a reference datum, and a deviation from the datum is computed. If the deviation exceeds a preselected threshold, an alert condition results, attributable to the action of the manufacturing equipment. Targeted adjustment corresponding to the action that caused the defect can then be made to the equipment.

9. 发明授权

US06834211B1 Adjusting a trace data rate based upon a tool state 失效
标题翻译：根据工具状态调整跟踪数据速率
公开(公告)号：US06834211B1
公开(公告)日：2004-12-21
申请号：US10284639
申请日：2002-10-31
申请人： Elfido Coss, Jr. , Brian K. Cusson
发明人： Elfido Coss, Jr. , Brian K. Cusson
IPC分类号： G06F1900
CPC分类号： G05B19/41875 , G05B2219/32199 , G05B2219/32222 , Y02P90/22
摘要： A method and an apparatus for adjusting a rate of data flow based upon a tool state. A processing step is performed on a workpiece using a processing tool. A dynamic data rate adjustment process is performed to determine a data rate for acquiring data relating to the process performed upon the workpiece. The dynamic data rate adjustment process includes adjusting the data rate based upon an operation parameter relating to the processing tool.
摘要翻译：一种用于基于工具状态来调整数据流速率的方法和装置。使用加工工具对工件进行加工步骤。执行动态数据速率调整处理以确定用于获取与在工件上执行的处理相关的数据的数据速率。动态数据速率调整处理包括基于与处理工具相关的操作参数来调整数据速率。

10. 发明授权

US06550220B1 Method and device for diagnosing machines 失效
标题翻译：诊断机器的方法和装置
公开(公告)号：US06550220B1
公开(公告)日：2003-04-22
申请号：US09672174
申请日：2000-09-27
申请人： Heinz Focke , Thomas Häfker , Hartmut Olbrich
发明人： Heinz Focke , Thomas Häfker , Hartmut Olbrich
IPC分类号： B65B130
CPC分类号： A24C5/31 , G05B19/41875 , G05B2219/32221 , G05B2219/32222 , G05B2219/33324 , Y02P90/14
摘要： The invention relates to a method and a device for diagnosing machines (10) for manufacturing products such as cigarettes (12) or cigarette packets (11), the products being examined for faults, and a signal indicating a faulty product being generated. The invention is based on the problem of improving the diagnosis. In order to solve this problem, the method according to the invention is characterized in that the fault-indicating signal (46) is evaluated for possible periodicity of faulty products (11, 12), and a possible periodicity is determined. For this purpose, the device according to the invention has an appropriately constructed control device (27a).
摘要翻译：本发明涉及一种用于诊断用于制造诸如香烟（12）或香烟包装（11）的产品的机器（10）的方法和装置，所述产品被检查出故障，以及指示产生故障产品的信号。本发明是基于改善诊断的问题。为了解决这个问题，根据本发明的方法的特征在于，对故障产品（11,12）的可能的周期性评估故障指示信号（46），并确定可能的周期。为此，根据本发明的装置具有适当构造的控制装置（27a）。

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