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1. 发明申请

US20040034648A1 Flexible recipe modeling system 失效
标题翻译：灵活配方建模系统
公开(公告)号：US20040034648A1
公开(公告)日：2004-02-19
申请号：US10217510
申请日：2002-08-13
申请人： Taiwan Semiconductor Manufacturing Co., Ltd.
发明人： Hsien-Jung Hsu , Chin-Yen Lin , Hsiang-Jui Cheng
IPC分类号： G06F017/00
CPC分类号： G05B19/41865 , G05B2219/32097 , G05B2219/32253 , G05B2219/32306 , Y02P90/20 , Y02P90/26 , Y10S715/964
摘要： The present invention discloses a flexible recipe modeling system and method for improving the processing reliability of a fabrication process by customizing recipes processed by fabrication equipment by allowing a responsible engineer to add or modify individual recipe clusters. More particularly, the present system and method provides a recipe cluster management system (RCMS) for grouping of recipes into clusters to represent the same process capacity for a piece of fabrication equipment and provides a material execute system having recipe cluster management engine (RCME) for management of the RCMS. The RCME provides a user interface to simplify complex naming rules for processing of orders having different processing capacity requirements for associated different chambers of a multi-chamber processing machine. Also, the a method for using the RCMS provides a method to define new processes and allocate new equipment resources within a fabrication process.
摘要翻译：本发明公开了一种灵活配方建模系统和方法，用于通过定制由制造设备处理的配方，通过允许负责任的工程师添加或修改单个配方集群来提高制造过程的处理可靠性。更具体地，本系统和方法提供了一种配方集群管理系统（RCMS），用于将配方分组成群集，以表示一件制造设备的相同处理能力，并提供具有配方集群管理引擎（RCME）的材料执行系统管理RCMS。 RCME提供用户界面，以简化复杂的命名规则，以处理具有不同处理能力要求的订单，以满足多室加工机器的相关不同室。此外，使用RCMS的方法提供了一种在制造过程中定义新过程并分配新设备资源的方法。

2. 发明授权

US5870306A Automatic programming method and device for multi-system machine tool 失效
标题翻译：多系统机床自动编程方法及装置
公开(公告)号：US5870306A
公开(公告)日：1999-02-09
申请号：US874731
申请日：1997-06-13
申请人： Eiji Harada
发明人： Eiji Harada
IPC分类号： B23Q15/00 , G05B19/18 , G05B19/408 , G05B19/4093 , G05B19/4155 , G06F19/00
CPC分类号： G05B19/40937 , G05B2219/32253 , G05B2219/32266 , G05B2219/36248 , Y02P90/20 , Y02P90/265
摘要： An automatic programming system automatically decides which machining system should perform which machining step and generates a machining program therefor. The programming system utilizes a machining step information, a workpiece information, a tool information and a machining step corresponding workpiece information. The machining step information defines a machining step kind and a machining specification for each machining step. The workpiece information defines a workpiece material and a workpiece shape for each workpiece. The tool information defines a specification of a tool used in each machining system, a machining step kind workable and workpiece material workable by the tool. The machining step corresponding workpiece information defines a workpiece used in each machining step. Moreover, a machining system for actually performing the machining step is decided when there are plural workable machining systems on the basis of a system priority rule information which defines a preferred machining system when there are plural workable machining systems.
摘要翻译：自动编程系统自动决定哪个加工系统应该执行哪个加工步骤并生成加工程序。编程系统利用加工步骤信息，工件信息，刀具信息和对应的工件信息的加工步骤。加工步骤信息定义了每个加工步骤的加工步骤种类和加工规格。工件信息定义了每个工件的工件材料和工件形状。工具信息定义了每个加工系统中使用的工具的规格，可加工的加工步骤以及可由工具工作的工件材料。相应工件信息的加工步骤定义了每个加工步骤中使用的工件。此外，当存在多个可加工的加工系统时，基于定义优选的加工系统的系统优先级规则信息，当存在多个可加工的加工系统时，确定用于实际执行加工步骤的加工系统。

3. 发明授权

US5444632A Apparatus and method for controlling and scheduling processing machines 失效
标题翻译：用于控制和调度加工机器的装置和方法
公开(公告)号：US5444632A
公开(公告)日：1995-08-22
申请号：US234072
申请日：1994-04-28
申请人： Paul J. Kline , Michael A. Kilgore , Cynthia C. Martin
发明人： Paul J. Kline , Michael A. Kilgore , Cynthia C. Martin
IPC分类号： B23Q41/08 , B65G61/00 , G05B13/02 , G05B15/02 , G05B19/02 , G05B19/418 , G06Q50/00 , H01L21/02 , H01L21/66 , G06F19/00
CPC分类号： H01L22/20 , G05B19/41865 , G05B2219/32253 , G05B2219/32264 , G05B2219/32265 , G05B2219/32304 , G05B2219/32305 , G05B2219/32325 , H01L2924/0002 , Y02P90/20 , Y02P90/24
摘要： A method and apparatus selects a period of time for evaluating process resources and lots to be processed by the process resources. Selected lots and selected process resource are chosen that are available to be processed by the process resource and that are available to process the selected lots respectively. For each of the combination of selected process and selected lots a tool score and a lot score is determine and combined in order to select a winning score. The factory is controlled through the process resource in accordance with the winning score.
摘要翻译：一种方法和装置选择用于评估处理资源和由处理资源处理的批次的一段时间。选择的批次和选定的过程资源被选择，可供处理资源处理，并且可用于分别处理所选批次。对于选定过程和所选批次的组合中的每一个，确定并组合工具得分和批次，以选择获胜分数。工厂根据获奖成绩通过流程资源进行控制。

4. 发明申请

US20080140439A1 Method and apparatus for analyzing the variable operating rate of a manufacturing process 审中-公开
标题翻译：用于分析制造过程的可变工作速率的方法和装置
公开(公告)号：US20080140439A1
公开(公告)日：2008-06-12
申请号：US11985140
申请日：2007-11-14
申请人： Roger P. Hoffman
发明人： Roger P. Hoffman
IPC分类号： G06Q10/00 , G07G1/00 , G06F17/30 , G06Q30/00
CPC分类号： G05B19/41865 , G05B2219/32252 , G05B2219/32253 , G05B2219/32265 , G05B2219/34418 , G06Q30/018 , G06Q30/0206 , Y02P90/18 , Y02P90/20
摘要： The present invention relates generally to a method and apparatus for analyzing the variable operating rate of a manufacturing process. The system contains information relating to procurement activity, manufacturing activity and sales and marketing activity.
摘要翻译：本发明一般涉及用于分析制造过程的可变运行速率的方法和装置。该系统包含有关采购活动，制造活动以及销售和营销活动的信息。

5. 发明授权

US06968245B2 Flexible recipe modeling and recipe cluster management system 失效
标题翻译：灵活的配方建模和配方集群管理系统
公开(公告)号：US06968245B2
公开(公告)日：2005-11-22
申请号：US10217510
申请日：2002-08-13
申请人： Hsien-Jung Hsu , Chin-Yen Lin , Hsiang-Jui Cheng
发明人： Hsien-Jung Hsu , Chin-Yen Lin , Hsiang-Jui Cheng
IPC分类号： G05B15/00 , G05B19/418 , G06F3/00 , G06F9/00 , G06F17/00 , G06F19/00
CPC分类号： G05B19/41865 , G05B2219/32097 , G05B2219/32253 , G05B2219/32306 , Y02P90/20 , Y02P90/26 , Y10S715/964
摘要： A flexible recipe modeling system and method is provided for improving the processing reliability of a fabrication process by customizing recipes processed by fabrication equipment including associated different chambers of a multi-chamber processing machine by allowing a responsible engineer to add or modify individual recipe clusters including grouping of recipes into clusters to represent the same process capacity for a piece of fabrication equipment and providing a material execute system having a recipe cluster management engine (RCME) for management of the RCMS.
摘要翻译：提供了一种灵活的配方建模系统和方法，用于通过定制由包括多室处理机的相关联的不同室的制造设备处理的配方，通过允许负责的工程师添加或修改包括分组在内的各个配方集群来提高制造过程的处理可靠性的配方表示为一个制造设备的相同的处理能力，并且提供具有用于管理RCMS的配方集群管理引擎（RCME）的材料执行系统。

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