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    • 9. 发明申请
    • NOVEL FILL-IN CONTACT LAYER FOR SLIDER AIR BEARING SURFACE PROTECTIVE COATING
    • 用于滑动空气轴承表面保护涂层的新型填充接触层
    • US20140153136A1
    • 2014-06-05
    • US13691551
    • 2012-11-30
    • HGST NETHERLANDS B.V.
    • Eric W. FlintCherngye HwangRandall G. Simmons
    • G11B5/48
    • G11B5/10G11B5/255G11B5/3106G11B5/3163G11B5/40G11B5/6082
    • A magnetic slider for magnetic data recording constructed by a process that allows for careful control of seed layer and overcoat thickness. The slider is treated by a process that result in surface pits and scratches. A refill layer is used to fill in the pits and scratches, the refill layer being constructed of a material that does not include Si or carbon. An angled ion beam etching can be used to remove portions of the refill layer that extend outside of the pits and scratches. Then, a seed layer comprising Si and a protective layer comprising C are deposited over the surface. Because the refill layer does not contain either of Si or C, the thickness of the seed layer and carbon overcoat can be accurately measured and controlled, without the refill layer being mistaken for seed or overcoat material.
    • 一种用于磁数据记录的磁性滑块,其通过允许仔细控制种子层和外涂层厚度的工艺构成。 滑块通过导致表面凹坑和划痕的过程来处理。 填充层用于填充凹坑和划痕,填充层由不包括Si或碳的材料构成。 可以使用成角度的离子束蚀刻来去除在凹坑和划痕之外延伸的补充层的部分。 然后,在表面上沉积包含Si和包含C的保护层的晶种层。 因为补充层不含有Si或C中的任何一种,所以可以精确地测量和控制种子层和碳外涂层的厚度,而不会将填充层误认为种子或外涂层材料。