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1. 发明公开

US20240006142A1 ELECTRON GUN 审中-公开
公开(公告)号：US20240006142A1
公开(公告)日：2024-01-04
申请号：US18064280
申请日：2022-12-11
申请人： SHANGHAI UNITED IMAGING HEALTHCARE CO., LTD.
发明人： Ruiying SONG , Peng CHENG
IPC分类号： H01J3/02 , H01J1/02
CPC分类号： H01J3/029 , H01J1/025
摘要： An electron gun may include a cathode with an emitting surface configured to emit electrons. The cathode may include a through hole that goes through the emitting surface and is configured to allow back-streaming electrons of the emitted electrons to pass through. The electron gun may also include an anode configured to attract the emitted electrons from the cathode to the anode and focus the emitted electrons into an electron beam. The electron gun may also include a grid structure configured to facilitate the focusing of the emitted electrons, the grid structure being positioned corresponding to the through hole.

2. 发明授权

US11798788B2 Hollow cathode, an apparatus including a hollow cathode for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device using a hollow cathode 有权
公开(公告)号：US11798788B2
公开(公告)日：2023-10-24
申请号：US17091433
申请日：2020-11-06
申请人： SAMSUNG ELECTRONICS CO., LTD.
发明人： Sang Ki Nam , Sunggil Kang , Sungyong Lim , Beomjin Yoo , Akira Koshiishi , Vasily Pashkovskiy , Kwangyoub Heo
IPC分类号： H01L21/3065 , H01J37/32 , H01J1/02
CPC分类号： H01J37/32596 , H01J1/025 , H01J37/32009 , H01J37/32899
摘要： A hollow cathode includes an insulation plate having cathode holes. Bottom electrodes are below the insulation plate. The bottom electrodes define first holes having a width greater than a width of the cathode holes. Top electrodes are at an opposite side of the insulation plate from the bottom electrodes. The top electrodes define second holes aligned with the first holes along a direction orthogonal to the upper surface of the insulation plate.

3. 发明申请

US20160042906A1 PARTIALLY INSULATED CATHODE 有权
标题翻译：部分绝缘阴极
公开(公告)号：US20160042906A1
公开(公告)日：2016-02-11
申请号：US14456835
申请日：2014-08-11
申请人： Honeywell International Inc.
发明人： Matthew Clark , Dean E. Johnson , Bruce A. Seiber
IPC分类号： H01J1/02 , H01J17/06 , H01J17/16 , H01J9/02
CPC分类号： H01J1/025 , G01C19/665 , H01J9/02 , H01J17/06 , H01J17/16
摘要： A partially-insulated cathode for exciting plasma in a plasma chamber is provided. The partially-insulated cathode includes a conductive structure enclosing a cavity having a cavity surface and an insulating material contiguously covering a portion of the cavity surface from the cavity opening up to an insulation height that is less than a cavity height. Cross-sections of the cavity in X-Y planes have at least one respective cavity-width. A cavity opening has a diameter less than a minimum cavity-width of the at least one cavity-width.
摘要翻译：提供了用于激发等离子体室中的等离子体的部分绝缘阴极。部分绝缘的阴极包括一个导电结构，该导电结构包围具有空腔表面的空腔和绝缘材料，绝缘材料连续地覆盖空腔表面的一部分从空腔开口直到小于空腔高度的绝缘高度。 X-Y平面中的空腔的横截面具有至少一个相应的腔宽度。空腔开口的直径小于至少一个空腔宽度的最小腔宽度。

4. 发明申请

US20120280610A1 SYSTEMS AND METHODS FOR ENHANCING ELECTRICAL DISCHARGE 失效
标题翻译：用于增强电气放电的系统和方法
公开(公告)号：US20120280610A1
公开(公告)日：2012-11-08
申请号：US11126513
申请日：2005-05-09
申请人： Paul B. Lundquist , Stephen William McCahon
发明人： Paul B. Lundquist , Stephen William McCahon
IPC分类号： H01J1/00
CPC分类号： H01J1/025 , H01S3/0007
摘要： Systems and methods presented herein are generally directed to enhancing electrical discharge. A hollow conical electrode may be provided to discharge electrical energy in a directed manner. The conical electrode has two openings: a larger entrance opening; and a smaller exit opening. These openings are configured to allow radiated energy to pass therethrough and form a preferential path of electrical conduction. The larger entrance opening has a surface with a radius of curvature that is larger than that of the second smaller exit opening. The smaller exit opening directs electrical energy to the path because of stronger electric fields. In one embodiment, a protruding electrode element is configured with the smaller exit opening to further enhance electrical discharge by focusing electric fields in the vicinity of the protruding electrode.
摘要翻译：本文提出的系统和方法通常涉及增强放电。可以提供中空圆锥形电极以以有向的方式排出电能。锥形电极具有两个开口：较大的入口; 和一个较小的出口。这些开口被配置成允许辐射能量通过并形成优先的导电路径。较大的入口开口具有曲率半径大于第二较小出口的曲面半径的表面。由于电场较强，较小的出口将电能引导到路径。在一个实施例中，突出电极元件配置有较小的出口，以通过聚焦突出电极附近的电场来进一步增强放电。

5. 发明授权

US07872406B2 Apparatus and process for generating, accelerating and propagating beams of electrons and plasma 有权
标题翻译：用于产生，加速和传播电子和等离子体束的装置和过程
公开(公告)号：US07872406B2
公开(公告)日：2011-01-18
申请号：US11887649
申请日：2006-04-05
申请人： Francesco Cino Matacotta
发明人： Francesco Cino Matacotta
IPC分类号： H01J17/26
CPC分类号： H05H1/54 , H01J1/025 , H01J3/025
摘要： An apparatus and a process for generating, accelerating and propagating beams of electrons and plasma at high density, the apparatus comprising: a first dielectric tube, which contains gas; a hollow cathode, which is connected to said first dielectric tube; a second dielectric tube, which is connected to said hollow cathode and protrudes inside, and is connected to, a deposition chamber; an anode, which is arranged around said second dielectric tube, in an intermediate position; means for applying voltage to said cathode and said anode; means for evacuating the gas from the chamber; and means for spontaneous conversion of gas in the first dielectric tube into plasma.
摘要翻译：一种用于以高密度产生，加速和传播电子和等离子体束的装置和方法，所述装置包括：含有气体的第一介电管; 连接到所述第一介电管的空心阴极; 第二介质管，其连接到所述中空阴极并向内突出并连接到沉积室; 阳极，其布置在所述第二介电管周围的中间位置; 用于向所述阴极和所述阳极施加电压的装置; 用于从所述室抽空气体的装置; 以及用于将第一电介质管中的气体自发转化成等离子体的装置。

6. 发明申请

US20090066212A1 Apparatus and Process for Generating, Accelerating and Propagating Beams of Electrons and Plasma 有权
标题翻译：用于生成，加速和传播电子束和等离子体的装置和方法
公开(公告)号：US20090066212A1
公开(公告)日：2009-03-12
申请号：US11887649
申请日：2006-04-05
申请人： Francesco Cino Matacotta
发明人： Francesco Cino Matacotta
IPC分类号： H01J17/26
CPC分类号： H05H1/54 , H01J1/025 , H01J3/025
摘要： An apparatus and a process for generating, accelerating and propagating beams of electrons and plasma at high density, the apparatus comprising: a first dielectric tube, which contains gas; a hollow cathode, which is connected to said first dielectric tube; a second dielectric tube, which is connected to said hollow cathode and protrudes inside, and is connected to, a deposition chamber; an anode, which is arranged around said second dielectric tube, in an intermediate position; means for applying voltage to said cathode and said anode; means for evacuating the gas from the chamber; and means for spontaneous conversion of gas in the first dielectric tube into plasma.
摘要翻译：一种用于以高密度产生，加速和传播电子和等离子体束的装置和方法，所述装置包括：含有气体的第一介电管; 连接到所述第一介电管的空心阴极; 第二电介质管，其连接到所述中空阴极并向内突出并连接到沉积室; 阳极，其布置在所述第二介电管周围的中间位置; 用于向所述阴极和所述阳极施加电压的装置; 用于从所述室抽空气体的装置; 以及用于将第一电介质管中的气体自发转化成等离子体的装置。

7. 发明申请

US20050148270A1 Microdischarge devices and arrays 有权
公开(公告)号：US20050148270A1
公开(公告)日：2005-07-07
申请号：US11070100
申请日：2005-03-01
申请人： J. Eden , Sung-Jin Park , Clark Wagner
发明人： J. Eden , Sung-Jin Park , Clark Wagner
IPC分类号： G09G3/10 , H01J1/02 , H01J1/62 , H01J9/00 , H01J9/24 , H01J17/04 , H01J25/50 , H01J61/06 , H01J61/62 , H01J63/04 , H01J65/04
CPC分类号： H01J17/49 , H01J1/025 , H01J9/00 , H01J9/02 , H01J25/50 , H01J61/09 , H01J61/305 , H01J61/62 , H01J63/04 , H01J65/046
摘要： A discharge device is described that contains an anode, a cathode, and an insulating layer disposed between the anode and the cathode. A cavity is extends entirely through at least one of the anode or cathode and penetrates the dielectric layer. At least one of the anode or cathode may include a screen or the dielectric layer may have a plurality of films with at least two different dielectric constants. The voltage differences between the anode and cathode in each of multiple devices electrically connected together may be limited.

8. 发明申请

US20050012441A1 Channel spark source for generating a stable focussed electron beam 有权
标题翻译：用于产生稳定的聚焦电子束的通道火花源
公开(公告)号：US20050012441A1
公开(公告)日：2005-01-20
申请号：US10915834
申请日：2004-08-11
申请人： Christoph Schulteiss , Lothar-Heinz-Otto Buth
发明人： Christoph Schulteiss , Lothar-Heinz-Otto Buth
IPC分类号： C23C14/30 , H01J1/02 , H01J3/02 , H01J37/077 , H05H1/24 , H01T13/20
CPC分类号： H01J3/025 , H01J1/025 , H05H1/52
摘要： In a channel spark source triggered by gas discharge for generating a stable focused electron beam, a gas supply for a hollow cathode thereof is provided which generates in the hollow cathode a pressure differential so that the multiplication of charge carriers in a trigger plasma of a trigger plasma source connected to the hollow cathode provides for a reliable gas discharge and the formation of a stable electron beam which exits the arrangement and which does not damage the internal passages of the arrangement.
摘要翻译：在由用于产生稳定的聚焦电子束的气体放电触发的通道火花源中，提供了用于其空心阴极的气体供应，其在中空阴极中产生压差，使得触发器的触发等离子体中的载流子的乘法连接到空心阴极的等离子体源提供可靠的气体放电和形成稳定的电子束，其离开该装置并且不会损坏该装置的内部通道。

9. 发明申请

US20040000853A1 Industrial hollow cathode 审中-公开
标题翻译：工业空心阴极
公开(公告)号：US20040000853A1
公开(公告)日：2004-01-01
申请号：US10463908
申请日：2003-06-17
发明人： Harold R. Kaufman , James R. Kahn
IPC分类号： H01J001/20
CPC分类号： H01J1/52 , H01J1/025
摘要： In accordance with one embodiment of the present invention, the hollow-cathode apparatus comprises a small-diameter tantalum tube with a plurality of tantalum-foil radiation shields, wherein the plurality of shields in turn comprise one or more spiral windings external to that tube and approximately flush with the open end from which electron emission takes place. The axial length of at least one of the inner windings (closer to the tantalum tube) is equal to or less than approximately half the length of the tantalum tube. An enclosed keeper surrounds the cathode. To start the cathode, a flow of ionizable inert gas, usually argon, is initiated through the cathode and out the open end. An electrical discharge is then started between the keeper and the hollow cathode. When heated to operating temperature, electrons exit from the open end of the hollow cathode.
摘要翻译：根据本发明的一个实施例，中空阴极装置包括具有多个钽箔辐射屏蔽的小直径钽管，其中多个屏蔽依次包括该管外部的一个或多个螺旋绕组，以及大致与发生电子发射的开口端齐平。内部绕组（更靠近钽管）中的至少一个的轴向长度等于或小于钽管的长度的大约一半。封闭的门将围绕阴极。为了启动阴极，通过阴极引出电离惰性气体（通常为氩气）流出开口端。然后在保持器和中空阴极之间开始放电。当加热到工作温度时，电子从空心阴极的开口端排出。

10. 发明授权

US06380685B2 Design and manufacturing processes of long-life hollow cathode assemblies 失效
标题翻译：长寿命空心阴极组件的设计和制造工艺
公开(公告)号：US06380685B2
公开(公告)日：2002-04-30
申请号：US09754388
申请日：2000-12-28
申请人： Michael J. Patterson , Timothy R. Verhey , George C. Soulas
发明人： Michael J. Patterson , Timothy R. Verhey , George C. Soulas
IPC分类号： B07B312
CPC分类号： H01J37/32596 , H01J1/025
摘要： The design and manufacturing processes for Hollow Cathode Assemblies (HCA's) that operate over a broad range of emission currents up to 30 Amperes, at low potentials, with lifetimes in excess of 17,500 hours. The processes include contamination control procedures which cover hollow cathode component cleaning procedures, gas feed system designs and specifications, and hollow cathode activation and operating procedures to thereby produce cathode assemblies that have demonstrated stable and repeatable operating conditions, for both the discharge current and voltage. The HCA of this invention provides lifetimes of greater than 10,000 hours, and expected lifetimes of greater than 17,500 hours, whereas the present state-of-the-art is less than 500 hours at emission currents in excess of 1 Ampere. Stable operation is provided over a large range of operating emission currents, up to a 6:1 ratio, and this HCA can emit electron currents of up to 30 Amperes in magnitude to an external anode that simulates the current drawn to a space plasma, at voltages of less than 20 Volts.
摘要翻译：空心阴极组件（HCA）的设计和制造过程，其工作范围广泛，发射电流高达30安培，电位低，寿命超过17,500小时。这些方法包括污染控制程序，其涵盖空心阴极部件清洁程序，气体供给系统设计和规范，以及中空阴极活化和操作程序，从而产生对于放电电流和电压都已经证明稳定和可重复的操作条件的阴极组件。本发明的HCA提供的寿命大于10,000小时，预期寿命大于17,500小时，而现有技术在超过1安培的发射电流下小于500小时。在大范围的工作发射电流下提供稳定的操作，高达6：1的比例，并且该HCA能够向外部阳极发射高达30安培的电子电流，该外部阳极模拟吸入空间等离子体的电流，电压小于20伏。

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