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    • 5. 发明授权
    • Multilayer piezoelectric element
    • 多层压电元件
    • US09337410B2
    • 2016-05-10
    • US13925236
    • 2013-06-24
    • TDK Corporation
    • Syuuzi ItohSatoshi OzawaAtsushi Tamura
    • H01L41/083H01L41/047H01L41/04
    • H01L41/0838H01L41/04H01L41/083
    • An element body having a first and second internal electrodes exposure surface comprising a piezoelectric active area, wherein a first internal electrode faces a second internal electrode sandwiching piezoelectric body layer in-between along laminating direction, and a piezoelectric inactive area, wherein the piezoelectric body layer contacts only first or second internal electrode at one face along laminating direction, or the first internal electrodes or the second internal electrodes respectively face each other sandwiching piezoelectric body layer in-between along laminating direction, an insulating layer which covers the piezoelectric active area of the first and second internal electrodes exposure surface, and a resistance layer which is isolated from the piezoelectric active area by the insulating layer, placed at the first and second internal electrodes exposure surface connecting at least a part of the first and that of the second internal electrode in the piezoelectric inactive area and has lower electrical resistance value relative to that of the piezoelectric body layer.
    • 1.一种元件体,具有包括压电有源区域的第一和第二内部电极曝光面,其中,第一内部电极面向沿着层叠方向夹着压电体层的第二内部电极和压电无效区域,其中,所述压电体层 仅沿着层叠方向在一个面上仅接触第一或第二内部电极,或者第一内部电极或第二内部电极在层叠方向之间分别面对彼此夹持的压电体层,覆盖层叠方向的压电有源区域的绝缘层 第一和第二内部电极曝光表面,以及电阻层,其通过绝缘层与压电有源区隔离,放置在连接第一和第二内部电极的至少一部分的第一和第二内部电极暴露表面 在压电灭活中 并且相对于压电体层的电阻值较低。
    • 6. 发明授权
    • Multi-layer piezoelectric element, and injection device and fuel injection system provided therewith for enhanced durability
    • 多层压电元件,以及具有提供耐久性的注射装置和燃料喷射系统
    • US09153769B2
    • 2015-10-06
    • US13392320
    • 2010-08-26
    • Tetsuro Sata
    • Tetsuro Sata
    • H01L41/083H01L41/337F02M51/06H01L41/273H01L41/187
    • H01L41/337F02M51/0603H01L41/0838H01L41/1875H01L41/273
    • A center of a multi-layer piezoelectric element is an active region and deforms to a greater degree than ends thereof which is an inactive region during driving operation, and is therefore more susceptible to stress concentration and crack development. To address this problem, a multi-layer piezoelectric element includes a columnar stacked body in which piezoelectric layers and internal electrode layers are alternately laminated, and a pair of external electrodes configured to bond to side faces of the columnar stacked body, wherein a side face of the columnar stacked body is configured so that a surface roughness of a center of the side face in a stacked direction of the columnar stacked body is greater than those of ends of the side face in the stacked direction of the columnar stacked body. This makes it possible to relax the stress exerted on the side face of the columnar stacked body, and thereby enhance the durability of the multi-layer piezoelectric element.
    • 多层压电元件的中心是有源区域,并且在驱动操作期间比作为非活性区域的端部更大程度地变形,因此更容易受到应力集中和裂纹展开。 为了解决这个问题,层叠型压电元件包括​​层叠压电层和内部电极层的柱状层叠体和配置成与柱状层叠体的侧面接合的一对外部电极, 柱状层叠体的层叠方向的侧面的中心的表面粗糙度比柱状层叠体的层叠方向的侧面的端部的表面粗糙度大。 由此,能够缓和施加在柱状层叠体的侧面上的应力,从而提高层叠型压电元件的耐久性。
    • 9. 发明授权
    • Composite substrate
    • 复合基材
    • US08907547B2
    • 2014-12-09
    • US14228452
    • 2014-03-28
    • NGK Insulators, Ltd.NGK Ceramic Device Co., Ltd.
    • Tomoyoshi TaiYasunori IwasakiYuji HoriTakahiro YamaderaRyosuke HattoriKengo Suzuki
    • H01L41/09H03H9/25H01L41/053H01L41/083
    • H01L41/0838H01L41/053H01L41/312H03H9/02574
    • A composite substrate according to the present invention includes a piezoelectric substrate that is a single-crystal lithium tantalate or lithium niobate substrate, a support substrate that is a single-crystal silicon substrate, and an amorphous layer joining together the piezoelectric substrate and the support substrate. The amorphous layer contains 3 to 14 atomic percent of argon. The amorphous layer includes, in order from the piezoelectric substrate toward the composite substrate, a first layer, a second layer, and a third layer. The first layer contains a larger amount of a constituent element (such as tantalum) of the piezoelectric substrate than the second and third layers. The third layer contains a larger amount of a constituent element (silicon) of the support substrate than the first and second layers. The second layer contains a larger amount of argon than the first and third layers.
    • 根据本发明的复合基板包括:单晶钽酸锂或铌酸锂基板的压电基板,作为单晶硅基板的支撑基板和将压电基板和支撑基板接合在一起的非晶层 。 无定形层含有3〜14原子%的氩。 从压电基板向复合基板依次包括第一层,第二层和第三层。 第一层包含比第二和第三层更大量的压电基片的构成元件(例如钽)。 第三层包含比第一层和第二层更大量的支撑衬底的构成元素(硅)。 第二层含有比第一和第三层更大量的氩。