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    • 4. 发明授权
    • Device and method for regulating the gas supply or the gas transport in a gas storage system
    • 用于调节气体储存系统中的气体供应或气体输送的装置和方法
    • US08770219B2
    • 2014-07-08
    • US13129275
    • 2009-11-13
    • Christoph MartensJan C. F. Behrens
    • Christoph MartensJan C. F. Behrens
    • F04F1/06
    • C12M21/04C12M23/36C12M23/58C12M41/40Y02E50/343Y10T137/0379Y10T137/3124Y10T137/3127Y10T137/8158
    • A device for regulating the gas supply in a gas storage system of a biogas system, wherein the gas storage system has gas stores connected in series in a cascade-like manner with an intermediate chamber between a gas store membrane and a protective cover. The device comprises gas supply mechanisms, intermediate chamber pressure measuring mechanisms and at least one regulating mechanism, each gas store is assigned at least one gas supply mechanism, each gas store is assigned at least one intermediate chamber pressure measuring mechanism with which the gas pressure in the intermediate chamber of the respective gas store can be measured, and the measured values of the intermediate chamber pressure measuring mechanisms are transmitted to at least one regulating mechanism, and the regulating mechanism is designed to regulate the gas pressure in the intermediate chambers of the gas stores by controlling the gas supply mechanisms assigned to gas stores.
    • 一种用于调节生物气体系统的气体存储系统中的气体供应的装置,其中所述气体存储系统具有以级联方式串联连接的气体存储器,其中在气体储存膜和保护盖之间具有中间室。 该装置包括气体供给机构,中间室压力测量机构和至少一个调节机构,每个气体储存器被分配至少一个气体供应机构,每个气体存储器分配至少一个中间室压力测量机构,气体压力 可以测量各个气体储存器的中间室,并且中间室压力测量机构的测量值被传递到至少一个调节机构,并且调节机构被设计成调节气体的中间室中的气体压力 通过控制分配给天然气商店的气体供应机构来存储商店。
    • 6. 发明授权
    • Method for operating a pneumatic device for the metered delivery of a liquid and pneumatic device
    • 用于操作用于液体和气动装置的计量输送的气动装置的方法
    • US08590739B2
    • 2013-11-26
    • US11402703
    • 2006-04-11
    • Ladislav KuceraMartin Von Arx
    • Ladislav KuceraMartin Von Arx
    • B67D7/28
    • G01F13/00Y10T137/3127
    • The invention concerns the operation of a pneumatic device for the metered delivery of a liquid and a pneumatic device particularly suited for operation in accordance with the invention. The pneumatic device has a pressure tank that can be connected to a compressed air source by means of an inlet valve and with the surroundings by means of an outlet valve. For delivery of the liquid, a pressure pulse is applied to the liquid container containing the liquid in that the pressure tank is temporarily connected to the liquid container via a changeover valve. After the end of the pressure pulse, the pressure prevailing in the pressure tank is increased to a value that is greater than the set value to be achieved during the pressure pulse.
    • 本发明涉及用于计量输送液体和气动装置的气动装置的操作,特别适用于根据本发明的操作。 气动装置具有压力罐,该压力罐可以通过入口阀和通过出口阀与周围环境连接到压缩空气源。 为了输送液体,将压力脉冲施加到容纳液体的液体容器中,因为压力罐经由切换阀临时连接到液体容器。 在压力脉冲结束之后,压力罐中的压力增加到大于在压力脉冲期间要实现的设定值的值。
    • 8. 发明申请
    • LIQUID STORAGE DEVICE
    • 液体储存装置
    • US20130174919A1
    • 2013-07-11
    • US13701903
    • 2012-06-13
    • Jinqun HeLikun PeiYi WuWei Zan
    • Jinqun HeLikun PeiYi WuWei Zan
    • G05D16/16
    • G05D16/16G05D16/00G05D16/103Y10T137/3115Y10T137/3118Y10T137/3127Y10T137/313Y10T137/86324
    • The present invention provides a liquid storage device relates to the field of semiconductor manufacturing technology comprising: a liquid storage tank, a liquid intake tube, a liquid discharge tube and a gas discharge tube; the liquid intake tube, the liquid discharge tube and the gas discharge tube are all connected with the liquid storage tank; the liquid storage device also comprises a gas compensating tube connected with the liquid storage tank; the gas compensating tube comprises a differential pressure mechanism and a gas storage tank; one end of the differential pressure mechanism is connected with the liquid storage tank, and the other end is connected with the gas storage tank; the differential pressure mechanism is used for controlling the connection or disconnection between the liquid storage tank and the gas storage tank according to the pressure difference therebetween.
    • 本发明提供一种与半导体制造技术领域相关的液体储存装置,包括:液体储存箱,液体进入管,液体排出管和气体放电管; 液体吸入管,液体排出管和气体放电管均与储液罐连接; 液体储存装置还包括与液体储存罐连接的气体补偿管; 气体补偿管包括压差机构和储气罐; 差压机构的一端与储液箱连接,另一端与储气罐连接; 差压机构用于根据它们之间的压力差来控制储液箱与储气罐之间的连接或断开。
    • 9. 发明授权
    • Process liquid supply system, process liquid supply method, and storage medium
    • 工艺液体供应系统,工艺液体供应方式和存储介质
    • US08408234B2
    • 2013-04-02
    • US11723197
    • 2007-03-16
    • Keisuke SasakiKazuyoshi Eshima
    • Keisuke SasakiKazuyoshi Eshima
    • B67D7/72
    • H01L21/67075H01L21/67023H01L21/67028H01L21/6704H01L21/67063H01L21/67253Y10T137/0352Y10T137/3127Y10T137/7303
    • A process liquid supply system includes a pure water supply source connected to a process vessel through a supply pipe; a chemical liquid tank that stores a chemical liquid and supplies the chemical liquid stored therein to the supply pipe; and a compressed gas supply source connected to the chemical liquid tank through a compressed gas supply pipe. A pressure adjusting part is disposed on the compressed gas supply pipe at a position between the compressed gas supply source and the chemical liquid tank. The pressure adjusting part is controlled so that the pressure of the compressed gas supplied from the compressed gas supply source to the chemical liquid tank is gradually or stepwise increased after the supply of the chemical liquid from the chemical liquid tank to the supply pipe is started so that the concentration of the processing liquid remains at desired level.
    • 工艺液体供应系统包括通过供应管连接到处理容器的纯水供应源; 储存药液并将储存在其中的药液供应到供给管的化学液体罐; 以及通过压缩气体供给管连接到药液罐的压缩气体供给源。 在压缩气体供给管和压力气体供给管之间的压缩气体供给源与药液箱之间的位置配置有压力调节部。 控制压力调整部,使从压缩气体供给源向药液槽供给的压缩气体的压力在从药液槽向供给管供给药液之后逐渐或逐步增加 处理液体的浓度保持在所需水平。
    • 10. 发明授权
    • Backup pneumatic water pressure device
    • 备用气动水压装置
    • US08322362B2
    • 2012-12-04
    • US12534106
    • 2009-07-31
    • Judson E. Walls
    • Judson E. Walls
    • F04F1/00
    • E03B7/075Y10T137/3127Y10T137/776Y10T137/86035
    • A water pressure backup device has a water tank mounted between a water source and interior plumbing lines and containing an air bladder that is inflated by a battery powered compressor when water pressure is lost at the source, bladder inflation within the tank thereby providing auxiliary water pressure to the interior plumbing lines. A control unit detects when water pressure at the source is lost, and monitors air pressure in the bladder and water pressure in the tank. When water pressure is restored at the source, the control unit shuts off the compressor and opens an air pressure relief valve at the bladder.
    • 水压备用装置具有安装在水源和内部管道线之间的水箱,并且包含气囊,当气源在水源失去水压时,气囊被电池供电的压缩机充气,从而提供辅助水压 到内部管道。 控制单元检测源头处的水压是否损失,并监测气囊中的气压和水箱中的水压。 当源头恢复水压时,控制单元关闭压缩机并在气囊处打开一个空气压力释放阀。