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    • 8. 发明授权
    • Zirconia toughening of glass-ceramic materials
    • 氧化锆增韧玻璃陶瓷材料
    • US5173331A
    • 1992-12-22
    • US744621
    • 1991-08-12
    • Richard W. Adams, Jr.David R. ClarkeSarah H. KnickerbockerLinda L. RappBernard Schwartz
    • Richard W. Adams, Jr.David R. ClarkeSarah H. KnickerbockerLinda L. RappBernard Schwartz
    • C03C10/00C03C10/08C03C14/00C04B35/195H01L21/48H05K1/03
    • C04B35/195C03C10/0045C03C14/004H01L21/4807C03C2214/04C03C2214/20H05K1/0306
    • A ceramic material suitable for packaging of large scale integrated circuits is produced by the process of forming a mixture of a powdered glass ceramic material which is a glassy precursor to cordierite ceramic material, formed by the steps which are as follows:a. Mix tetragonal phase material selected from the group consisting of zirconia of hafnia powder containing a stabilizing oxide compound selected from the group consisting of MgO, CaO and Y.sub.2 O.sub.3 and a glass frit powder or frit of a glassy precursor of cordierite glass ceramic to yield a suspension of solids. Preferably, a binder is included.b. Disperse the suspended solids to yield a dispersion of the zirconia or hafnia with the stabilizing oxide compound and the glassy precursor.c. Densify the dispersion of zirconia or hafnia with the stabilizing oxide compound and the glassy precursor by a sintering heat treatment at a temperature of about 840.degree. C. to melt the glassy precursor into a viscous fluid at a temperature below the melting point of the zirconia or hafnia powder particles to yield a densified intermediate material with the zirconia or hafnia particles encapsulated in the molden glassy precursor.d. Crystallize the densified intermediate material into a polycrystalline composite by heating at 900.degree. C. to 950.degree. C.The process yields a ceramic material consisting of the tetragonal phase material encapsulated in crystalline cordierite glass ceramic material.
    • 通过形成由以下步骤形成的堇青石陶瓷材料的玻璃状前体的玻璃陶瓷材料的混合物的制造方法,制造适合于大规模集成电路封装的陶瓷材料。 混合四方相材料,其选自含有选自MgO,CaO和Y 2 O 3的稳定化氧化物的铪粉末的氧化锆和堇青石玻璃陶瓷的玻璃状前体的玻璃料粉末或玻璃料,以产生 固体。 优选地,包括粘合剂。 b。 分散悬浮固体以产生氧化锆或铪的分散体与稳定化氧化物化合物和玻璃状前体。 C。 通过在约840℃的温度下进行烧结热处理,使稳定氧化物化合物和玻璃状前体的氧化锆或铪的分散体致密化,在低于氧化锆熔点的温度下将玻璃状前体熔化成粘性流体,或 铪粉末颗粒产生密实的中间体材料,其中氧化锆或铪颗粒包封在模塑玻璃状前体中。 d。 通过在900℃加热至950℃将致密化的中间体材料结晶成多晶复合材料。该方法产生由包封在结晶堇青石玻璃陶瓷材料中的四方相材料组成的陶瓷材料。