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1. 发明授权

US09897523B2 Contact mechanic tests using stylus alignment to probe material properties 有权
公开(公告)号：US09897523B2
公开(公告)日：2018-02-20
申请号：US15061415
申请日：2016-03-04
申请人： Massachusetts Materials Technologies LLC
发明人： Simon C. Bellemare , Steven D. Palkovic , Phillip A. Soucy , Michael J. Tarkanian , Brendon M. Willey
IPC分类号： G01N3/46 , G01N3/60 , G06F17/50
CPC分类号： G01N3/46 , G01N3/60 , G01N2203/0078 , G01N2203/0098 , G01N2203/0244 , G06F17/5018 , Y02T10/82
摘要： An apparatus for performing a contact mechanics test on a substrate includes a stylus, a core configured to engage the stylus against the substrate, a stylus engagement mechanism configured to induce a contact load or a penetration depth to the stylus, a core engagement mechanism configured to maintain contact of the core and to move the core along the substrate surface, a frame configured to be fixed with respect to the apparatus or to be moved together with the core engagement mechanism as an assembly, a frame engagement mechanism configured to engage the frame with the substrate surface; and a substrate monitoring device configured to measure characteristics of substrate contact response and/or collect material machined from the substrate. Methods of performing a contact mechanics test are also provided.

2. 发明授权

US09778158B2 Scratch testing apparatus and methods of using same 有权
公开(公告)号：US09778158B2
公开(公告)日：2017-10-03
申请号：US14310611
申请日：2014-06-20
申请人： Massachusetts Materials Technologies LLC
发明人： Simon Claude Bellemare , Steven D. Palkovic , Simon Normand
IPC分类号： G01N3/46
CPC分类号： G01N3/46
摘要： Provide in one embodiment is an apparatus, comprising an indentor wherein a tip thereof is configured to engage a sample surface, a surface-referencing device configured to establish the position of the indentor relative to the sample surface, a drive mechanism configured to move the indentor along the sample surface to form a scratch, and a measurement device configured to measure at least one of (i) a pile-up height of sample material removed from the scratch and (ii) a width of the scratch.

3. 发明申请

US20160258852A1 Contact Mechanic Tests using Stylus Alignment to Probe Material Properties 有权
标题翻译：接触机械测试使用触笔对准探头材料属性
公开(公告)号：US20160258852A1
公开(公告)日：2016-09-08
申请号：US15061415
申请日：2016-03-04
申请人： Massachusetts Materials Technologies LLC
发明人： Simon C. Bellemare , Steven D. Palkovic , Phillip A. Soucy , Michael J. Tarkanian , Brendon M. Willey
IPC分类号： G01N3/46 , G06F17/50 , G01N3/60
CPC分类号： G01N3/46 , G01N3/60 , G01N2203/0078 , G01N2203/0098 , G01N2203/0244 , G06F17/5018 , Y02T10/82
摘要： An apparatus for performing a contact mechanics test on a substrate includes a stylus, a core configured to engage the stylus against the substrate, a stylus engagement mechanism configured to induce a contact load or a penetration depth to the stylus, a core engagement mechanism configured to maintain contact of the core and to move the core along the substrate surface, a frame configured to be fixed with respect to the apparatus or to be moved together with the core engagement mechanism as an assembly, a frame engagement mechanism configured to engage the frame with the substrate surface; and a substrate monitoring device configured to measure characteristics of substrate contact response and/or collect material machined from the substrate. Methods of performing a contact mechanics test are also provided.
摘要翻译：用于在基板上进行接触力学试验的装置包括：触针，被配置为将触针接合在基板上的芯体;触针接合机构，被配置成引入触针的触点负载或穿透深度;芯接合机构，保持芯的接触并使芯沿着衬底表面移动，框架被构造为相对于设备固定或与芯接合机构一起作为组件移动;框架接合机构，其构造成将框架与基材表面; 以及衬底监测装置，其被配置为测量衬底接触响应的特性和/或收集从衬底加工的材料。还提供了进行接触力学试验的方法。

4. 发明申请

US20090145208A1 METHOD FOR ANALYZING A SCRATCH TEST 有权
标题翻译：分析测试方法
公开(公告)号：US20090145208A1
公开(公告)日：2009-06-11
申请号：US12324237
申请日：2008-11-26
申请人： Pierre-Jean COUDERT , Bertrand BELLATON
发明人： Pierre-Jean COUDERT , Bertrand BELLATON
IPC分类号： G01N3/46
CPC分类号： G01N3/42 , G01N2203/0098 , G01N2203/021 , G01N2203/0212
摘要： The invention relates to a method for analyzing a scratch from a scratch test, applying a digital image acquisition device, a bulk and an indenter for applying a force on the bulk,the method comprising the following steps: determining the position of the beginning of the scratch relatively to the reference position, making the scratch on the bulk by means of the indenter while recording the applied force and at least one measurement parameter, as a function of the displacement of the indenter on the bulk relatively to the reference position, acquiring and recording the images of the whole of the significant portion of the scratch, the position on the scratch corresponding to the recorded images, being determined relatively to the reference position, synchronization of the recorded images, of the applied force and the measurement parameter, as a function of the displacement of the indenter, displaying the curves of the applied force and of the measurement parameter as a function of the displacement of the indenter, and displaying in a synchronized way an image of the significant portion of the scratch, reconstructed from the recorded images.
摘要翻译：本发明涉及一种用于从划痕测试分析划痕的方法，应用数字图像获取装置，用于在批量上施加力的批量和压头，所述方法包括以下步骤：确定相对于参考位置刮擦，通过压头同时记录所施加的力和至少一个测量参数，作为压头在批量上相对于参考位置的位移的函数，获得和记录划痕的整个重要部分的图像，对应于记录图像的划痕位置，相对于基准位置确定，记录图像的同步，所施加的力的同步和测量参数，作为压头位移的函数，显示施加力的曲线和测量参数的函数并且以同步的方式显示从记录图像重建的划痕的重要部分的图像。

5. 发明授权

US07275423B2 Automatic speed calculation for scratch machine 失效
标题翻译：刮刀机的自动速度计算
公开(公告)号：US07275423B2
公开(公告)日：2007-10-02
申请号：US11055274
申请日：2005-02-10
申请人： David L. Hicks , Michael J. Niel
发明人： David L. Hicks , Michael J. Niel
IPC分类号： G01N3/46 , G01N33/00
CPC分类号： G01N3/46 , G01N19/02
摘要： An improved surface testing apparatus, such as a scratch test apparatus, allows accurate determination of the test speed, for example using one or more magnetic sensors. An example scratch test apparatus comprises an arm assembly, and an attached blade moving over the surface during the scratch test. A pair of spaced apart reed switches are provided proximate to the arm assembly, the reed switches being successively actuated by a magnetic portion of the arm asssembly as it moves during the scratch test.
摘要翻译：改进的表面测试装置，例如刮擦测试装置，允许例如使用一个或多个磁性传感器来精确地确定测试速度。示例性划痕测试装置包括臂组件和在刮擦测试期间在表面上移动的附接叶片。在臂组件附近提供一对间隔开的簧片开关，当在刮擦测试期间它们移动时，簧片开关由臂组件的磁性部分依次致动。

6. 发明授权

US5493926A Method of identifying a weakest interface where delamination is most likely to occur in a multi-layer dielectric film stack 失效
标题翻译：识别在多层电介质膜叠层中最有可能发生分层的最弱界面的方法
公开(公告)号：US5493926A
公开(公告)日：1996-02-27
申请号：US408652
申请日：1995-03-21
申请人： Landon B. Vines , Felix H. Fujishiro , Danny W. Echtle , Annette Garcia
发明人： Landon B. Vines , Felix H. Fujishiro , Danny W. Echtle , Annette Garcia
IPC分类号： G01N3/46 , G01N19/04 , H01L21/66 , G01N17/00
CPC分类号： G01N19/04 , G01N3/46 , H01L22/12
摘要： A method of identifying a weakest interface where delamination is most likely to occur in a multi-layer dielectric film stack formed on a semiconductor wafer includes scribing processed layers including the multi-layer dielectric film stack with an applied force of a selected and constant magnitude, measuring the depth of a cavity formed in the processed layers by such scribing, and identifying the weakest interface by comparing the measured depth against the known depths of the interfaces between adjacent layers of the multi-layer dielectric film stack.
摘要翻译：识别在形成在半导体晶片上的多层电介质膜堆叠中最有可能发生分层的最弱界面的方法包括使用选定且恒定幅度施加的力划分包括多层电介质膜叠层的处理层，通过这种划线来测量在处理层中形成的腔的深度，并且通过将测量的深度与多层电介质膜叠层的相邻层之间的界面的已知深度进行比较来识别最弱的界面。

7. 发明授权

US5359879A Scanning micro-sclerometer 失效
标题翻译：扫描微硬度计
公开(公告)号：US5359879A
公开(公告)日：1994-11-01
申请号：US971175
申请日：1992-11-04
申请人： Warren C. Oliver , Peter J. Blau
发明人： Warren C. Oliver , Peter J. Blau
IPC分类号： G01H13/00 , G01N3/00 , G01N3/02 , G01N3/40 , G01N3/46 , G01N3/56
CPC分类号： G01N3/405 , G01H13/00 , G01N3/46 , G01N2203/0005 , G01N2203/005 , G01N2203/0078 , G01N2203/0286 , G01N2291/02827
摘要： A scanning micro-sclerometer measures changes in contact stiffness and correlates these changes to characteristics of a scratch. A known force is applied to a contact junction between two bodies and a technique employing an oscillating force is used to generate the contact stiffness between the two bodies. As the two bodies slide relative to each other, the contact stiffness changes. The change is measured to characterize the scratch.
摘要翻译：扫描微硬度计测量接触刚度的变化，并将这些变化与划痕的特征相关联。已知的力施加到两个物体之间的接触接合处，并且使用采用振荡力的技术来产生两个物体之间的接触刚度。当两个物体相对滑动时，接触刚度变化。测量变化来表征划痕。

8. 发明授权

US4799453A Apparatus for the solidification of liquid films 失效
标题翻译：液膜固化装置
公开(公告)号：US4799453A
公开(公告)日：1989-01-24
申请号：US90066
申请日：1987-08-27
申请人： James H. Nobbs , Peter K. T. Oldring , David Duerden
发明人： James H. Nobbs , Peter K. T. Oldring , David Duerden
IPC分类号： G01N3/00 , G01N3/02 , G01N3/06 , G01N3/46 , G01N33/32 , B05C11/00
CPC分类号： G01N3/46 , G01N2203/0092 , G01N2203/0226 , G01N2203/028 , G01N2203/0623 , G01N2203/0676 , G01N33/32
摘要： The solidification characteriztics of a solidifiable liquid film are monitored by effecting relative movement between a stylus and the film and monitoring the resistance to movement of the stylus through the film as the film is solidifying. The film may be subjected to ultraviolet radiation or elevated temperature to cause solidification. The resistance to movement may be monitored electrically in which case it may be recorded as a trace or a chart recorder.

9. 发明授权

US2527612A Apparatus for determining hardness 失效
标题翻译：硬度测定装置
公开(公告)号：US2527612A
公开(公告)日：1950-10-31
申请号：US72261547
申请日：1947-01-17
申请人： YOUNGBLOOD ROBERT N
发明人： YOUNGBLOOD ROBERT N
IPC分类号： G01N3/46
CPC分类号： G01N3/46

10. 发明授权

US2311430A Scratch resistance testing machine 失效
标题翻译：耐刮擦试验机
公开(公告)号：US2311430A
公开(公告)日：1943-02-16
申请号：US37438241
申请日：1941-01-14
申请人： CONTINENTAL CAN CO
发明人： BENO NORMAN J
IPC分类号： G01N3/46
CPC分类号： G01N3/46

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