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    • 7. 发明授权
    • Mass flowmeter and velocimeter
    • US10288464B2
    • 2019-05-14
    • US15315742
    • 2015-05-07
    • DENSO CORPORATION
    • Toshikazu HaradaAtusi Sakaida
    • G01F1/688G01P5/10G01F1/684G01F23/00
    • A mass flowmeter includes a flow sensor having a first sensor part and a second sensor part formed on both sides of a heater part. The flow sensor is formed of a thermoplastic resin, and is configured of a multi-layer substrate including a plurality of stacked insulating layers, and a first conductor and a second conductor and formed on these insulating layers and connected to each other. The multi-layer substrate is formed by pressurizing and heating the plurality of insulating layers for integration. When a fluid having heat released from the heater part is moved along the one face of the flow sensor, the first and the second sensor parts and generate electromotive forces in the level corresponding to temperature differences generated between the one face and the other face in the first and the second sensor parts. The flow sensor has a structure manufactured by pressurizing and heating the plurality of insulating layers for integration. The structure has no large space unlike a structure having a space immediately below a diaphragm. Thus, the flow sensor is less breakable than a sensor having a diaphragm structure is.