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    • 7. 发明授权
    • Plasma deposition apparatus and method for making polycrystalline silicon
    • 等离子体沉积装置及制造多晶硅的方法
    • US07858158B2
    • 2010-12-28
    • US12433188
    • 2009-04-30
    • Mohd A. AslamiDau WuDeLuca Charles
    • Mohd A. AslamiDau WuDeLuca Charles
    • H05H1/24B01J19/08G21H1/00G21H5/00H01F41/00
    • C23C16/24C23C16/513H05H1/30
    • A plasma deposition apparatus for making polycrystalline silicon including a chamber for depositing said polycrystalline silicon, the chamber having an exhaust system for recovering un-deposited gases; a support located within the deposition chamber for holding a target substrate having a deposition surface, the deposition surface defining a deposition zone; at least one induction coupled plasma torch located within the deposition chamber and spaced apart from the support, the at least one induction coupled plasma torch producing a plasma flame that is substantially perpendicular to the deposition surface, the plasma flame defining a reaction zone for reacting at least one precursor gas source to produce the polycrystalline silicon for depositing a layer of the polycrystalline silicon the deposition surface.
    • 一种用于制造多晶硅的等离子体沉积设备,包括用于沉积所述多晶硅的室,所述室具有用于回收未沉积气体的排气系统; 位于所述沉积室内的用于保持具有沉积表面的目标基底的支撑体,所述沉积表面限定沉积区; 至少一个感应耦合等离子体焰炬,其位于所述沉积室内并与所述支撑件间隔开,所述至少一个感应耦合等离子体焰炬产生基本垂直于所述沉积表面的等离子体火焰,所述等离子体火焰限定用于在 至少一个前体气体源,以产生用于沉积多晶硅层沉积表面的多晶硅。
    • 10. 发明授权
    • Method of controlling contact angle of water
    • 控制水接触角的方法
    • US07803432B2
    • 2010-09-28
    • US10573967
    • 2004-10-01
    • Junko TakahashiHidenori NagaiShinichi Wakida
    • Junko TakahashiHidenori NagaiShinichi Wakida
    • G21H5/00B05D5/00
    • B01J19/00Y10T137/218Y10T137/2191Y10T137/2196Y10T428/24802
    • The present invention fundamentally differs from conventional methods in which an external force is directly applied to a surface of an article to be modified, and relates to a method of hydrophobilization (increasing a contact angle of water) which comprises bringing a hydrophobilization substance (a substance for increasing a contact angle of water) released from a material of another location into contact with a surface of an article, especially an article surface being hydrophilic (having a small contact angle of water) in its initial state without applying an external force on the article surface, further a method of control being capable of noncontact switching of a contact angle of water, which comprises conducting hydrophilization of an article surface subjected to hydrophobilization by the above-mentioned method in a noncontact manner and repeating these hydrophobilization and hydrophilization, and a method of pattern formation using the mentioned methods. According to those methods, hydrophobilization and hydrophilization can be carried out in the noncontact manner, and by selecting a material, degrees of hydrophobilization and hydrophilization can be adjusted.
    • 本发明与其中外力直接施加到待改性制品的表面的常规方法基本上不同,并且涉及疏水化(增加水的接触角)的方法,其包括使疏水化物质(物质 用于增加从另一位置的材料释放的材料与制品表面特别是在其初始状态下具有亲水性(具有小的接触角的水分)的制品表面,而不对外界施加外力 进一步的控制方法能够非接触地切换水的接触角,其包括通过上述方法以非接触方式进行疏水化的物品表面亲水化并重复这些疏水化和亲水化,以及 使用上述方法形成图案的方法。 根据这些方法,可以以非接触的方式进行疏水化和亲水化,通过选择材料,可以调节疏水化程度和亲水化程度。