会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 4. 发明授权
    • Silicon carbide metal-semiconductor field effect transistors
    • 碳化硅金属半导体场效应晶体管
    • US06686616B1
    • 2004-02-03
    • US09567717
    • 2000-05-10
    • Scott T. AllenJohn W. PalmourTerrence S. Alcorn
    • Scott T. AllenJohn W. PalmourTerrence S. Alcorn
    • H01L2980
    • H01L29/8128H01L21/7605H01L29/1608H01L29/47H01L29/66068H01L29/66856H01L29/812
    • SiC MESFETs are disclosed which utilize a semi-insulating SiC substrate which substantially free of deep-level dopants. Utilization of the semi-insulating substrate may reduce back-gating effects in the MESFETs. Also provided are SiC MESFETs with a two recess gate structure. MESFETS with a selectively doped p-type buffer layer are also provided. Utilization of such a buffer layer may reduce output conductance by a factor of 3 and produce a 3 db increase in power gain over SiC MESFETs with conventional p-type buffer layers. A ground contact may also be provided to the p-type buffer layer and the p-type buffer layer may be made of two p-type layers with the layer formed on the substrate having a higher dopant concentration. SiC MESFETs according to embodiments of the present invention may also utilize chromium as a Schottky gate material. Furthermore, an oxide-nitride-oxide (ONO) passivation layer may be utilized to reduce surface effects in SiC MESFETs. Also, source and drain ohmic contacts may be formed directly on the n-type channel layer, thus, the n+ regions need not be fabricated and the steps associated with such fabrication may be eliminated from the fabrication process. Methods of fabricating such SiC MESFETs and gate structures for SiC FETs as well as passivation layers are also disclosed.
    • 公开了利用基本上不含深层掺杂剂的半绝缘SiC衬底的SiC MESFET。 半绝缘衬底的利用可能会降低MESFET的反向栅极效应。 还提供了具有两个凹陷栅极结构的SiC MESFET。 还提供了具有选择性掺杂的p型缓冲层的MESFET。 使用这种缓冲层可以将输出电导降低3倍,并且与传统的p型缓冲层相比,产生比SiC MESFET增加3db的功率增益。 还可以向p型缓冲层提供接地触点,并且p型缓冲层可以由两层p型层制成,其中在衬底上形成的层具有较高的掺杂剂浓度。 根据本发明实施例的SiC MESFET也可以使用铬作为肖特基栅极材料。 此外,可以利用氧化物 - 氮化物 - 氧化物(ONO)钝化层来降低SiC MESFET中的表面效应。 此外,源极和漏极欧姆接触可以直接形成在n型沟道层上,因此,不需要制造n +区,并且可以从制造过程中消除与这种制造相关联的步骤。 还公开了制造这种SiC MESFET和用于SiC FET以及钝化层的栅极结构的方法。
    • 8. 发明授权
    • Semiconductor device and method of manufacturing the same
    • 半导体装置及其制造方法
    • US06570199B1
    • 2003-05-27
    • US09679365
    • 2000-10-05
    • Masanori Itoh
    • Masanori Itoh
    • H01L2980
    • H01P3/081H01L23/66H01L2924/0002H01P3/088H01L2924/00
    • A semiconductor device is provided which is capable of reducing direct current resistance in a signal line, of reducing a high-frequency resistance even in the case of transmitting high-frequency signals and, therefore, of increasing power gain when employed in, for example, an MMIC for high power. The semiconductor device has a microstrip line containing an interlayer dielectric and signal line formed on a semiconductor substrate on which predetermined circuit devices are mounted, wherein the signal line is made multi-layered with the interlayer dielectric interposed among the multiple layers and wherein the interlayer dielectric is made so thin that pin holes are produced and each layer constituting the signal line is electrically connected to each other through the pin holes.
    • 提供一种半导体器件,其能够降低信号线中的直流电阻,即使在发送高频信号的情况下也降低高频电阻,并且因此在例如采用高频信号时增加功率增益, 用于高功率的MMIC。 该半导体器件具有包含在其上安装有预定电路器件的半导体衬底上形成的层间电介质和信号线的微带线,其中信号线被多层层叠,并且其中层间电介质 使得产生针孔并且构成信号线的每个层通过针孔彼此电连接。
    • 9. 发明授权
    • Self-aligned VT implant
    • 自对准VT植入
    • US06566696B1
    • 2003-05-20
    • US09907359
    • 2001-07-17
    • Jon D. CheekMark MichaelDerick J. WristersJames F. Buller
    • Jon D. CheekMark MichaelDerick J. WristersJames F. Buller
    • H01L2980
    • H01L29/66583H01L29/105H01L29/66537H01L29/66545
    • Integrated circuits with transistors exhibiting improved junction capacitances and various methods of fabricating the same are provided. In one aspect, a method of manufacturing is provided that includes forming a doped region in an active area of a substrate wherein the doped region has a first conductivity type and a first horizontal junction. A first source/drain region of the first conductivity type is formed in the active area with a second horizontal junction. A second source/drain region of the first conductivity type is formed in the active area with a third horizontal junction and a lateral separation from the first source/drain region that defines a channel region. The second and third horizontal junctions are positioned substantially at the first horizontal junction. The portion of the doped region positioned in the channel region is doped with an impurity of a second conductivity type that is opposite to the first conductivity type. Impurity grading across a source/drain-to-body junction is less abrupt, resulting in improved junction capacitance.
    • 提供了具有改善的结电容的晶体管的集成电路及其制造方法。 一方面,提供一种制造方法,其包括在衬底的有源区中形成掺杂区域,其中所述掺杂区域具有第一导电类型和第一水平结。 第一导电类型的第一源极/漏极区域形成在具有第二水平结的有源区域中。 第一导电类型的第二源极/漏极区域在有源区域中形成有第三水平结和与限定沟道区域的第一源极/漏极区域的横向分离。 第二和第三水平接头基本位于第一水平接头处。 位于沟道区域中的掺杂区域的部分掺杂有与第一导电类型相反的第二导电类型的杂质。 通过源极/漏极到体区结的杂质分级不太突然,导致改善的结电容。