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    • 7. 发明授权
    • Methods for obtaining hollow nano-structures
    • 获得中空纳米结构的方法
    • US09067242B2
    • 2015-06-30
    • US13978407
    • 2012-01-26
    • Francesco De AngelisEnzo Di Fabrizio
    • Francesco De AngelisEnzo Di Fabrizio
    • B31D3/00B05D3/06B81C1/00B82Y35/00G01Q60/40G01Q70/16
    • B05D3/068B81C1/00087B82Y35/00G01Q60/40G01Q70/16
    • Methods are provided for obtaining hollow nano-structures which include the steps of providing a suspended film starting layer on a support substrate, depositing on the starting layer a sacrificial layer, performing, in progressive sequence, a complete erosion phase of said support substrate and starting layer and performing an at least partial erosion phase of the sacrificial layer previously deposited on the starting layer so as to obtain holes passing through the starting layer and passing or non passing through the sacrificial layer, depositing, on the side of the support substrate opposite to that where the starting layer is put, at least one covering layer arranged to internally cover the holes created by the progressive erosion. Hollow nano-structures formed by such methods are also provided.
    • 提供了用于获得中空纳米结构的方法,其包括以下步骤:在支撑衬底上提供悬浮膜起始层,在起始层上沉积牺牲层,以渐进顺序执行所述支撑衬底的完全侵蚀阶段,并开始 并且执行预先沉积在起始层上的牺牲层的至少部分侵蚀阶段,以便获得穿过起始层并穿过或不通过牺牲层的空穴,在支撑基板的相对侧上沉积 放置起始层的位置,至少一个覆盖层布置成内部覆盖由渐进侵蚀产生的孔。 还提供了通过这种方法形成的空心纳米结构。
    • 10. 发明授权
    • Protection of porous substrates before treatment
    • 治疗前保护多孔基质
    • US08961803B1
    • 2015-02-24
    • US14327449
    • 2014-07-09
    • Imec VZW
    • Mikhaïl Baklanov
    • B31D3/00H01L21/02H01L21/3065H01L21/308
    • H01L21/76802H01L21/3105H01L21/31116H01L21/31138H01L21/76814H01L21/76826
    • A method is provided for treating a surface of a porous material in an environment, the method comprising the steps of contacting a porous material with an organic gas in an environment having a pressure P1 and a temperature T1, wherein the organic gas is such that at the pressure P1 and at the temperature T1 it remains a gas when outside of the porous material but condenses as an organic liquid when in contact with the porous material, thereby filling pores of the porous material with the organic liquid, cooling down the filled porous material to a temperature T2 such that the organic liquid freezes within the pores, thereby sealing the pores with an organic solid, thereby providing a protected porous material, and performing a treatment on the surface.
    • 提供一种在环境中处理多孔材料的表面的方法,该方法包括以下步骤:在具有压力P1和温度T1的环境中使多孔材料与有机气体接触,其中有机气体使得在 压力P1和温度T1时,当与多孔材料接触时,它保持气体,但是当与多孔材料接触时会凝结成有机液体,从而用有机液体填充多孔材料的孔隙,冷却填充的多孔材料 温度T2使得有机液体在孔内冻结,从而用有机固体密封孔,从而提供受保护的多孔材料,并对表面进行处理。