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1. 发明申请

US20220311200A1 CAPPED BLOCKING COATING FOR LASER OPTICS 有权
公开(公告)号：US20220311200A1
公开(公告)日：2022-09-29
申请号：US17690311
申请日：2022-03-09
申请人： CORNING INCORPORATED
发明人： Gerald Philip Cox , Thomas Edward Gebo
IPC分类号： H01S3/034
摘要： Methods, systems, and devices are described. A system may include an optically transmissive substrate having a protective coating on a first surface and a blocking coating on a second surface that is opposite the first surface. The protective coating is configured to protect the optically transmissive substrate from at least ultraviolet laser energy, and the blocking coating has a first thickness that is less than about 280 nanometers and is adhered to a subset of the second surface. The system further includes a capping layer covering the blocking coating that is on the subset of the second surface and having a second thickness less than the first thickness of the blocking coating. Additionally, the system includes a sealing component positioned between the capping layer and a structure configured to support the optically transmissive substrate.

2. 发明申请

US20220200225A1 LIGHT EMITTING SEALED BODY AND LIGHT SOURCE DEVICE 有权
公开(公告)号：US20220200225A1
公开(公告)日：2022-06-23
申请号：US17129750
申请日：2020-12-21
申请人： HAMAMATSU PHOTONICS K.K , ENERGETIQ TECHNOLOGY, INC.
发明人： Akio SUZUKI , Toru FUJITA , Akinori ASAI , Yusei NAGATA , Shinichi OHBA , Takayuki OHSHIRO , Matthew PARTLOW , Ron COLLINS , Stephen F. HORNE , Laura OWENS
IPC分类号： H01S3/034 , H01S3/038
摘要： A light emitting sealed body includes: a housing which stores a discharge gas and is provided with a first opening to which first light is incident along a first optical axis and a second opening from which second light is emitted along a second optical axis; a first window portion which hermetically seals the first opening; a second window portion which hermetically seals the second opening; and a first electrode and a second electrode. The housing is formed of a light shielding material which does not transmit the first light and the second light. An internal space is defined by the housing, the first window portion, and the second window portion and the internal space is filled with the discharge gas. The first opening and the second opening are disposed so that the first optical axis and the second optical axis intersect each other.

3. 发明授权

US11264773B2 Laser apparatus and method for manufacturing optical element 有权
公开(公告)号：US11264773B2
公开(公告)日：2022-03-01
申请号：US16674994
申请日：2019-11-05
申请人： Gigaphoton Inc.
发明人： Daisuke Tei , Osamu Wakabayashi
IPC分类号： H01S3/034 , H01S3/081 , C30B29/12 , G02B1/02 , G02B27/12 , G03F7/20 , H01S3/08 , H01S3/13 , H01S3/22 , H01S3/225 , G02B27/10
摘要： A laser apparatus including an optical element made of a CaF2 crystal and configured to transmit an ultraviolet laser beam obliquely incident on one surface of the optical element, the electric field axis of the P-polarized component of the laser beam propagating through the optical element coinciding with one axis contained in of the CaF2 crystal, with the P-polarized component defined with respect to the one surface. A method for manufacturing an optical element, the method including causing a seed CaF2 crystal to undergo crystal growth along one axis contained in to form an ingot, setting a cutting axis to be an axis inclining by an angle within 14.18±5° with respect to the crystal growth direction toward the direction of another axis contained in , which differs from the crystal growth direction, and cutting the ingot along a plane perpendicular to the cutting axis.

4. 发明申请

US20210194202A1 METROLOGY FOR A BODY OF A GAS DISCHARGE STAGE 有权
公开(公告)号：US20210194202A1
公开(公告)日：2021-06-24
申请号：US17267949
申请日：2019-08-15
申请人： Cymer, LLC
发明人： Andrei Dorobantu , Jacob Arthur Cohen , Kumar Raja Guvindan Raju , Walter Dale Gillespie , Eric Shaun Gross , Richard Carl Ujazdowski
IPC分类号： H01S3/0971 , H01S3/034 , H01S3/101
摘要： A light source apparatus includes a gas discharge stage including a three-dimensional body defining a cavity that is configured to interact with an energy source, the body including at least two ports that are transmissive to a light beam having a wavelength in the ultraviolet range; a sensor system comprising a plurality of sensors, each sensor is configured to measure a physical aspect of a respective distinct region of the body of the gas discharge stage relative to that sensor; and a control apparatus in communication with the sensor system. The control apparatus is configured to analyze the measured physical aspects from the sensors to thereby determine a position of the body of the gas discharge stage in an XYZ coordinate system defined by an X axis, wherein the X axis is defined by the geometry of the gas discharge stage.

5. 发明申请

US20210036477A1 LIGHT SOURCE APPARATUS 有权
公开(公告)号：US20210036477A1
公开(公告)日：2021-02-04
申请号：US16814418
申请日：2020-03-10
申请人： Samsung Electronics Co., Ltd.
发明人： Akihiro Komatsu , Tomoki Onishi
IPC分类号： H01S3/034 , H01S3/22 , H01S3/223 , H05H1/46 , H01J37/32
摘要： A light source apparatus includes an airtight container having a hemispherical or semielliptical first curved portion configured to receive laser light, a hemispherical or semielliptical second curved portion opposite to the first curved portion, and a cylindrical portion connecting the first curved portion and the second curved portion; assist gas sealed in the airtight container; and a light source configured to irradiate laser light to the first curved portion from outside of the airtight container.

6. 发明申请

US20180269643A1 EXCIMER LASER GENERATOR AND EXCIMER LASER ANNEALING EQUIPMENT 审中-公开
公开(公告)号：US20180269643A1
公开(公告)日：2018-09-20
申请号：US15841619
申请日：2017-12-14
申请人： BOE TECHNOLOGY GROUP CO., LTD. , CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
发明人： Yin XIE , Zubin LV , Yu ZHANG , Yongzhou LING , Yayu WANG , Jingshuai WANG , Chenliang LIU , Rujian LI , Kang LUO
IPC分类号： H01S3/034 , H01S3/036 , H01S3/225
CPC分类号： H01S3/034 , H01S3/02 , H01S3/0346 , H01S3/036 , H01S3/225
摘要： An excimer laser generator and an excimer laser annealing equipment are disclosed to improve the convenience of window replacement, improve the replacement efficiency and reduce the gas waste. The excimer laser generator includes a reflector, an active medium cavity and an output mirror arranged in sequence. The active medium cavity has a first opening facing the reflector and a second opening facing the output mirror. The excimer laser generator further includes two replacement units respectively arranged between the first opening and the reflector, and between the second opening and the output mirror. Each of the replacement units includes a support plate and a driving component. The support plate is provided with a plurality of windows, and the driving component is adapted for driving the support plate so that one of the plurality of windows seals a corresponding opening.

7. 发明申请

US20180226764A1 LASER DEVICE AND INTERNAL COMBUSTION ENGINE 审中-公开
公开(公告)号：US20180226764A1
公开(公告)日：2018-08-09
申请号：US15889434
申请日：2018-02-06
申请人： Kentaroh HAGITA , Yoichi Ishikawa , Naoto Jikutani , Toshiyuki Ikeoh , Yuzuru Sasaki , Yusuke Okura
发明人： Kentaroh HAGITA , Yoichi Ishikawa , Naoto Jikutani , Toshiyuki Ikeoh , Yuzuru Sasaki , Yusuke Okura
IPC分类号： H01S3/034 , H01S3/02 , H01S3/094 , F02P23/04
CPC分类号： H01S3/034 , F02P13/00 , F02P23/04 , G02B1/118 , H01S3/005 , H01S3/025 , H01S3/0606 , H01S3/0627 , H01S3/094053 , H01S3/094057 , H01S3/09415 , H01S3/113 , H01S3/1643 , H01S3/1685 , H01S5/423 , H01T13/06
摘要： Laser devices include a light source that emits a laser beam, an optical system that concentrates the laser beam emitted from the light source, an optical window through which the laser beam exited from the optical system passes, a housing that accommodates the optical system, and an optical window holding member fixed to the housing. The optical window holding member holds the optical window. In the first laser device, the optical window has a face or a protruding face through which the laser beam passes. When the optical window has the face, the face is flush with an edge of the optical window holding member and a film is formed on the face. When the optical window has the protruding face, the protruding face protrudes with reference to the edge of the optical window holding member and a film is formed on the protruding face.

8. 发明授权

US09515446B2 Gas laser device 有权
标题翻译：气体激光装置
公开(公告)号：US09515446B2
公开(公告)日：2016-12-06
申请号：US14898341
申请日：2013-12-27
申请人： Mitsubishi Electric Corporation
发明人： Yoichi Tanino , Junichi Nishimae , Tatsuya Yamamoto
IPC分类号： H01S3/03 , H01S3/038 , H01S3/034 , H01S3/08 , H01S3/10 , H01S3/0971 , H01S3/223
CPC分类号： H01S3/038 , H01S3/034 , H01S3/076 , H01S3/0805 , H01S3/0971 , H01S3/10007 , H01S3/2232 , H01S3/2325 , H01S3/2366 , H01S2301/02
摘要： A gas laser device which can perform optical amplification, laser light passing through a laser gas excited by electrical discharge, including: a first and second pair of discharge electrodes arranged longitudinally along an optical axis of the laser light; at least two mirrors reflecting the laser light amplified by the gas laser, the mirrors arranged opposite to each other to interpose a first discharge region defined by the first pair of discharge electrodes and a second discharge region defined by the second pair of discharge electrodes therebetween; and a shielding member located between the first pair of discharge electrodes and the second pair of discharge electrodes, the shielding member protruding from electrode surfaces of the discharge electrodes toward the optical axis of the laser light. The configuration can efficiently suppress parasitic oscillation with a simple structure.
摘要翻译：一种能够执行光放大的激光装置，通过通过放电激发的激光气体的激光，包括：沿着激光的光轴纵向排列的第一和第二对放电电极; 反射由气体激光器放大的激光的至少两个反射镜，彼此相对布置的反射镜，以插入由第一对放电电极限定的第一放电区域和由第二对放电电极限定的第二放电区域; 以及位于所述第一对放电电极和所述第二对放电电极之间的屏蔽部件，所述屏蔽部件从所述放电电极的电极表面朝向所述激光的光轴突出。该结构能够以简单的结构有效地抑制寄生振荡。

9. 发明申请

US20160316551A1 LASER DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM 有权
标题翻译：激光器件和超极紫外光发生系统
公开(公告)号：US20160316551A1
公开(公告)日：2016-10-27
申请号：US15202781
申请日：2016-07-06
申请人： GIGAPHOTON INC.
发明人： Yoshiaki KUROSAWA
IPC分类号： H05G2/00 , H01S3/10 , H01S3/034 , H01S3/23 , H01S3/223
CPC分类号： H05G2/008 , H01S3/0071 , H01S3/034 , H01S3/1003 , H01S3/115 , H01S3/2232 , H01S3/2316 , H01S3/2325 , H05G2/003
摘要： An example laser apparatus of the disclosure may include an oscillator capable of outputting a laser beam, a slab optical amplifier capable of amplifying the laser beam outputted by the oscillator by passing the laser beam through an optical amplification region shaped like a slab and outputting the amplified laser beam, and a mirror disposed on an optical path of the laser beam to enter the slab optical amplifier or the amplified laser beam outputted from the slab optical amplifier, the mirror being movable in a direction parallel to a plane where the laser beam travels in the slab optical amplifier.
摘要翻译：本公开的示例性激光装置可以包括能够输出激光束的振荡器，能够通过使激光束通过形状像平板的光放大区域来放大由振荡器输出的激光束的平板光学放大器，并输出放大的激光束和设置在激光束的光路上的反射镜进入板式光放大器或从平板光放大器输出的放大激光束，反射镜可以在平行于激光束行进的平面的方向上移动板式光放大器。

10. 发明授权

US09350137B1 Laser processing method and laser processing system 有权
标题翻译：激光加工方法和激光加工系统
公开(公告)号：US09350137B1
公开(公告)日：2016-05-24
申请号：US14699763
申请日：2015-04-29
申请人： Kiwamu Takehisa
发明人： Kiwamu Takehisa
IPC分类号： H01S3/10 , H01S3/11 , H01S3/16 , H01S3/223 , H01S3/23 , H01S3/22 , H01S3/092 , H01S3/034 , H01S3/02
CPC分类号： B23K26/0622 , F41H13/005 , H01S3/005 , H01S3/036 , H01S3/092 , H01S3/1024 , H01S3/104 , H01S3/1608 , H01S3/1643 , H01S3/2215 , H01S3/223 , H01S3/2232 , H01S3/2391
摘要： The disclosed invention relates to a method of realizing a laser processing system. The system relating to one aspect of the invention is provided with a processing laser, a vaporization laser, and an oscillator controller. The processing laser is a flashlamp-pumped 1.06 μm solid-state laser, a pulsed iodine laser or an oxygen molecule laser. The vaporization laser is a pulsed laser whose wavelength is longer than 1.4 μm.
摘要翻译：所公开的发明涉及一种实现激光加工系统的方法。与本发明的一个方面有关的系统设置有处理激光器，汽化激光器和振荡器控制器。处理激光器是闪光灯泵浦的1.06μm固态激光器，脉冲碘激光器或氧分子激光器。蒸发激光器是波长大于1.4μm的脉冲激光器。

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