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IMPROVED MICRO-FLUID EJECTION DEVICES AND METHOD THEREFOR

申请号 PCT/US2005029553 申请日 2005-08-19 公开(公告)号 WO2006033738A3 公开(公告)日 2007-04-12
申请人 LEXMARK INT INC; 发明人 CORNELL ROBERT W; GOIN RICHARD L; POWERS JAMES H;
摘要 A micro-fluid ejection head structure having multiple arrays of fluid ejection actuators. The structure includes a semiconductor substrate having a first array of fluid ejection actuators for ejecting a first fluid therefrom, and a second array of fluid ejection actuators for ejecting a second fluid therefrom. The first array of fluid ejection actuators is disposed in a first location on the substrate, and the second array of fluid ejection actuators is disposed in a second location on the substrate. A thick film layer having a thickness is attached adjacent the semiconductor substrate. The thick film layer has fluid flow channels formed therein solely for the first array of fluid ejection actuators. A nozzle plate is attached to the thick film layer opposite the semiconductor substrate. The nozzle plate has fluid flow channels formed therein for both the first array of fluid ejection actuators and the second array of fluid ejection actuators.
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