基本信息:
- 专利标题： 双轴浮动定子线性平台
- 专利标题（英）：Linear platform of double-shaft floating stator
- 申请号：CN201110421784.1 申请日：2011-12-15
- 公开(公告)号：CN102522356A 公开(公告)日：2012-06-27
- 发明人： 王红 , 禹新路 , 李泽湘 , 高宜铭 , 潘明
- 申请人： 东莞华中科技大学制造工程研究院
- 申请人地址： 广东省东莞市松山湖科技产业园区科技九路1号
- 专利权人： 东莞华中科技大学制造工程研究院
- 当前专利权人： 东莞华中科技大学制造工程研究院
- 当前专利权人地址： 广东省东莞市松山湖科技产业园区科技九路1号
- 主分类号： H01L21/67
- IPC分类号： H01L21/67 ; H01L21/68
The invention provides a linear platform of a double-shaft floating stator, which comprises a base, a first direction driving device, a second direction driving device and a working platform connected with the first direction driving device and the second direction driving device are fixed on the base; when the drive motors in the first direction driving device and the second direction driving device drive the working platform to move, the stators of the drive motors move along a direction opposite to the movement direction of the working platform. According to the invention, when the rotors of the drive motors propel the working platform to move, the stators of the drive motors drive a stator to slide toward a direction opposite to the movement direction of the working platform instead of directly acting on the base of the platform under the counterforce of the stators of the drive motors so as to avoid the impact on the base and improve the locating precision and the measuring precision of the linear platform, and the linear platform can be located at a micron level of locating precision.
公开/授权文献:
- CN102522356B 双轴浮动定子线性平台 公开/授权日：2015-03-25
IPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01L | 半导体器件；其他类目未包含的电固体器件 |
| ------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
| --------H01L21/67 | .专门适用于在制造或处理过程中处理半导体或电固体器件的装置；专门适合于在半导体或电固体器件或部件的制造或处理过程中处理晶片的装置 |