
基本信息:
- 专利标题: 一种AlN晶体的制备方法
- 专利标题(英):Method for preparing AlN crystal
- 申请号:CN201210093222.3 申请日:2012-03-31
- 公开(公告)号:CN102618930A 公开(公告)日:2012-08-01
- 发明人: 韩杰才 , 宋波 , 赵超亮 , 张幸红 , 张化宇 , 张宇民
- 申请人: 哈尔滨工业大学
- 申请人地址: 黑龙江省哈尔滨市南岗区西大直街92号
- 专利权人: 哈尔滨工业大学
- 当前专利权人: 哈尔滨工业大学
- 当前专利权人地址: 黑龙江省哈尔滨市南岗区西大直街92号
- 代理机构: 哈尔滨市松花江专利商标事务所
- 代理人: 韩末洙
- 主分类号: C30B29/38
- IPC分类号: C30B29/38 ; C30B23/00
The invention discloses a method for preparing an AlN crystal, which relates to a method for preparing a crystal and solves the problems of large lattice mismatch between a heterogeneous seed crystal and the AlN crystal and high defect density of the AlN crystal in a method for preparing an AlN single crystal by a physical vapor transport (PVT) method in the prior art. The method comprises the following steps of: 1, putting AlN powder into a crucible, fixing a seed crystal on the top of the crucible, raising the temperature to 1,800-2,000 DEG C in the presence of nitrogen, and preserving the heat for 1 to 5 hours; and 2, heating to raise the temperature of the pre-sintered AlN powder to 2,150-2,300 DEG C in the presence of the nitrogen, preserving the heat, reacting for 8 to 20 hours, and reducing to room temperature. A zero micro tube SiC is used as the heterogeneous seed crystal, so that the defect density of the AlN crystal can be reduced; and simultaneously, an angle-deviated SiC seed crystal is deviated from a surface at a certain angel, so that the inheriting probability of defects is remarkably reduced, and negative influences of the defects on the performance of a device are reduced finally. The AlN crystal is used for a semiconductor device.
公开/授权文献:
- CN102618930B 一种AlN晶体的制备方法 公开/授权日:2015-09-09