
基本信息:
- 专利标题: 横向扩散金属氧化物半导体器件及其制造方法
- 专利标题(英):Laterally-diffused metal oxide semiconductor device and manufacture method thereof
- 申请号:CN201310186628.0 申请日:2013-05-16
- 公开(公告)号:CN104167360A 公开(公告)日:2014-11-26
- 发明人: 章舒 , 韩广涛 , 孙贵鹏
- 申请人: 无锡华润上华半导体有限公司
- 申请人地址: 江苏省无锡市国家高新技术产业开发区汉江路5号
- 专利权人: 无锡华润上华半导体有限公司
- 当前专利权人: 无锡华润上华科技有限公司
- 当前专利权人地址: 江苏省无锡市国家高新技术产业开发区汉江路5号
- 代理机构: 广州华进联合专利商标代理有限公司
- 代理人: 邓云鹏
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L29/78
The invention discloses and a manufacture method of a laterally-diffused metal oxide semiconductor device. The method comprises the following steps: growing an oxide layer on a substrate of a wafer; coating photoresist on the surface of the wafer; carrying out photoetching by utilizing a first photoetching mask plate, and exposing a first injection window after developing; carrying out ion injection through the first injection window and forming a drift region in the substrate; coating a layer of photoresist on the surface of the wafer again after photoresist removing; carrying out photoetching by utilizing a drift region oxide layer photoetching mask plate; and carrying out etching on the oxide layer and forming a drift region oxide layer. The invention also relates to the laterally-diffused metal oxide semiconductor device. According to the method in the invention, the drift region oxide layer is grown first, and then, drift region injection is carried out, thereby preventing the problems of high on-resistance and thin concentration in laterally-diffused region of the drift region injection irons due to thermally growing the drift region oxide layer; and the irons with relatively-high concentration is directly injected to the region, thereby effectively reducing the on-resistance.
公开/授权文献:
- CN104167360B 横向扩散金属氧化物半导体器件及其制造方法 公开/授权日:2017-05-31
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
--------H01L21/02 | .半导体器件或其部件的制造或处理 |
----------H01L21/027 | ..未在H01L21/18或H01L21/34组中包含的为进一步的光刻工艺在半导体之上制作掩膜 |
------------H01L21/18 | ...器件有由周期表第Ⅳ族元素或含有/不含有杂质的AⅢBⅤ族化合物构成的半导体,如掺杂材料 |
--------------H01L21/26 | ....用波或粒子辐射轰击的 |
----------------H01L21/335 | .....场效应晶体管 |
------------------H01L21/336 | ......带有绝缘栅的 |