
基本信息:
- 专利标题: 半导体器件耐压结构
- 专利标题(英):Semiconductor device voltage-withstanding structure
- 申请号:CN201510713750.8 申请日:2015-10-28
- 公开(公告)号:CN106653830A 公开(公告)日:2017-05-10
- 发明人: 顾炎 , 宋华 , 张森
- 申请人: 无锡华润上华半导体有限公司
- 申请人地址: 江苏省无锡市国家高新技术产业开发区新洲路8号
- 专利权人: 无锡华润上华半导体有限公司
- 当前专利权人: 无锡华润上华科技有限公司
- 当前专利权人地址: 江苏省无锡市国家高新技术产业开发区新洲路8号
- 代理机构: 广州华进联合专利商标代理有限公司
- 代理人: 邓云鹏
- 主分类号: H01L29/40
- IPC分类号: H01L29/40 ; H01L29/78 ; H01L29/861 ; H01L29/739
The invention relates to a semiconductor device voltage-withstanding structure. The semiconductor device voltage-withstanding structure comprises a high-voltage interconnection area used for arranging a high-voltage interconnection line, and a metal layer, a dielectric layer, a field oxide layer and an area, apart from an active region, of a drift area are successively arranged below the high-voltage interconnection area. The semiconductor device voltage-withstanding structure further comprises a plurality of conductor field plates and a plurality of semi-insulating resistor filed plates, wherein the conductor field plates are disposed above the semi-insulating resistor filed plates, and the conductor field plates are disposed in the dielectric layer, all the semi-insulating resistor filed plates are adjacent to the field oxide layer, the conductor field plates and the semi-insulating resistor filed plates form a plurality of capacitors, and any one capacitor at least can transmit energy to another capacitor. The semiconductor device voltage-withstanding structure generally reduces high voltages borne by the surface of the drift area, improves breakdown voltages of a semiconductor device and enables the semiconductor device to work under higher voltages.
公开/授权文献:
- CN106653830B 半导体器件耐压结构 公开/授权日:2019-09-17