
基本信息:
- 专利标题: 一种载片传输装置及其传输方法
- 专利标题(英):Carrier transmitting device and transmitting method thereof
- 申请号:CN201511025508.8 申请日:2015-12-30
- 公开(公告)号:CN106935538A 公开(公告)日:2017-07-07
- 发明人: 余斌
- 申请人: 上海微电子装备有限公司
- 申请人地址: 上海市浦东新区张东路1525号
- 专利权人: 上海微电子装备有限公司
- 当前专利权人: 上海微电子装备(集团)股份有限公司
- 当前专利权人地址: 上海市浦东新区张东路1525号
- 代理机构: 上海思微知识产权代理事务所
- 代理人: 屈蘅; 李时云
- 主分类号: H01L21/677
- IPC分类号: H01L21/677
The invention discloses a carrier transmitting device and a transmitting method thereof. The carrier transmitting device comprises a moving guide rail, a conveying mechanism connected with the moving guide rail and a carrier holder which is arranged on the moving guide rail and connected with the conveying mechanism, and a carrier is arranged on the carrier holder. The carrier transmitting device is characterized by further comprising a rotating mechanism and a cooling mechanism which are connected with the carrier holder, wherein the carrier holder is provided with a first carrier region and a second carrier region which are symmetrically arranged relative to the rotating mechanism, and the rotating mechanism rotates and is used for switching the positions of the first carrier region and the second carrier region. Through setting the first carrier region and the second carrier region on the carrier holder and the cooling mechanism connected with the carrier holder, the carrier transmitting device is convenient to perform cooling and disassembling on a bonded carrier during the bonding process of a carrier and place the next carrier to be bonded, thereby reducing the waste of time, and greatly improving the work efficiency. In addition, the carrier transmitting device is provided with the rotating device, thereby being capable of driving the carrier holder to rotate so as to switch the positions of the two carrier regions, and further improving the bonding efficiency.
公开/授权文献:
- CN106935538B 一种载片传输装置及其传输方法 公开/授权日:2020-08-04