
基本信息:
- 专利标题: 一种芯片键合装置及键合方法
- 专利标题(英):Chip bonding device and chip bonding method
- 申请号:CN201610113369.2 申请日:2016-02-29
- 公开(公告)号:CN107134446A 公开(公告)日:2017-09-05
- 发明人: 陈飞彪 , 郭耸 , 戈亚萍
- 申请人: 上海微电子装备有限公司
- 申请人地址: 上海市浦东新区张东路1525号
- 专利权人: 上海微电子装备有限公司
- 当前专利权人: 上海微电子装备(集团)股份有限公司
- 当前专利权人地址: 上海市浦东新区张东路1525号
- 代理机构: 上海思微知识产权代理事务所
- 代理人: 屈蘅; 李时云
- 主分类号: H01L23/544
- IPC分类号: H01L23/544 ; H01L21/66 ; H01L21/67 ; H01L21/677
The invention provides a chip bonding device and a chip bonding method. The chip bonding device comprises a measurement system, and is characterized in that the measurement system comprises a first measurement branch and a second measurement branch, the first measurement branch comprises a first lighting unit and a first detecting unit, the second measurement branch comprises a second lighting unit and a second detecting unit, the first lighting unit and the first detecting unit detect the positions of X-direction marks on a chip and a substrate in a matched manner, and the second lighting unit and the second detecting unit detect the positions of Y-direction marks on the chip and the substrate in a matched manner, so that the positions of the chip marks and the substrate marks are synchronously measured, and the measurement time is saved. The chip bonding device provided by the invention can directly absorb a chip from a first moving platform and realize overturn of the chip through setting an overturn device; and meanwhile, the chip bonding device measure the positions of the chip marks and the substrate marks synchronously through setting the measurement system, so that the bonding yield is improved from the two aspects. In addition, the chip bonding device realizes high-precision bonding through adjusting the attitude of a second moving platform.
公开/授权文献:
- CN107134446B 一种芯片键合装置及键合方法 公开/授权日:2019-05-31
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L23/00 | 半导体或其他固态器件的零部件 |
--------H01L23/544 | .加到半导体器件上的标志,例如注册商标、测试图案 |