
基本信息:
- 专利标题: 一种基于双压力膜和弱耦合谐振系统的高灵敏微压传感器
- 专利标题(英):High-sensitivity micro-pressure sensor based on dual pressure film and weak coupling resonance system
- 申请号:CN201910893549.0 申请日:2019-09-20
- 公开(公告)号:CN110501098A 公开(公告)日:2019-11-26
- 发明人: 程荣俊 , 李振阳 , 宋鹏程 , 黄强先 , 张连生 , 李瑞君 , 苗恩铭
- 申请人: 合肥工业大学
- 申请人地址: 安徽省合肥市包河区屯溪路193号
- 专利权人: 合肥工业大学
- 当前专利权人: 合肥工业大学
- 当前专利权人地址: 安徽省合肥市包河区屯溪路193号
- 代理机构: 合肥金安专利事务所
- 代理人: 金惠贞
- 主分类号: G01L1/16
- IPC分类号: G01L1/16
The invention discloses a high-sensitivity micro-pressure sensor based on a dual pressure film and a weak coupling resonance system. The sensor comprises a pressure film layer and a quartz resonance layer. The pressure film layer is provided with two pressure films and two offset bosses and used to transmit pressure to be measured. The quartz resonance layer is provided with a weak coupling resonance system and a pair of excitation and detection electrodes. The weak coupling resonance system comprises two double-ended fixed support quartz beams and a weak coupling beam. The anchor points on both ends of the first double-ended fixed support quartz beam are engaged with the offset bosses on the pressure film layer, and are used to withstand compressive stress caused by the pressure to be measured. The excitation and detection electrodes are used to drive two double-ended fixed support quartz beams to resonate. The modal localization effect caused by the vibration imbalance of two quartzbeams is used, and the amplitude ratio of two quartz beams is detected as the output to acquire the pressure value to be measured. The sensor provided by the invention solves the problem of low sensitivity of micro pressure measurement of a traditional resonance pressure sensor, and has the advantages of high sensitivity and strong anti-interference ability.
公开/授权文献:
- CN110501098B 一种基于双压力膜和弱耦合谐振系统的高灵敏微压传感器 公开/授权日:2020-11-20
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01L | 测量力、应力、转矩、功、机械功率、机械效率或流体压力 |
------G01L1/00 | 力或应力的一般计量 |
--------G01L1/16 | .应用压电器件的性质 |