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    • 93. 发明申请
    • METHOD AND STRUCTURE FOR DOUBLE LINING FOR SHALLOW TRENCH ISOLATION
    • 用于浅层隔离的双层衬垫的方法和结构
    • US20070087519A1
    • 2007-04-19
    • US11536458
    • 2006-09-28
    • Liu Chi-KangXin WangZe Li
    • Liu Chi-KangXin WangZe Li
    • H01L21/76H01L29/76H01L29/94H01L31/00
    • H01L21/76232
    • A method of forming an integrated circuit device structure having a design rule of less than 0.13 micron. The method includes providing a substrate and forming a pad oxide layer overlying the substrate. The method includes forming a nitride layer overlying the pad oxide layer and patterning the nitride layer and pad oxide layer. A trench structure is formed within a thickness of the substrate using the patterned nitride layer and pad oxide layer as hard mask. The method forms a first thickness of liner oxide within the trench structure using at least thermal oxidation of an exposed region of the trench structure to cover the trench structure. Such thermal oxidation causes a rounding region near corners of the trench structure. The method selectively removes the thickness of liner oxide within the trench structure. The method forms a second thickness of liner oxide within the trench structure using at least thermal oxidation to cover the trench structure. The thermal oxidation causes a further rounding of the rounded region near corners of the trench structure. The method also selectively removes the patterned nitride layer while the second thickness of liner oxide protects the substrate in the trench region.
    • 一种形成设计规则小于0.13微米的集成电路器件结构的方法。 该方法包括提供衬底和形成覆盖衬底的衬垫氧化物层。 该方法包括形成覆盖衬垫氧化物层的氮化物层,并对氮化物层和焊盘氧化物层进行构图。 使用图案化氮化物层和衬垫氧化物层作为硬掩模,在衬底的厚度内形成沟槽结构。 该方法使用沟槽结构的暴露区域的至少热氧化覆盖沟槽结构,在沟槽结构内形成衬垫氧化物的第一厚度。 这种热氧化导致沟槽结构的拐角附近的圆形区域。 该方法选择性地去除了沟槽结构内的衬里氧化物的厚度。 该方法使用至少热氧化覆盖沟槽结构在沟槽结构内形成衬垫氧化物的第二厚度。 热氧化导致沟槽结构的拐角附近的圆形区域进一步的圆化。 该方法还选择性地去除图案化的氮化物层,同时衬垫氧化物的第二厚度保护沟槽区域中的衬底。
    • 95. 发明申请
    • Combining multiple physical traffic channels in a wireless communication system
    • 在无线通信系统中组合多个物理业务信道
    • US20060182152A1
    • 2006-08-17
    • US11059247
    • 2005-02-16
    • Qi BiAhmed TarrafXin WangYang Yang
    • Qi BiAhmed TarrafXin WangYang Yang
    • H04Q7/00H04Q7/24H04J3/02
    • H04L69/168H04L12/2856H04L69/14H04L69/16H04W36/28H04W76/15
    • A wireless communication system (20) allows communications between a mobile station (22) and a wireless network (24) over combined physical traffic channels (44, 46). In a disclosed example, a mobile station (22) has multiple wireless access terminals (40, 42) for transmitting different portions of a communication over multiple physical traffic channels (44, 46). In a disclosed example, each wireless access terminal (40, 42) utilizes one of the channels (44, 46). A known multilink PPP protocol facilitates splitting a communication into portions to be communicated over the combined physical traffic channels (44, 46) and then recombined at the mobile station (22) or an appropriate portion of the network (24). With a disclosed example, the achievable throughput using combined physical traffic channels (44, 46) approaches the aggregate or sum of the individual channel throughput capacities.
    • 无线通信系统(20)允许通过组合的物理业务信道(44,46)在移动台(22)和无线网络(24)之间进行通信。 在公开的示例中,移动台(22)具有用于通过多个物理业务信道(44,46)发送通信的不同部分的多个无线接入终端(40,42)。 在公开的示例中,每个无线接入终端(40,42)利用信道(44,46)中的一个。 已知的多链路PPP协议便于将通信划分成将在组合的物理业务信道(44,46)上传送的部分,然后在移动台(22)或网络(24)的适当部分进行重组。 利用公开的示例,使用组合物理业务信道(44,46)的可实现吞吐量接近各个信道吞吐量容量的总和或者。