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    • 1. 发明申请
    • METHOD AND STRUCTURE FOR DOUBLE LINING FOR SHALLOW TRENCH ISOLATION
    • 用于浅层隔离的双层衬垫的方法和结构
    • US20070087519A1
    • 2007-04-19
    • US11536458
    • 2006-09-28
    • Liu Chi-KangXin WangZe Li
    • Liu Chi-KangXin WangZe Li
    • H01L21/76H01L29/76H01L29/94H01L31/00
    • H01L21/76232
    • A method of forming an integrated circuit device structure having a design rule of less than 0.13 micron. The method includes providing a substrate and forming a pad oxide layer overlying the substrate. The method includes forming a nitride layer overlying the pad oxide layer and patterning the nitride layer and pad oxide layer. A trench structure is formed within a thickness of the substrate using the patterned nitride layer and pad oxide layer as hard mask. The method forms a first thickness of liner oxide within the trench structure using at least thermal oxidation of an exposed region of the trench structure to cover the trench structure. Such thermal oxidation causes a rounding region near corners of the trench structure. The method selectively removes the thickness of liner oxide within the trench structure. The method forms a second thickness of liner oxide within the trench structure using at least thermal oxidation to cover the trench structure. The thermal oxidation causes a further rounding of the rounded region near corners of the trench structure. The method also selectively removes the patterned nitride layer while the second thickness of liner oxide protects the substrate in the trench region.
    • 一种形成设计规则小于0.13微米的集成电路器件结构的方法。 该方法包括提供衬底和形成覆盖衬底的衬垫氧化物层。 该方法包括形成覆盖衬垫氧化物层的氮化物层,并对氮化物层和焊盘氧化物层进行构图。 使用图案化氮化物层和衬垫氧化物层作为硬掩模,在衬底的厚度内形成沟槽结构。 该方法使用沟槽结构的暴露区域的至少热氧化覆盖沟槽结构,在沟槽结构内形成衬垫氧化物的第一厚度。 这种热氧化导致沟槽结构的拐角附近的圆形区域。 该方法选择性地去除了沟槽结构内的衬里氧化物的厚度。 该方法使用至少热氧化覆盖沟槽结构在沟槽结构内形成衬垫氧化物的第二厚度。 热氧化导致沟槽结构的拐角附近的圆形区域进一步的圆化。 该方法还选择性地去除图案化的氮化物层,同时衬垫氧化物的第二厚度保护沟槽区域中的衬底。
    • 8. 发明申请
    • Ball feeder for ball serving machine
    • 球服机器球送料机
    • US20060169261A1
    • 2006-08-03
    • US11318834
    • 2005-12-28
    • Lin YaoZe Li
    • Lin YaoZe Li
    • F41F1/00
    • A63B47/002A63B69/40A63B2047/004
    • A ball feeder for ball serving machine includes a seat consisting of a hollow transfer frame and a shaft bear, a rotating unit mounted to one side of the seat and having a ball scoop extended from an end thereof, and a plurality of guide sections sequentially rotatably connected at an end to the shaft bearing. The guide sections may be turned about the shaft bearing in the same direction to form a nonlinearly inclined spiral ball guide path. A ball put in the top guide section automatically rolls down along the ball guide path and falls into the transfer frame to be caught by the ball scoop. When the ball scoop is turned by the rotating unit to face downward, the-ball on the ball scoop falls into a feeding mouth on a body of the ball serving machine and is automatically served.
    • 一种用于球服务机的球供料器包括由中空转运框架和轴承座组成的座椅,旋转单元安装在座椅的一侧并且具有从其端部延伸的球铲,以及多个引导部件, 在轴承的一端连接。 引导部分可以在相同方向上绕轴承转动以形成非线性倾斜的螺旋滚珠引导路径。 放置在顶部引导部分中的球自动沿着球引导路径向下滚动并落入转移框架中以被球勺捕获。 当球勺被旋转单元转动以面向下时,球勺上的球落入球服务机身的进料口,并自动供给。