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    • 13. 发明申请
    • Method for optimizing a grooved bearing pattern on a bearing surface of a fluid dynamic bearing for the purpose of improving the bearing properties and an appropriate grooved bearing pattern
    • 为了改善轴承性能和适当的槽形轴承图案,优化流体动力轴承的轴承表面上的带槽轴承图案的方法
    • US20090161998A1
    • 2009-06-25
    • US12316709
    • 2008-12-16
    • Lei JiangMartin Bauer
    • Lei JiangMartin Bauer
    • F16C32/06
    • F16C33/10
    • The invention relates to a method for optimizing a grooved bearing pattern on a bearing surface of a fluid dynamic bearing for the purpose of improving the bearing properties as well as an appropriately designed grooved bearing pattern, the grooved bearing pattern having a defined length, width and depth, and the bearing surface being moveable with respect to another associated bearing surface in at least one direction of movement, having the following steps:selection of a bearing property to be improved, optimization of the geometry of the grooved bearing pattern in respect of the bearing property to be improved by adjusting one or more of the following parameters of the grooved bearing pattern: depth, width, length, angle with respect to direction of movement of the bearing surface or its normal, contour, geometry of the transition to adjacent surfaces.
    • 本发明涉及一种用于优化流体动力轴承的支承表面上的带槽轴承图案以改善轴承性能以及适当设计的带槽轴承图案的方法,所述带槽轴承图案具有限定的长度,宽度和 深度,并且所述支承表面可在至少一个运动方向上相对于另一个相关联的支承表面移动,具有以下步骤:选择要改进的轴承属性,优化所述带槽轴承图案的几何形状 通过调整带槽轴承图案的以下参数中的一个或多个来确定轴承性能:相对于支承表面的运动方向的深度,宽度,长度,角度或其相对于相邻表面的过渡的几何形状 。
    • 16. 发明授权
    • Method of changing the surface wettability of polymer materials
    • 改变聚合物材料的表面润湿性的方法
    • US07288019B2
    • 2007-10-30
    • US10590395
    • 2004-11-30
    • Chaowei GuoLin FengLei Jiang
    • Chaowei GuoLin FengLei Jiang
    • B24B1/00
    • B29C59/02B29C2059/027
    • The present invention belongs to the field of surface modification of solid materials, specifically relates to a method of changing the surface wettability of polymer materials. The method of the present invention comprises of rubbing the surface of the polymer materials various times by using sand paper of different grades (GB/T 15305) with a determined pressure at the ambient temperature, so as to change the contact angle of said surface of polymer material with water thereby changing the surface wettability of the polymer materials to different degrees. The method of the present invention has advantages of using devices that are simple, low cost, and the surface characteristics of the polymer materials could be changed from hydrophilicity to hydrophobicity, from hydrophobicity to super hydrophobicity, or from hydrophilicity to super hydrophilicity, at ambient temperature without any special requirement to the polymer materials or the preparation process thereof.
    • 本发明属于固体材料的表面改性领域,具体涉及改变聚合物材料的表面润湿性的方法。 本发明的方法包括通过使用不同等级的砂纸(GB / T 15305)在环境温度下以确定的压力摩擦聚合物材料的表面,以便改变所述表面的接触角 聚合物材料与水,从而将聚合物材料的表面润湿性改变到不同程度。 本发明的方法具有使用简单,成本低廉的装置的优点,并且在环境温度下,聚合物材料的表面特性可以从亲水性变为疏水性,从疏水性变为超疏水性,或从亲水性变为超级亲水性 对聚合物材料或其制备方法没有任何特殊要求。
    • 17. 发明授权
    • Rinse apparatus and method for wafer polisher
    • 晶圆抛光机的冲洗装置及方法
    • US07021999B2
    • 2006-04-04
    • US11099926
    • 2005-04-05
    • Lei JiangJin LiuSadasivan ShankarThomas Bramblett
    • Lei JiangJin LiuSadasivan ShankarThomas Bramblett
    • B24B1/00
    • B24B53/017
    • An apparatus for polishing a wafer comprising a rotatable polishing pad having a center of rotation and a rinse delivery conduit positioned adjacent to the polishing pad and substantially in radial alignment with the center. The rinse delivery conduit includes a plurality of nozzles to dispense a rinsing liquid. In one embodiment, the plurality of nozzles are configured and positioned to generate a higher flow rate of the rinsing liquid at the end of the rinse delivery conduit proximate to the center than at the end of the rinse delivery conduit distal to the center. In another embodiment, the rinse delivery conduit has a proximal end which is substantially adjacent the center and the distal end which is approximately adjacent an outer periphery of the pad.
    • 一种用于抛光晶片的装置,包括具有旋转中心的可旋转抛光垫和邻近抛光垫定位并基本上与中心径向对准的冲洗输送导管。 冲洗输送导管包括多个喷嘴以分配冲洗液体。 在一个实施例中,多个喷嘴被配置和定位成在漂洗输送导管的末端靠近中心产生较高流量的漂洗液体,而不是在远离中心的漂洗输送导管末端。 在另一个实施例中,冲洗输送导管具有基本上邻近中心的近端和与垫的外周近似近似的远端。
    • 18. 发明申请
    • Rinse apparatus and method for wafer polisher
    • 晶圆抛光机的冲洗装置及方法
    • US20050181709A1
    • 2005-08-18
    • US11099926
    • 2005-04-05
    • Lei JiangJin LiuSadasivan ShankarThomas Bramblett
    • Lei JiangJin LiuSadasivan ShankarThomas Bramblett
    • B24B37/04B24B53/007B24B1/00
    • B24B53/017
    • An apparatus for polishing a wafer comprising a rotatable polishing pad having a center of rotation and a rinse delivery conduit positioned adjacent to the polishing pad and substantially in radial alignment with the center. The rinse delivery conduit includes a plurality of nozzles to dispense a rinsing liquid. In one embodiment, the plurality of nozzles are configured and positioned to generate a higher flow rate of the rinsing liquid at the end of the rinse delivery conduit proximate to the center than at the end of the rinse delivery conduit distal to the center. In another embodiment, the rinse delivery conduit has a proximal end which is substantially adjacent the center and the distal end which is approximately adjacent an outer periphery of the pad.
    • 一种用于抛光晶片的装置,包括具有旋转中心的可旋转抛光垫和邻近抛光垫定位并基本上与中心径向对准的冲洗输送导管。 冲洗输送导管包括多个喷嘴以分配冲洗液体。 在一个实施例中,多个喷嘴被配置和定位成在漂洗输送导管的末端靠近中心产生较高流量的漂洗液体,而不是在远离中心的漂洗输送导管末端。 在另一个实施例中,冲洗输送导管具有基本上邻近中心的近端和与垫的外周近似近似的远端。
    • 20. 发明申请
    • RINSE APPARATUS AND METHOD FOR WAFER POLISHER
    • 用于波轮抛光的冲洗装置和方法
    • US20050124267A1
    • 2005-06-09
    • US10728550
    • 2003-12-04
    • Lei JiangJin LiuSadasivan ShankarThomas Bramblett
    • Lei JiangJin LiuSadasivan ShankarThomas Bramblett
    • B24B37/04B24B53/007B24B1/00
    • B24B53/017
    • An apparatus for polishing a wafer comprising a rotatable polishing pad having a center of rotation and a rinse delivery conduit positioned adjacent to the polishing pad and substantially in radial alignment with the center. The rinse delivery conduit includes a plurality of nozzles to dispense a rinsing liquid. In one embodiment, the plurality of nozzles are configured and positioned to generate a higher flow rate of the rinsing liquid at the end of the rinse delivery conduit proximate to the center than at the end of the rinse delivery conduit distal to the center. In another embodiment, the rinse delivery conduit has a proximal end which is substantially adjacent the center and the distal end which is approximately adjacent an outer periphery of the pad.
    • 一种用于抛光晶片的装置,包括具有旋转中心的可旋转抛光垫和邻近抛光垫定位并基本上与中心径向对准的冲洗输送导管。 冲洗输送管道包括多个喷嘴以分配冲洗液体。 在一个实施例中,多个喷嘴被配置和定位成在漂洗输送导管的末端靠近中心产生较高流量的漂洗液体,而不是在远离中心的漂洗输送导管末端。 在另一个实施例中,冲洗输送导管具有基本上邻近中心的近端和与垫的外周近似近似的远端。