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41. 发明申请

US20140216339A1 RAW MATERIAL VAPORIZING AND SUPPLYING APPARATUS 审中-公开
标题翻译：原料气化和供应装置
公开(公告)号：US20140216339A1
公开(公告)日：2014-08-07
申请号：US14170953
申请日：2014-02-03
申请人： FUJIKIN INCORPORATED
发明人： Masaaki Nagase , Atsushi Hidaka , Kaoru Hirata , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： C23C16/448
CPC分类号： C23C16/4485
摘要： A raw material vaporizing and supplying apparatus including a source tank in which a raw material is stored, a raw material gas supply channel through which raw material gas is supplied from an internal space portion of the source tank to a process chamber, a pressure type flow rate control system which is installed along the way of the supply channel, and controls a flow rate of the raw material gas which is supplied to the process chamber, and a constant temperature heating unit that heats the source tank, the supply channel, and the pressure type flow rate control system to a set temperature, wherein the raw material gas generated in an internal space portion of the source tank is supplied to the process chamber while the pressure type flow rate control system performs flow rate control.
摘要翻译：一种原料蒸发和供给装置，包括：原料储存在其中的原料罐，将原料气体从原料罐的内部空间供给到处理室的原料气体供给流路，压力型流速率控制系统，其沿着供给通道的方式安装，并且控制供给到处理室的原料气体的流量;以及恒温加热单元，其加热源箱，供给通道和压力型流量控制系统达到设定温度，其中在压力型流量控制系统进行流量控制的同时，将源槽内部空间部分中产生的原料气体供给到处理室。

42. 发明申请

US20140182692A1 PRESSURE TYPE FLOW CONTROL SYSTEM WITH FLOW MONITORING 有权
标题翻译：具有流量监测功能的压力式流量控制系统
公开(公告)号：US20140182692A1
公开(公告)日：2014-07-03
申请号：US14075740
申请日：2013-11-08
申请人： FUJIKIN INCORPORATED
发明人： Kaoru Hirata , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda , Katsuyuki Sugita
IPC分类号： G05D7/06
CPC分类号： G05D7/0623 , F16K37/0083 , G01F1/36 , G01F1/363 , G01F1/50 , G01F1/6842 , G01F1/6965 , G01F5/00 , G01F15/005 , G01F25/0007 , G05D7/0617 , G05D7/0635 , Y10T137/0368 , Y10T137/7759 , Y10T137/7761
摘要： A pressure type flow control system with flow monitoring includes an inlet side passage, a control valve comprising a pressure-type flow control unit connected downstream of the inlet side passage, a thermal-type flow sensor connected downstream of the control valve, an orifice installed on a fluid passage connected downstream of the thermal-type flow sensor, a temperature sensor provided near the fluid passage between the control valve and orifice, a pressure sensor provided for the fluid passage between the control valve and orifice, an outlet side passage connected to the orifice, and a control unit comprising a pressure-type flow rate arithmetic and control unit to which a pressure signal from the pressure sensor and a temperature signal from the temperature sensor are input, and which computes a flow rate value of fluid flowing through the orifice, and outputs a control signal to a valve drive unit of the control valve.
摘要翻译：具有流量监测的压力型流量控制系统包括入口侧通道，控制阀，包括连接在入口侧通道下游的压力型流量控制单元，连接在控制阀下游的热式流量传感器，安装有孔在连接在热式流量传感器下游的流体通道上，设置在控制阀和孔之间的流体通道附近的温度传感器，设置在控制阀和孔之间的流体通道的压力传感器，连接到所述孔口和控制单元包括压力式流量运算和控制单元，来自所述压力传感器的压力信号和来自所述温度传感器的温度信号输入到所述压力型流量计算和控制单元中，并且计算流过所述流量的流体的流量值并将控制信号输出到控制阀的阀驱动单元。

43. 发明申请

US20140013838A1 FLOW RATE MEASUREMENT DEVICE AND FLOW RATE MEASUREMENT METHOD FOR FLOW RATE CONTROLLER FOR GAS SUPPLY DEVICE 有权
标题翻译：用于气体供应装置的流量控制器的流量测量装置和流量测量方法
公开(公告)号：US20140013838A1
公开(公告)日：2014-01-16
申请号：US13936324
申请日：2013-07-08
申请人： FUJIKIN INCORPORATED
发明人： Yohei Sawada , Masaaki Nagase , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi
IPC分类号： G01F5/00
CPC分类号： G01F5/00 , G01F1/34 , G01F1/86 , G01F15/046
摘要： A flow rate measurement device includes a branched pipe passage having an inlet side end portion detachably joined in a branched manner to an upstream portion of on-off valve V0 provided on an outlet end portion of a gas supply line, and an outlet side end portion of the branched pipe passage joined to a gas flow-out side, an on-off valve V provided on the outlet side of the branched pipe passage, a pressure detector and a temperature detector that detect gas pressure and temperature on the upstream side of the on-off valve V, and an arithmetic operation control device receiving detection signals as input from the pressure detector and the temperature detector, and which arithmetically calculates gas flow rate of gas flowing in the branched pipe passage, and the flow rate measurement device is detachably joined in a branched manner to the upstream portion of the on-off valve V0.
摘要翻译：流量测量装置包括分支管道，其具有可分离地连接到设置在气体供应管线的出口端部上的开关阀V0的上游部分的入口侧端部，以及出口侧端部连接到气体流出侧的分支管道通道，设置在分支管道出口侧的开关阀V，压力检测器和温度检测器，其检测上游侧的气体压力和温度开关阀V和算术运算控制装置，其接受来自压力检测器和温度检测器的输入的检测信号，并且算术地计算在分支管道中流动的气体的气体流量，并且流量测量装置是可拆卸的以分支方式连接到开关阀V0的上游部分。

44. 发明申请

US20130340837A1 DEVICE AND METHOD FOR SUPPLYING GAS WHILE DIVIDING TO CHAMBER FROM GAS SUPPLYING FACILITY EQUIPPED WITH FLOW CONTROLLER 有权
标题翻译：从配有流量控制器的气体供应设备分配到室内的气体供应装置和方法
公开(公告)号：US20130340837A1
公开(公告)日：2013-12-26
申请号：US13927786
申请日：2013-06-26
申请人： Tokyo Electron Ltd. , Fujikin Incorporated
发明人： Kazuhiko Sugiyama , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Toyomi Uenoyama
IPC分类号： G05D7/00
CPC分类号： G05D7/00 , G05D7/0623 , G05D7/0652 , G05D7/0658 , G05D7/0664 , G05D11/132 , Y10T137/0379 , Y10T137/0396 , Y10T137/2521 , Y10T137/2529 , Y10T137/2562 , Y10T137/263 , Y10T137/2663 , Y10T137/7761 , Y10T137/8175
摘要： The invention supplies a quantity Q of gas while dividing at flow rate ratio Q1/Q2 from a gas supply facility equipped with a flow controller. A total quantity Q=Q1+Q2 of gas is supplied into a chamber at flow rate Q1 and Q2 through shower plates fixed to ends of branch supply lines by providing open/close valves with a plurality of branch supply lines GL1 and GL2, respectively, to supply the specified quantity of gas from the gas supply facility, and by utilizing bypass line BL1 on the downstream side of the open/close valve OV1 and branched from GL1, bypass line BL2 on the downstream side of the open/close valve OV2 and branched from GL2, pressure type division quantity controller connected to the bypass line BL1 and the bypass line BL2, a sensor measuring pressure inside branch supply line GL1, and another sensor measuring pressure inside branch supply line GL2.
摘要翻译：本发明提供一种气体量Q，同时以具有流量控制器的气体供给设备的流量比Q1 / Q2分压。通过分别提供具有多个分支供应线GL1和GL2的开闭阀将气体的总量Q = Q1 + Q2以流量Q1和Q2供给到固定到分支供应管线的端部的喷淋板，从气体供给装置供给规定量的气体，通过在开/关阀OV1的下游侧利用旁路管线BL1，从开关阀OV2的下游侧的GL1分支的旁通管线BL2，从GL2分支，连接到旁路线BL1和旁路线BL2的压力分型量控制器，测量分支供给线GL1内的压力的传感器和测量分支供给线GL2内的压力的另一传感器。

45. 发明授权

US11630058B2 Concentration measurement device 有权
公开(公告)号：US11630058B2
公开(公告)日：2023-04-18
申请号：US17806349
申请日：2022-06-10
申请人： FUJIKIN INCORPORATED
发明人： Masaaki Nagase , Kazuteru Tanaka , Keiji Hirao , Tadayuki Yakushijin , Kouji Nishino , Michio Yamaji , Nobukazu Ikeda
IPC分类号： G01N21/33
摘要： A concentration measuring device 100 comprises: a measurement cell 4 having a flow path, a light source 1, a photodetector 7 for detecting light emitted from the measurement cell, and an arithmetic circuit 8 for calculating light absorbance and concentration of a fluid to be measured on the basis of an output of the photodetector, the measurement cell includes a cell body, a window portion 3 fixed to the cell body so as to contact the flow path, and a reflective member 5 for reflecting light incident on the measurement cell through the window portion, the window portion is fixed to the cell body 40 by a window holding member 30 via a gasket 15, an annular sealing protrusion 15a is provided on a first surface of the gasket for supporting the window portion, and an annular sealing protrusion 42a is also provided on a support surface 42 of the cell body for supporting the second surface opposite to the first surface of the gasket.

46. 发明授权

US11346457B2 Piezoelectric driven valve, pressure-type flow rate control device, and vaporization supply device 有权
公开(公告)号：US11346457B2
公开(公告)日：2022-05-31
申请号：US17161219
申请日：2021-01-28
申请人： FUJIKIN INCORPORATED
发明人： Ryousuke Dohi , Kaoru Hirata , Katsuyuki Sugita , Koji Kawada , Kouji Nishino , Nobukazu Ikeda
IPC分类号： F16K31/00 , F16K41/02 , G05D7/06
摘要： A piezoelectric element-driven valve 1 including a main body, a valve element, piezoelectric actuators, a plurality of cylindrical actuator boxes arranged in series, a cylindrical outer connecting jig detachably connecting the adjacent actuator boxes and having an opening for drawing out wiring, a plurality of piezoelectric actuators accommodated in the actuator box respectively in the same direction, and a cylindrical inner connecting jig slidably accommodated in the outer connecting jig and having an opening for positioning the adjacent piezoelectric actuators and drawing out wiring.

47. 发明授权

US11226641B2 Fluid control device 有权
公开(公告)号：US11226641B2
公开(公告)日：2022-01-18
申请号：US16340155
申请日：2017-10-12
申请人： FUJIKIN INCORPORATED
发明人： Kaoru Hirata , Katsuyuki Sugita , Takahiro Imai , Shinya Ogawa , Kouji Nishino , Nobukazu Ikeda
IPC分类号： G05D7/06 , H01L21/67
摘要： A fluid control device includes a main body block including a first flow passage, and a second flow passage, a first and second fluid control units installed on an installation surface of the main body block. The first and second flow passages include a first portion extending along a first direction and a second flow passage portion orthogonal to the first direction. The second portion is formed of a hole extending from a side surface of the main body block and a sealing member.

48. 发明授权

US11187346B2 Valve device, its control device, control methods using the same, fluid control device and semiconductor manufacturing apparatus 有权
公开(公告)号：US11187346B2
公开(公告)日：2021-11-30
申请号：US16763731
申请日：2018-11-12
申请人： FUJIKIN INCORPORATED
发明人： Masahiko Takimoto , Toshihide Yoshida , Kenta Kondo , Ryousuke Dohi , Kouji Nishino
IPC分类号： F16K31/02 , F16K31/00 , F16K1/00 , F16K27/02 , F16K31/12
摘要： A control device for a valve device can detect open/close state of the valve device without using limit switches. The valve device includes a diaphragm for opening and closing a flow path for flowing a fluid, a coil spring for biasing the diaphragm in the closing direction of flow path, a main actuator for driving it against the biasing force of the coil spring, and an adjusting actuator using a piezoelectric element for adjusting the opening degree of the flow path determined by the diaphragm. The controller detects the open/close state of flow path based on the voltage generated by the piezoelectric element of the adjusting actuator, and controls valve device using the detection signal.

49. 发明授权

US11079774B2 Flow rate control device 有权
公开(公告)号：US11079774B2
公开(公告)日：2021-08-03
申请号：US16760726
申请日：2018-11-20
申请人： FUJIKIN INCORPORATED
发明人： Katsuyuki Sugita , Ryousuke Dohi , Kaoru Hirata , Koji Kawada , Nobukazu Ikeda , Kouji Nishino
IPC分类号： F16K31/02 , G05D7/06 , G05D16/00 , G05D16/04 , G05D16/20 , F15C1/00
摘要： A flow rate control device (100) comprises: a pressure control valve (6) provided in a flow path; a flow rate control valve (8) provided downstream side of the pressure control valve; and a first pressure sensor (3) for measuring pressure on the downstream side of the pressure control valve and on the upstream side of the flow rate control valve. The flow rate control valve has a valve element (13) seated on/separated from a valve seat (12); a piezoelectric element (10b) for moving the valve element so as be seated on/separated from the valve seat; and a strain sensor (20) provided on a side surface of the piezoelectric element. The pressure control valve (6) is configured to control the pressure control valve (6) on the basis of a signal output from the first pressure sensor (3), and to control the driving of the piezoelectric element of the flow rate control valve (8) based on a signal output from the strain sensor (20).

50. 发明授权

US11054052B2 Piezoelectric-element-driven valve and flow rate control device 有权
公开(公告)号：US11054052B2
公开(公告)日：2021-07-06
申请号：US16471103
申请日：2017-12-22
申请人： FUJIKIN INCORPORATED
发明人： Ryousuke Dohi , Kaoru Hirata , Katsuyuki Sugita , Koji Kawada , Kouji Nishino , Nobukazu Ikeda
IPC分类号： F16K31/00 , F16K37/00
摘要： A piezoelectric-element-driven valve includes a valve seat provided on a flow path, a valving element detachably seated on the valve seat, and a piezoelectric element, and is configured to move the valve body by extension of the piezoelectric element. The piezoelectric-element-driven valve also is provided with a detection mechanism for detecting an extension amount of the piezoelectric element, the detection mechanism including a strain sensor, and being capable of detecting an movement amount of the valving element from an output of the strain sensor.

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