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    • 3. 发明授权
    • Plasma measurement device, plasma system, and method for measuring plasma characteristics
    • 等离子体测量装置,等离子体系统和等离子体特性测量方法
    • US08368378B2
    • 2013-02-05
    • US12694412
    • 2010-01-27
    • Ta-Lun SungChung-Ming LiuKuen TingShosaku MatsumuraShinriki Teii
    • Ta-Lun SungChung-Ming LiuKuen TingShosaku MatsumuraShinriki Teii
    • G01N27/66
    • H01J37/32917H01J37/32935H01J37/32954
    • A plasma measurement device used for measuring plasma characteristics of radio frequency plasma a probe, a connector electronic wire, and a power supply device. The probe is used for entering the radio frequency plasma to measure the plasma characteristics. One end of the connector electronic wire is electrically connected to the probe. The power supply device is electrically connected to another end of the connector electronic wire, and the power supply device is used for providing a voltage to the probe. The connector electronic wire is a specific length, and the connector electronic wire and the radio frequency plasma would generate a standing wave effect. Thus, according to the standing wave effect, the plasma measurement device could eliminate high-frequency interference generated by the radio frequency plasma while measuring the plasma characteristics.
    • 一种用于测量射频等离子体等离子体探针,连接器电子线和电源装置的等离子体特性的等离子体测量装置。 探头用于输入射频等离子体以测量等离子体特性。 连接器电子线的一端电连接到探头。 电源装置电连接到连接器电子线的另一端,并且电源装置用于向探针提供电压。 连接器电子线是特定的长度,并且连接器电子线和射频等离子体将产生驻波效应。 因此,根据驻波效应,等离子体测量装置可以消除射频等离子体产生的高频干扰,同时测量等离子体特性。
    • 4. 发明申请
    • Plasma Measurement Device, Plasma System, and Method for Measuring Plasma Characteristics
    • 等离子体测量装置,等离子体系统和等离子体特性测量方法
    • US20110001465A1
    • 2011-01-06
    • US12694412
    • 2010-01-27
    • Chung-Ming LiuKuen TingMatsumura ShosakuTeii ShinrikiTa-Lun Sung
    • Chung-Ming LiuKuen TingMatsumura ShosakuTeii ShinrikiTa-Lun Sung
    • G01N27/66
    • H01J37/32917H01J37/32935H01J37/32954
    • A plasma measurement device used for measuring plasma characteristics of radio frequency plasma is disclosed. The plasma measurement device comprises a probe, a connector electronic wire, and a power supply device. The probe is used for entering the radio frequency plasma to measure the plasma characteristics. One end of the connector electronic wire is electrically connected to the probe. The power supply device is electrically connected to another end of the connector electronic wire, and the power supply device is used for providing a voltage to the probe. Wherein the connector electronic wire is in a specific length, and the connector electronic wire and the radio frequency plasma would generate a standing wave effect, such that according to the standing wave effect, the plasma measurement device could eliminate high-frequency interference generated by the radio frequency plasma while measuring the plasma characteristics.
    • 公开了一种用于测量射频等离子体的等离子体特性的等离子体测量装置。 等离子体测量装置包括探针,连接器电子线和电源装置。 探头用于输入射频等离子体以测量等离子体特性。 连接器电子线的一端电连接到探头。 电源装置电连接到连接器电子线的另一端,并且电源装置用于向探针提供电压。 其中,连接器电子线具有特定长度,并且连接器电子线和射频等离子体将产生驻波效应,使得根据驻波效应,等离子体测量装置可以消除由该等离子体产生的高频干扰 射频等离子体,同时测量等离子体特性。