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    • 2. 发明申请
    • Transistor gate forming methods and integrated circuits
    • 晶体管栅极形成方法和集成电路
    • US20070048946A1
    • 2007-03-01
    • US11219079
    • 2005-09-01
    • D. V. RamaswamyRavi Iyer
    • D. V. RamaswamyRavi Iyer
    • H01L21/336
    • H01L21/28088H01L21/823842H01L29/78
    • A transistor gate forming method includes forming a first and a second transistor gate. Each of the two gates includes a lower metal layer and an upper metal layer. The lower metal layer of the first gate originates from an as-deposited material exhibiting a work function the same as exhibited in an as-deposited material from which the lower metal layer of the second gate originates. However, the first gate's lower metal layer exhibits a modified work function different from a work function exhibited by the second gate's lower metal layer. The first gate's lower metal layer may contain less oxygen and/or carbon in comparison to the second gate's lower metal layer. The first gate's lower metal layer may contain more nitrogen in comparison to the second gate's lower metal layer. The first gate may be a n-channel gate and the second gate may be a p-channel gate.
    • 晶体管栅极形成方法包括形成第一和第二晶体管栅极。 两个栅极中的每一个包括下金属层和上金属层。 第一栅极的下金属层源自表现出与第二栅极的下金属层源自的沉积材料所表现的功函数相同的功函数的沉积材料。 然而,第一栅极的下部金属层表现出与第二栅极的下部金属层所表现的功函数不同的修正功函数。 与第二栅极的下金属层相比,第一栅极的下金属层可以含有较少的氧和/或碳。 与第二栅极的下金属层相比,第一栅极的下金属层可以含有更多的氮。 第一栅极可以是n沟道栅极,第二栅极可以是p沟道栅极。