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1. 发明授权

US09766106B2 Thermal air flow sensor 有权
公开(公告)号：US09766106B2
公开(公告)日：2017-09-19
申请号：US14355104
申请日：2011-11-28
申请人： Norio Ishitsuka , Keiji Hanzawa , Yasuo Onose , Noriyuki Sakuma
发明人： Norio Ishitsuka , Keiji Hanzawa , Yasuo Onose , Noriyuki Sakuma
IPC分类号： G01F1/692 , G01F1/69
CPC分类号： G01F1/69 , G01F1/692
摘要： A thermal air flow sensor that produces less measurement error is provided. The thermal air flow sensor includes: a semiconductor substrate; a heating resistor, resistance temperature detectors, and an electrical insulator that includes a silicon oxide film, wherein the heating resistor, the resistance temperature detectors, and the electrical insulator are formed on the semiconductor substrate; and a diaphragm portion formed by removing a portion of the semiconductor substrate. The heating resistor and the resistance temperature detectors are formed on the diaphragm portion. The thermal air flow sensor further includes a silicon nitride film formed as the electrical insulator above the heating resistor and the resistance temperature detectors. The silicon nitride film has steps conforming to the patterns of the heating resistor and the resistance temperature detectors. The silicon nitride film has a multilayer structure.

2. 发明申请

US20150377676A1 Fluid Measurement Device 有权
标题翻译：流体测量装置
公开(公告)号：US20150377676A1
公开(公告)日：2015-12-31
申请号：US14411346
申请日：2012-06-27
申请人： Satoshi ASANO , Masahiro MATSUMOTO , Hiroshi NAKANO , Keiji HANZAWA
发明人： Satoshi ASANO , Masahiro MATSUMOTO , Hiroshi NAKANO , Keiji HANZAWA
IPC分类号： G01F15/02 , G01F1/68
CPC分类号： G01F15/02 , G01F1/68 , G01F1/684 , G01F1/696 , G01F5/00
摘要： There is provided a fluid measurement device that is high in measurement precision. The fluid measurement device has a circuit unit into which a first signal S1 output from a first detection element and a second signal S2 output from a second detection element are to he input, wherein the circuit unit includes signal processing means that outputs a third signal S3 according to the first signal and the second signal, state deciding means that decides a state of the first signal, and control means that controls an amount of change that a change of the first signal imparts to the third signal in accordance with a result of decision by the state deciding means.
摘要翻译：提供了一种测量精度高的流体测量装置。流体测量装置具有电路单元，从第一检测元件输出的第一信号S1和从第二检测元件输出的第二信号S2输入到该电路单元中，其中电路单元包括输出第三信号S3的信号处理装置根据第一信号和第二信号，决定第一信号的状态的状态判定装置和控制装置，其根据判定结果控制第一信号的变化赋予第三信号的变化量由国家决定手段。

3. 发明授权

US09188470B2 Thermal flow meter 有权
标题翻译：热流量计
公开(公告)号：US09188470B2
公开(公告)日：2015-11-17
申请号：US13813094
申请日：2011-07-28
申请人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
IPC分类号： G01F1/68 , G01F1/692 , G01F1/684 , G01F1/699
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/699
摘要： An object of the present invention is to provide a thermal type flow rate sensor that offers high sensitivity and improved reliability. A sensor element according to the present invention includes a semiconductor substrate, a cavity portion formed on the semiconductor substrate, a heating resistor formed on the cavity portion via an electrically insulating film, a heating temperature sensor for detecting heating temperature of the heating resistor, and a driving circuit for controlling the heating temperature of the heating resistor using the temperature detected by the heating temperature sensor. The heating temperature sensor comprises temperature-sensitive resistors having resistance values varying according to temperature and disposed upstream and downstream of a direction of flow of a fluid to be measured relative to the heating resistor and on upper and lower sides in a direction perpendicular to the direction of flow of the fluid to be measured relative to the heating resistor.
摘要翻译：本发明的目的是提供一种提供高灵敏度和改善的可靠性的热式流量传感器。根据本发明的传感器元件包括半导体衬底，形成在半导体衬底上的空腔部分，通过电绝缘膜形成在空腔部分上的发热电阻器，用于检测加热电阻器的加热温度的加热温度传感器，以及使用由加热温度传感器检测到的温度来控制加热电阻器的加热温度的驱动电路。加热温度传感器包括具有根据温度变化的电阻值的温度敏感电阻器，并且设置在相对于加热电阻器的被测量流体的流动方向的上游和下游以及垂直于该方向的方向上下侧要测量的流体相对于加热电阻器的流动。

4. 发明授权

US08969977B2 Flow sensor, method for manufacturing flow sensor and flow sensor module 有权
标题翻译：流量传感器，流量传感器和流量传感器模块的制造方法
公开(公告)号：US08969977B2
公开(公告)日：2015-03-03
申请号：US12964935
申请日：2010-12-10
申请人： Tsutomu Kono , Yuuki Okamoto , Takeshi Morino , Keiji Hanzawa
发明人： Tsutomu Kono , Yuuki Okamoto , Takeshi Morino , Keiji Hanzawa
IPC分类号： H01L29/84 , G01F1/684 , G01F1/692
CPC分类号： G01F15/16 , G01F1/684 , G01F1/6842 , G01F1/692 , H01L23/495 , H01L29/84 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/49171 , H01L2224/73265 , H01L2924/00014 , H01L2924/00
摘要： The invention provides a flow sensor structure for sealing the surface of an electric control circuit and a part of a semiconductor device via a manufacturing method capable of preventing occurrence of flash or chip crack when clamping the semiconductor device via a mold. The invention provides a flow sensor structure comprising a semiconductor device having an air flow sensing unit and a diaphragm formed thereto, and a board or a lead frame having an electric control circuit for controlling the semiconductor device disposed thereto, wherein a surface of the electric control circuit and a part of a surface of the semiconductor device is covered with resin while having the air flow sensing unit portion exposed. The invention further provides flow sensor structure in which surfaces of a resin mold, a board or a pre-mold component surrounding the semiconductor device are continuously not in contact with three walls of the semiconductor device orthogonal to a side on which the air flow sensing unit portion is disposed, or a manufacturing method for absorbing the dimensional variation of the semiconductor device by the deformation of springs or deformation of an elastic film in the thickness direction.
摘要翻译：本发明提供了一种流量传感器结构，用于经由模具夹紧半导体器件时能够防止发生闪光或芯片裂纹的制造方法来密封电气控制电路和半导体器件的一部分的表面。本发明提供了一种流量传感器结构，其包括具有气流检测单元和形成于其上的隔膜的半导体器件，以及具有用于控制设置在其上的半导体器件的电气控制电路的电路板或引线框架，其中，电路和半导体器件的表面的一部分被树脂覆盖，同时使空气流感测单元部分暴露。本发明还提供了一种流量传感器结构，其中围绕半导体器件的树脂模具，板或预模具部件的表面不连续地与半导体器件的三个壁接触，该壁与空气流量检测单元或者通过弹簧的变形或弹性膜在厚度方向的变形来吸收半导体器件的尺寸变化的制造方法。

5. 发明授权

US08596113B2 Intake air temperature sensor and thermal airflow meter including the same 有权
标题翻译：进气温度传感器和热风量计包括相同
公开(公告)号：US08596113B2
公开(公告)日：2013-12-03
申请号：US13360923
申请日：2012-01-30
申请人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
发明人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
IPC分类号： G01M15/04
CPC分类号： G01K13/02 , G01F1/00 , G01F1/68 , G01F1/6888 , G01F5/00 , G01F15/185 , G01K1/20 , G01K7/42 , G01K2013/024 , G01K2205/02
摘要： An intake air temperature sensor capable of detecting an intake air temperature highly accurately and at high speed. The intake air temperature sensor of the present invention includes: a secondary passage 7 taking in an intake airflow; a flow rate detecting element 13 disposed in the secondary passage 7; an intake air temperature detecting element 4 provided outside the secondary passage; a temperature sensor 9 detecting a temperature of a fitting section of the intake air temperature detecting element 4; a circuit board 11 disposed in a casing; and an integrated circuit 10 applying a correction process to an output of the intake air temperature detecting element 4 on the basis of signals output from the temperature sensor 9 and a flow rate detecting element 13.
摘要翻译：能够高精度地且高速地检测进气温度的进气温度传感器。本发明的进气温度传感器包括：进入气流的二次通路7; 设置在次通道7中的流量检测元件13; 设置在次级通道外侧的进气温度检测元件4; 检测进气温度检测元件4的嵌合部的温度的温度传感器9; 布置在壳体中的电路板11; 以及基于从温度传感器9和流量检测元件13输出的信号将校正处理应用于进气温度检测元件4的输出的集成电路10。

6. 外观设计

USD674300S1 Portion of physical amount sensor for air 有权
标题翻译：物理量传感器部分用于空气
公开(公告)号：USD674300S1
公开(公告)日：2013-01-15
申请号：US29397275
申请日：2011-07-14
申请人： Takayuki Saito , Hiromu Kikawa , Keiji Hanzawa
设计人： Takayuki Saito , Hiromu Kikawa , Keiji Hanzawa

7. 发明申请

US20120198925A1 Sensor Structure 有权
标题翻译：传感器结构
公开(公告)号：US20120198925A1
公开(公告)日：2012-08-09
申请号：US13367939
申请日：2012-02-07
申请人： Takayuki SAITO , Keiji HANZAWA , Takayuki YOGO
发明人： Takayuki SAITO , Keiji HANZAWA , Takayuki YOGO
IPC分类号： G01M15/04
CPC分类号： G01F1/6842 , F02D41/187 , G01F5/00
摘要： In relation to a humidity sensor sensitive to water and contamination, a sensor implementation structure that achieves both protection performance against water and contaminants and measurement performance such as humidity responsiveness is provided. A sensor structure has a mass airflow measurement element that measures a mass airflow flowing in an intake pipe, a humidity sensing element that senses humidity of air flowing in the intake pipe, a housing structural component having a connector that carries out input/output to/from outside and a terminal component of the connector, and a bypass passage that is composed by using part of the housing structural component and takes in part of the air that flows in the intake pipe, the mass airflow measurement element being mounted in the bypass passage; wherein space is provided in the housing structural component in the vicinity of the bypass passage, the humidity sensing element is mounted in the space.
摘要翻译：关于对水和污染物敏感的湿度传感器，提供了实现对水和污染物的保护性能以及诸如湿度响应性的测量性能的传感器实施结构。传感器结构具有测量进气管中流动的质量气流的质量气流测量元件，感测进气管中流动的空气湿度的湿度感测元件，具有连接器的壳体结构部件，该连接器将输入/ 从连接器的外部和端子部件和旁通通路构成，所述旁通通路由使用所述壳体结构部件的一部分而占据所述进气管中流动的一部分空气，所述质量空气流量测量元件安装在所述旁路通路 ; 其中在所述外壳结构部件中在所述旁通通路附近设置空间，所述湿度感测元件安装在所述空间中。

8. 发明申请

US20120192644A1 Thermal Flow Sensor 有权
标题翻译：热流量传感器
公开(公告)号：US20120192644A1
公开(公告)日：2012-08-02
申请号：US13361372
申请日：2012-01-30
申请人： Satoshi ASANO , Masahiro MATSUMOTO , Hiroshi NAKANO , Keiji HANZAWA
发明人： Satoshi ASANO , Masahiro MATSUMOTO , Hiroshi NAKANO , Keiji HANZAWA
IPC分类号： G01F1/692
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/698
摘要： A thermal flow sensor includes a heater temperature controller that realizes stable startup characteristics and prevents degradation of a sensor element and can also accommodate a smaller heater. The sensor also includes a semiconductor substrate; a cavity portion provided in the semiconductor substrate; a dielectric film provided on the semiconductor substrate; a thin layer area formed as a result of the dielectric film covering the cavity portion; a heating resistor provided in the thin layer area on the dielectric film; a first temperature-sensitive resistor provided in the thin layer area on the dielectric film; a heating controller; a second temperature-sensitive resistor provided near the heating resistor; and a flow rate detector that detects a flow rate of a fluid on the basis of temperature of the second temperature-sensitive resistor. The heating controller controls the temperature of the heating resistor on the basis of first and second reference temperatures.
摘要翻译：热流传感器包括加热器温度控制器，其实现稳定的启动特性并防止传感器元件的劣化并且还可以容纳较小的加热器。传感器还包括半导体衬底; 设置在所述半导体基板中的空腔部; 设置在所述半导体基板上的电介质膜; 作为覆盖空腔部分的电介质膜的结果而形成的薄层区域; 设置在电介质膜上的薄层区域中的加热电阻器; 设置在介电膜上的薄层区域中的第一温敏电阻器; 加热控制器设置在加热电阻附近的第二温敏电阻器; 以及流量检测器，其基于第二温度敏感电阻器的温度来检测流体的流量。加热控制器基于第一和第二参考温度来控制加热电阻器的温度。

9. 发明授权

US08186213B2 Thermal-type flowmeter 有权
标题翻译：热式流量计
公开(公告)号：US08186213B2
公开(公告)日：2012-05-29
申请号：US12708387
申请日：2010-02-18
申请人： Hiroshi Nakano , Masahiro Matsumoto , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Keiji Hanzawa
IPC分类号： G01F1/68
CPC分类号： G01F5/00 , G01F1/692 , G01F1/698
摘要： The present invention provides a highly-sensitive thermal-type flow-rate sensor with enhanced reliability. Provided is a thermal-type flow-rate sensor including: a passage into which a measurement-target fluid is introduced; and a sensor element which is provided in the passage and which measures the flow rate of the measurement-target fluid. The sensor element 1 includes: a semiconductor substrate; a hollow portion formed in the semiconductor substrate; and a heating resistor formed on an electric insulating film above the hollow portion. The sensor element measures the flow rate of the measurement-target fluid by radiating heat from the heating resistor to the measurement-target fluid. When Lh is the length of the heating resistor in a direction perpendicular to a flowing direction of the measurement-target fluid and Wd is the shortest distance to an upstream-side edge of the heating resistor from an edge of the hollow portion (an outer peripheral edge of a diaphragm) in the flowing direction of the measurement-target fluid, Wd≧0.4×Lh is satisfied in a relation between Lh and Wd.
摘要翻译：本发明提供了一种具有增强的可靠性的高灵敏度热式流量传感器。本发明提供一种热式流量传感器，包括：导入测定对象流体的通道; 以及传感器元件，其设置在通道内并测量测量对象流体的流量。传感器元件1包括：半导体衬底; 形成在半导体衬底中的中空部分; 以及形成在中空部分上方的电绝缘膜上的加热电阻器。传感器元件通过从加热电阻器向测量目标流体辐射热量来测量测量目标流体的流量。当Lh是与测量对象流体的流动方向垂直的方向上的加热电阻器的长度，Wd是从中空部分的边缘到加热电阻器的上游侧边缘的最短距离（外周边在测量目标流体的流动方向上，隔膜的边缘）在Lh和Wd之间的关系中满足Wd≥0.4×Lh。

10. 发明申请

US20120055245A1 Thermal Air Flow Sensor 有权
标题翻译：热空气流量传感器
公开(公告)号：US20120055245A1
公开(公告)日：2012-03-08
申请号：US13209883
申请日：2011-08-15
申请人： Ryosuke DOI , Keiji Hanzawa
发明人： Ryosuke DOI , Keiji Hanzawa
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/6842 , G01F1/692 , G01F5/00 , G01F15/10 , G01F15/105
摘要： In a thermal air flow sensor according to the invention, a hollow formed in a detecting element is communicated with a circuit chamber, in which driving circuit parts of the detecting element are mounted, or an intake duct exterior. Thereby, pressure in the hollow balances with pressure on the outside. Also, since the circuit chamber is provided to be isolated from a detection chamber, in which a detecting part of the detecting element is arranged, that is, a passage chamber, through which air being a measuring object flows, air flowing in the passage chamber can be restrained from flowing into the hollow to have an influence on flow output characteristics.
摘要翻译：在根据本发明的热空气流量传感器中，形成在检测元件中的中空与安装有检测元件的驱动电路部分的电路室或进气管外部连通。因此，空心中的压力与外部的压力平衡。此外，由于电路室被设置为与检测元件的检测部分配置的检测室隔离，即，作为测量对象的空气流过的通道室，在通道室中流动的空气可以抑制流入中空部分以对流量输出特性产生影响。

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