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    • 1. 发明授权
    • Wavelength-variable interference filter, optical module, and optical analysis device
    • 波长可变干涉滤光片,光模块和光学分析装置
    • US09557554B2
    • 2017-01-31
    • US13211667
    • 2011-08-17
    • Teruyuki NishimuraAkira SanoSeiji Yamazaki
    • Teruyuki NishimuraAkira SanoSeiji Yamazaki
    • G02B26/00
    • G02B26/001
    • An etalon includes a fixed mirror disposed on a first substrate, a movable mirror disposed on a second substrate to face the fixed mirror with a gap interposed therebetween, a first electrode disposed on the surface of the first substrate facing the second substrate, a second electrode disposed on a first surface of the second substrate facing the first substrate and separated from the first electrode, and a warp preventing film disposed on a second surface of the second substrate so as to cover at least the movable mirror in a plan view. The direction of an internal stress acting in the in-plane direction of the warp preventing film is parallel to the direction of an internal stress acting in the in-plane direction of the movable mirror and the second electrode.
    • 标准具包括设置在第一基板上的固定反射镜,设置在第二基板上以与介于其间的间隙面向固定反射镜的可移动反射镜,设置在面向第二基板的第一基板的表面上的第一电极, 设置在所述第二基板的面向所述第一基板并与所述第一电极分离的第一表面上,以及设置在所述第二基板的第二表面上的经翘曲膜,以便在俯视图中至少覆盖所述可移动反射镜。 在翘曲防止膜的面内方向作用的内部应力的方向与在可动镜和第二电极的面内方向作用的内部应力的方向平行。
    • 2. 发明授权
    • Variable wavelength interference filter, optical module, and optical analyzer
    • 可变波长干涉滤波器,光学模块和光学分析仪
    • US08917451B2
    • 2014-12-23
    • US13372946
    • 2012-02-14
    • Teruyuki NishimuraAkira Sano
    • Teruyuki NishimuraAkira Sano
    • G02B27/00G01J3/26G02B26/00G01J3/50
    • G02B26/001G01J3/26G01J3/50G02B26/06
    • A variable wavelength interference filter includes: a first reflective film disposed on a face of a first substrate facing a second substrate; a second reflective film disposed on a face of the second substrate facing the first substrate and the first reflective film; a first electrode disposed on the face of the first substrate; and a second electrode disposed on the face of the second substrate. The second substrate includes a movable portion on which the second reflective film is disposed and a connection maintaining portion maintaining the movable portion to be movable in a substrate thickness direction, the connection maintaining portion circumscribes the movable portion and is thinner than the movable portion, and the second electrode is disposed on a portion of the second substrate that is thicker than the connection maintaining portion.
    • 可变波长干涉滤光器包括:第一反射膜,设置在面向第二基板的第一基板的表面上; 第二反射膜,设置在面对第一基板的第二基板的表面和第一反射膜上; 设置在所述第一基板的表面上的第一电极; 以及设置在第二基板的表面上的第二电极。 第二基板包括可移动部分,第二反射膜设置在该可动部分上,连接保持部分将可移动部分保持在基板厚度方向上可移动,连接保持部分限定可动部分,并且比可动部分薄; 第二电极设置在比连接保持部分厚的第二基板的一部分上。
    • 4. 发明申请
    • OPTICAL FILTER, OPTICAL FILTER MODULE, AND PHOTOMETRIC ANALYZER
    • 光学过滤器,光学过滤器模块和光学分析仪
    • US20120287438A1
    • 2012-11-15
    • US13467360
    • 2012-05-09
    • Teruyuki NISHIMURANozomu HIROKUBO
    • Teruyuki NISHIMURANozomu HIROKUBO
    • G01B9/02G02B5/28
    • G02B26/001
    • An optical filter includes a first substrate, a second substrate opposed to the first substrate, a first optical film provided on a surface of the first substrate facing the second substrate, a second optical film provided on the second substrate and opposed to the first optical film via a gap, a first electrode provided on the surface of the first substrate facing the second substrate, and a second electrode provided on the second substrate and opposed to the first electrode, wherein a first charged body film with charge is formed on top of the first optical film, a second charged body film with charge is formed on top of the second optical film, and the first charged body film and the second charged body film are charged with the same polarity and opposed.
    • 光滤波器包括第一基板,与第一基板相对的第二基板,设置在面向第二基板的第一基板的表面上的第一光学膜,设置在第二基板上并与第一光学膜相对的第二光学膜 通过间隙,设置在面向第二基板的第一基板的表面上的第一电极和设置在第二基板上并与第一电极相对的第二电极,其中在第一基板的顶部形成有带电的第一带电体膜 第一光学膜,在第二光学膜的顶部上形成带电的第二带电体膜,并且第一带电体膜和第二带电体膜以相同的极性充电并且相反。