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    • 5. 发明授权
    • Method of fabricating a planar semiconductor nanowire
    • 制造平面半导体纳米线的方法
    • US08810009B2
    • 2014-08-19
    • US12989558
    • 2009-04-24
    • Xiuling LiSeth A. Fortuna
    • Xiuling LiSeth A. Fortuna
    • H01L29/04H01L21/02
    • H01L21/02521H01L21/0237H01L21/02395H01L21/02433H01L21/02463H01L21/02546H01L21/02576H01L21/02603H01L21/0262H01L21/02645H01L21/02653H01L21/02664Y10S977/762Y10S977/938
    • A composition comprises a semiconductor substrate having a crystallographic plane oriented parallel to a surface of the substrate and at least one planar semiconductor nanowire epitaxially disposed on the substrate, where the nanowire is aligned along a crystallographic direction of the substrate parallel to the crystallographic plane. To fabricate a planar semiconductor nanowire, at least one nanoparticle is provided on a semiconductor substrate having a crystallographic plane oriented parallel to a surface of the substrate. The semiconductor substrate is heated within a first temperature window in a processing unit. Semiconductor precursors are added to the processing unit, and a planar semiconductor nanowire is grown from the nanoparticle on the substrate within a second temperature window. The planar semiconductor nanowire grows in a crystallographic direction of the substrate parallel to the crystallographic plane.
    • 组合物包括半导体衬底,其具有平行于衬底的表面定向的结晶平面和至少一个外延地设置在衬底上的平面半导体纳米线,其中纳米线沿着平行于晶体平面的衬底的结晶方向排列。 为了制造平面半导体纳米线,在半导体衬底上提供至少一个纳米颗粒,该半导体衬底具有平行于衬底的表面取向的结晶平面。 半导体衬底在处理单元中的第一温度窗内被加热。 将半导体前体添加到处理单元中,并且在第二温度窗内从衬底上的纳米颗粒生长平面半导体纳米线。 平面半导体纳米线在与晶体平面平行的衬底的晶体方向上生长。