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    • 2. 发明专利
    • Group iii nitride crystal and method for growing the same
    • 第III组氮化物晶体及其生长方法
    • JP2009023862A
    • 2009-02-05
    • JP2007187081
    • 2007-07-18
    • Yusuke MoriSumitomo Electric Ind Ltd住友電気工業株式会社勇介 森
    • FUJIWARA SHINSUKEYOSHIDA HIROAKIHIROTA TATSUUEMATSU KOJITANAKA HARUKOMORI YUSUKESASAKI TAKATOMOKAWAMURA SHIROKITAOKA YASUO
    • C30B29/38C30B19/02
    • PROBLEM TO BE SOLVED: To provide a method for growing a group III nitride crystal by which a large crystal can be grown in a liquid phase method.
      SOLUTION: The method for growing a group III nitride crystal aims to grow a group III nitride crystal 10 by a liquid phase method. The method includes the steps of: preparing a substrate 1 that has a flat principal plane 1m, contains a group III nitride seed crystal 1a in at least the principal plane 1m side, the seed crystal having the same chemical composition as that of the group III nitride crystal 10, and has a radius of curvature of not less than 2 m as a warpage of a (hkil)-plane 1n nearest to the principal plane 1m, wherein i=-(h+k) and each of h, k and l is an integer from -9 to 9; and bringing a solution prepared by dissolving a nitrogen-containing gas 5 in a solvent 3 containing a group III metal and an alkali metal into contact with the principal plane 1m of the substrate 1 to grow the group III nitride crystal 10 on the principal plane 1m.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 待解决的问题:提供一种用于生长可以以液相法生长大晶体的III族氮化物晶体的方法。 解决方案:用于生长III族氮化物晶体的方法旨在通过液相法生长III族氮化物晶体10。 该方法包括以下步骤:制备具有平坦主平面1m的基板1,至少在主平面1m侧包含III族氮化物晶种1a,晶种具有与III组相同的化学组成 氮化物晶体10,并且具有不小于2μm的曲率半径作为最接近主平面1m的(hkil)面1n的翘曲,其中i = - (h + k)以及h,k和 l为-9〜9的整数; 并将通过将含氮气体5溶解在含有III族金属和碱金属的溶剂3中制备的溶液与基板1的主平面1m接触,以在主平面1m上生长III族氮化物晶体10 。 版权所有(C)2009,JPO&INPIT
    • 3. 发明专利
    • Process for producing group iii nitride crystal, group iii nitride crystal substrate, and group iii nitride semiconductor device
    • 用于生产III族氮化物晶体,III族氮化物晶体基板和III族氮化物半导体器件的方法
    • JP2009018961A
    • 2009-01-29
    • JP2007182709
    • 2007-07-12
    • Yusuke MoriSumitomo Electric Ind Ltd住友電気工業株式会社勇介 森
    • HIROTA TATSUKAWASE TOMOHIROSASAKI TAKATOMOMORI YUSUKEKAWAMURA SHIROKITAOKA YASUO
    • C30B29/38C30B9/00C30B33/02H01L33/32
    • PROBLEM TO BE SOLVED: To provide a process for producing a Group III nitride crystal having a low dislocation density and a low impurity concentration without damaging the crystal. SOLUTION: Nitrogen gas (nitrogen-containing gas 3) was dissolved in a Ga-Na-Li melt 2 in a reaction vessel 7 to grow a GaN crystal having a thickness of 100 μm on a principal surface 1m of a GaN base substrate 1 (a). Subsequently, metal Na was put into the reaction vessel 7, and the resulting mixture was heated to form a Na melt which is a liquid 4 for crystal treatment, in which was dissolved nitrogen gas (nitrogen-containing gas 3) to heat-treat the GaN crystal (group III nitride crystal 10). As a result, the surface of the crystal was roughened, but the crystal itself was not broken. As for the impurity concentrations of the GaN crystal (group III nitride crystal 10) and the GaN base substrate 1, Na concentration was 5×10 15 cm -3 , which was the same as the Na concentration before heat treatment, while Li concentration was 3×10 16 cm -3 , which was significantly lower than the Li concentration before heat treatment. COPYRIGHT: (C)2009,JPO&INPIT
    • 待解决的问题:提供一种具有低位错密度和低杂质浓度的III族氮化物晶体的制造方法,而不损害晶体。 解决方案:将氮气(含氮气体3)溶解在反应容器7中的Ga-Na-Li熔体2中,以在GaN基材的主表面1m上生长厚度为100μm的GaN晶体 基板1(a)。 随后,将金属Na放入反应容器7中,将所得混合物加热,形成作为结晶处理用液体4的Na熔体,其中为溶解氮气(含氮气体3),热处理 GaN晶体(III族氮化物晶体10)。 结果,晶体的表面被粗糙化,但是晶体本身没有被破坏。 对于GaN晶体(III族氮化物晶体10)和GaN基底基板1的杂质浓度,Na浓度为5×10 15×SP> -3 ,这是 与热处理前的Na浓度相同,而Li浓度为3×10 16℃/ SP> -3 ,明显低于热处理前的Li浓度。 版权所有(C)2009,JPO&INPIT
    • 4. 发明专利
    • Crystal growing apparatus
    • 水晶生长装置
    • JP2008254999A
    • 2008-10-23
    • JP2008029035
    • 2008-02-08
    • Yusuke MoriNgk Insulators LtdToyoda Gosei Co Ltd日本碍子株式会社勇介 森豊田合成株式会社
    • YAMAZAKI SHIROHIRATA KOJISATO TOSHIYUKINAGAI SEIJIIMAI KATSUHIROIWAI MAKOTOHIGASHIHARA SHUHEISASAKI TAKATOMOMORI YUSUKEKAWAMURA SHIRO
    • C30B29/38C30B19/02
    • PROBLEM TO BE SOLVED: To provide a flux method with an improved work efficiency while maintaining the purity of flux at a high level and saving the flux material cost.
      SOLUTION: A sodium (Na) purifying apparatus 130 includes an apparatus 140 for holding and managing Na that keeps purified Na in a liquid state. Liquid Na is supplied to the apparatus 140 for holding and managing Na through a liquid Na supply tube 139 which is kept at 100°C. The apparatus 140 for holding and managing Na has an Ar gas purifying apparatus 141 that controls the condition of argon (Ar) gas which fills the internal space thereof. Thus, by turning a faucet 121 on and off at a desired timing, the purified liquid Na supplied from the Na purifying apparatus 130 can be introduced into a crucible c at will via the liquid Na supply tube 139, the apparatus 140 for holding and managing Na and piping 149.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供具有提高的工作效率的助焊剂方法,同时将焊剂的纯度保持在高水平并且节省焊剂材料成本。 解决方案:钠(Na)纯化装置130包括用于保持和管理保持纯化的Na处于液态的Na的装置140。 液体Na被供给到用于通过保持在100℃的液体Na供应管139保持和管理Na的装置140。 用于保持和管理Na的装置140具有控制填充其内部空间的氩(Ar)气体的状态的Ar气体净化装置141。 因此,通过在期望的时刻打开和关闭水龙头121,可以从Na净化装置130供应的净化液体Na经由液体Na供给管139,用于保持和管理的装置140被引入坩埚c Na和管道149.版权所有(C)2009,JPO&INPIT