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    • 10. 发明授权
    • Method for producing III group element nitride crystal, production apparatus for use therein, and semiconductor element produced thereby
    • 生产III族元素氮化物晶体的方法,其中使用的制造装置以及由此制造的半导体元件
    • US07794539B2
    • 2010-09-14
    • US10599501
    • 2005-03-31
    • Hisashi MinemotoYasuo KitaokaIsao KidoguchiYusuke MoriFumio KawamuraTakatomo SasakiYasuhito Takahashi
    • Hisashi MinemotoYasuo KitaokaIsao KidoguchiYusuke MoriFumio KawamuraTakatomo SasakiYasuhito Takahashi
    • C30B9/00C30B30/04C30B28/06C30B11/00
    • C30B9/10C30B29/403C30B29/406Y10T117/1092Y10T117/1096
    • A method for producing Group-III-element nitride crystals by which an improved growth rate is obtained and large high-quality crystals can be grown in a short time, a producing apparatus used therein, and a semiconductor element obtained using the method and the apparatus are provided. The method is a method for producing Group-III-element nitride crystals that includes a crystal growth process of subjecting a material solution containing a Group III element, nitrogen, and at least one of alkali metal and alkaline-earth metal to pressurizing and heating under an atmosphere of a nitrogen-containing gas so that the nitrogen and the Group III element in the material solution react with each other to grow crystals. The method further includes, prior to the crystal growth process, a material preparation process of preparing the material solution in a manner that under an atmosphere of a nitrogen-containing gas, at least one of an ambient temperature and an ambient pressure is set so as to be higher than is set as a condition for the crystal growth process so that the nitrogen is allowed to dissolve in a melt containing the Group III element and the at least one of alkali metal and alkaline-earth metal. The method according to the present invention can be performed by using, for example, the producing apparatus shown in FIG. 7.
    • 一种生产III族元素的氮化物晶体的方法,其中获得了改善的生长速率并且可以在短时间内生长大量的高质量晶体,其中使用的制造装置以及使用该方法和装置得到的半导体元件 被提供。 该方法是生产III族元素氮化物晶体的方法,其包括使含有III族元素,氮和至少一种碱金属和碱土金属的材料溶液经受加压和加热的晶体生长过程 含氮气体的气氛使得材料溶液中的氮和III族元素彼此反应生长晶体。 该方法还包括在晶体生长过程之前,制备材料制备方法,该方法是在含氮气体的气氛中,将环境温度和环境压力中的至少一种设定为 高于设定为晶体生长过程的条件,使得氮能够溶解在含有III族元素和碱金属和碱土金属中的至少一种的熔体中。 根据本发明的方法可以通过使用例如图1所示的制造装置来执行。 7。