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    • 5. 发明授权
    • Unequal link SCARA arm
    • 不平等的链接SCARA手臂
    • US09248568B2
    • 2016-02-02
    • US11179762
    • 2005-07-11
    • Robert T. CaveneyDavid MartinUlysses Gilchrist
    • Robert T. CaveneyDavid MartinUlysses Gilchrist
    • B66C23/00B25J9/04H01L21/677
    • B25J9/042H01L21/67766
    • A substrate transport apparatus comprising a drive section, a controller, an upper arm, forearm and substrate holder. A proximate end of the upper arm being rotatably mounted to the drive section at a shoulder joint. A proximate end of the forearm being rotatably mounted to a distal end of the upper arm at an elbow joint. The substrate holder being rotatably mounted to a distal end of the forearm at a wrist joint. The upper arm and the forearm being unequal in length from joint center to joint center. The substrate transport arm is adapted to transport substrate to and from at least two substrate holding areas with the drive section of the transport apparatus remaining in a fixed position relative to the holding areas. Each of the upper arm, forearm and substrate holder being independently rotatable with respect to each other.
    • 一种基板输送装置,包括驱动部,控制器,上臂,前臂和基板支架。 上臂的近端在肩关节处可旋转地安装到驱动部。 前臂的近端以肘关节可旋转地安装在上臂的远端。 基体保持器可旋转地安装在腕关节前端的前端。 上臂和前臂从关节中心到关节中心的长度不等。 基板输送臂适于将基板输送至至少两个基板保持区域,并且与传送装置的驱动部分相对于保持区域保持固定位置。 上臂,前臂和基底保持架中的每一个可独立地相对于彼此旋转。