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    • 7. 发明申请
    • ETCHING DEVICE FOR THE ELECTROLYTIC ETCHING OF COPPER
    • 铜电解蚀刻蚀刻装置
    • US20140251797A1
    • 2014-09-11
    • US14350515
    • 2011-10-08
    • Christoph Herkle
    • Christoph Herkle
    • C25F3/02
    • C25F3/02B01F3/04503B01F3/0876B01F5/0212B01F5/0413B01F5/106B01F13/1027B01F2003/04879B01F2003/04886C25F7/02H05K3/068H05K3/07
    • An etching device for the electrolytic etching of copper on an etching material, includes a first mixing device, which is designed to receive an acid electrolyte containing copper ions, and an oxygen gas or ozone gas in order to form a first liquid-gas mixture which can be channeled from a first outlet of the first mixing device into a connecting line coupled thereto; a container, which contains a container liquid, a second mixing device, which is arranged in the container and is surrounded by the container liquid, wherein the second mixing device includes a suction opening in order to suction in the container liquid present in the region of the suction opening, wherein the second mixing device is connected to the connecting line and is designed to channel the first liquid-gas mixture and the suctioned container liquid into a constricted zone of the second mixing device so that the suctioned container liquid mixes with the first liquid-gas mixture and is thus able to form a second liquid-gas mixture, wherein the second mixing device has a second outlet out of which the second liquid-gas mixture is able to flow and mix with the container liquid present in the region of the second outlet, and a container outlet line, which is designed to feed the container liquid present there to the etching material provided in an etching module.
    • 用于在蚀刻材料上电解铜蚀刻的蚀刻装置包括:第一混合装置,被设计成接收含有铜离子的酸性电解质和氧气或臭氧气体,以形成第一液态气体混合物, 可以从第一混合装置的第一出口引导到与其连接的连接线; 包含容器液体的容器,第二混合装置,其布置在容器中并被容器液体包围,其中第二混合装置包括吸入口,以吸入存在于容器液体的区域中的容器液体中 所述吸入口,其中所述第二混合装置连接到所述连接管线并且被设计成将所述第一液体 - 气体混合物和所述抽吸的容器液体引导到所述第二混合装置的收缩区域中,使得所抽吸的容器液体与所述第一混合物 液 - 气混合物,因此能够形成第二液 - 气混合物,其中第二混合装置具有第二出口,第二液 - 气混合物能够与第二液 - 气混合物流动并与存在于 第二出口和容器出口管线,其被设计成将存在于其中的容器液体供给到设置在蚀刻模块中的蚀刻材料。