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    • 4. 发明申请
    • POSITIVE-TONE, CHEMICALLY AMPLIFIED, AQUEOUS-DEVELOPABLE, PERMANENT DIELECTRIC
    • 正色调,化学增强型,水性显影,永久性介质
    • WO2014005011A3
    • 2014-02-20
    • PCT/US2013048553
    • 2013-06-28
    • GEORGIA TECH RES INST
    • MUELLER BRENNEN KARLKOHL PAUL A
    • G03F7/00
    • G03F7/0045C08K5/42C08K5/55G03F7/0392G03F7/0395G03F7/0757G03F7/26G03F7/40Y10T428/24802
    • In microelectronic applications, it is often desired to deposit and pattern a permanent dielectric film in order to electrically and mechanically isolate components. Photo-patternable dielectrics are attractive for these uses because of their reduced time and cost requirements. These permanent dielectrics should be high-speed, positive-tone, and aqueous-developable. This type of patternability may be achieved by using a chemically amplified deprotection reaction of tert-butoxycarbonate or tert-butyl acrylate catalyzed by a photo-inducible acid. Provided herein are: a composition for preparing a dielectric film comprising a polymer mixture, wherein the polymer mixture comprises a base polymer comprising a pendent protected organic functionality, a photocatalyst for deprotecting the protected organic functionality and a chemical cross-linker for cross-linking the dielectric film after a photo-patterning has taken place in an aqueous solution; a dielectric film prepared from said composition; and method of preparing a dielectric film.
    • 在微电子应用中,通常需要沉积和图案化永久电介质膜以电气和机械隔离组件。 由于它们减少了时间和成本要求,因此光电图案化电介质对这些用途具有吸引力。 这些永久性电介质应该是高速,正性和水性可显影的。 这种类型的可图案化可以通过使用光诱导酸催化的叔丁氧基碳酸酯或丙烯酸叔丁酯的化学扩增去保护反应来实现。 本文提供:用于制备包含聚合物混合物的介电膜的组合物,其中所述聚合物混合物包含含有侧基保护的有机官能团的基础聚合物,用于使所述被保护的有机官能团脱保护的光催化剂和用于交联所述受保护的有机官能团的化学交联剂 在水溶液中发生光构图之后的介电膜; 由所述组合物制备的介电膜; 以及制备介电膜的方法。