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1. 发明申请

US20110053300A1 THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME 有权
标题翻译：薄膜沉积装置及使用其制造有机发光显示装置的方法
公开(公告)号：US20110053300A1
公开(公告)日：2011-03-03
申请号：US12862125
申请日：2010-08-24
申请人： Jae-Kwang RYU , Hyun-Sook Park , Yun-Mi Lee , Jong-Heon Kim , Sang-Soo Kim , Ji-Sook Oh
发明人： Jae-Kwang RYU , Hyun-Sook Park , Yun-Mi Lee , Jong-Heon Kim , Sang-Soo Kim , Ji-Sook Oh
IPC分类号： H01L51/56 , B05B17/00
CPC分类号： C23C14/243 , C23C14/042 , C23C14/12 , C23C14/562 , H01L27/3244 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus that can be applied to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus.
摘要翻译：可以应用于大规模制造大尺寸显示装置并提高制造成品率的薄膜沉积装置，以及通过使用薄膜沉积装置制造有机发光显示装置的方法。

2. 发明授权

US08968829B2 Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same 有权
标题翻译：薄膜沉积装置及使用该有机发光显示装置的方法
公开(公告)号：US08968829B2
公开(公告)日：2015-03-03
申请号：US12862125
申请日：2010-08-24
申请人： Jae-Kwang Ryu , Hyun-Sook Park , Yun-Mi Lee , Jong-Heon Kim , Sang-Soo Kim , Ji-Sook Oh
发明人： Jae-Kwang Ryu , Hyun-Sook Park , Yun-Mi Lee , Jong-Heon Kim , Sang-Soo Kim , Ji-Sook Oh
IPC分类号： C23C16/00 , H01L51/56 , C23C14/24 , C23C14/04 , C23C14/12 , C23C14/56 , H01L27/32 , H01L51/00
CPC分类号： C23C14/243 , C23C14/042 , C23C14/12 , C23C14/562 , H01L27/3244 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus that can be applied to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus.
摘要翻译：可以应用于大规模制造大尺寸显示装置并提高制造成品率的薄膜沉积装置，以及通过使用薄膜沉积装置制造有机发光显示装置的方法。

3. 发明授权

US08193011B2 Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same 有权
标题翻译：薄膜沉积装置及使用该有机发光显示装置的方法
公开(公告)号：US08193011B2
公开(公告)日：2012-06-05
申请号：US13277112
申请日：2011-10-19
申请人： Hee-Cheol Kang , Hyun-Sook Park , Jae-Kwang Ryu , Yong-Sup Choi , Yun-Mi Lee , Sang-Soo Kim
发明人： Hee-Cheol Kang , Hyun-Sook Park , Jae-Kwang Ryu , Yong-Sup Choi , Yun-Mi Lee , Sang-Soo Kim
IPC分类号： H01L33/26 , C23C16/44 , H01L21/76 , C23C16/00
CPC分类号： C23C14/044 , C23C14/12 , C23C14/243 , C23C14/568 , H01L51/001 , H01L51/0081 , H01L51/56 , Y10S414/135 , Y10T279/23
摘要： A thin film deposition apparatus and an organic light-emitting display device by using the same. The thin film deposition apparatus includes an electrostatic chuck, a plurality of chambers; at least one thin film deposition assembly; a carrier; a first power source plug; and a second power source plug. The electrostatic chuck includes a body having a supporting surface that contacts a substrate to support the substrate, wherein the substrate is a deposition target; an electrode embedded into the body and applying an electrostatic force to the supporting surface; and a plurality of power source holes formed to expose the electrode and formed at different locations on the body.
摘要翻译：一种薄膜沉积装置和使用该薄膜沉积装置的有机发光显示装置。薄膜沉积装置包括静电卡盘，多个室; 至少一个薄膜沉积组件; 承运人第一个电源插头; 和第二电源插头。静电卡盘包括具有与基板接触以支撑基板的支撑表面的主体，其中基板是沉积靶; 电极，其嵌入到所述主体中并向所述支撑表面施加静电力; 以及形成为暴露电极并形成在身体上的不同位置处的多个电源孔。

4. 发明申请

US20120083061A1 THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME 有权
标题翻译：薄膜沉积装置及使用其制造有机发光显示装置的方法
公开(公告)号：US20120083061A1
公开(公告)日：2012-04-05
申请号：US13277112
申请日：2011-10-19
申请人： Hee-Cheol Kang , Hyun-Sook Park , Jae-Kwang Ryu , Yong-Sup Choi , Yun-Mi Lee , Sang-Soo Kim
发明人： Hee-Cheol Kang , Hyun-Sook Park , Jae-Kwang Ryu , Yong-Sup Choi , Yun-Mi Lee , Sang-Soo Kim
IPC分类号： H01L51/56
CPC分类号： C23C14/044 , C23C14/12 , C23C14/243 , C23C14/568 , H01L51/001 , H01L51/0081 , H01L51/56 , Y10S414/135 , Y10T279/23
摘要： A thin film deposition apparatus and an organic light-emitting display device by using the same. The thin film deposition apparatus includes an electrostatic chuck, a plurality of chambers; at least one thin film deposition assembly; a carrier; a first power source plug; and a second power source plug. The electrostatic chuck includes a body having a supporting surface that contacts a substrate to support the substrate, wherein the substrate is a deposition target; an electrode embedded into the body and applying an electrostatic force to the supporting surface; and a plurality of power source holes formed to expose the electrode and formed at different locations on the body.
摘要翻译：一种薄膜沉积装置和使用该薄膜沉积装置的有机发光显示装置。薄膜沉积装置包括静电卡盘，多个室; 至少一个薄膜沉积组件; 承运人第一个电源插头; 和第二电源插头。静电卡盘包括具有与基板接触以支撑基板的支撑表面的主体，其中基板是沉积靶; 电极，其嵌入到所述主体中并向所述支撑表面施加静电力; 以及形成为暴露电极并形成在身体上的不同位置处的多个电源孔。

5. 发明授权

US08137466B2 Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same 有权
标题翻译：薄膜沉积装置及使用该有机发光显示装置的方法
公开(公告)号：US08137466B2
公开(公告)日：2012-03-20
申请号：US12862153
申请日：2010-08-24
申请人： Hee-Cheol Kang , Hyun-Sook Park , Jae-Kwang Ryu , Yong-Sup Choi , Yun-Mi Lee , Sang-Soo Kim
发明人： Hee-Cheol Kang , Hyun-Sook Park , Jae-Kwang Ryu , Yong-Sup Choi , Yun-Mi Lee , Sang-Soo Kim
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306
CPC分类号： C23C14/044 , C23C14/12 , C23C14/243 , C23C14/568 , H01L51/001 , H01L51/0081 , H01L51/56 , Y10S414/135 , Y10T279/23
摘要： A thin film deposition apparatus and an organic light-emitting display device by using the same. The thin film deposition apparatus includes an electrostatic chuck, an a plurality of chambers; at least one thin film deposition assembly; a carrier; a first power source plug; and a second power source plug. The electrostatic chuck includes a body having a supporting surface that contacts a substrate to support the substrate, wherein the substrate is a deposition target; an electrode embedded into the body and applying an electrostatic force to the supporting surface; and a plurality of power source holes formed to expose the electrode and formed at different locations on the body. The plurality of chambers are maintained in a vacuum state. The at least one thin film deposition assembly is located in at least one of the plurality of chambers, is separated from the substrate by a predetermined distance, and is used to form a thin film on the substrate supported by the electrostatic chuck. The carrier is used to move the electrostatic chuck to pass through the plurality of chambers. The first power source plug is installed to be attachable to and detachable from one of the power source holes in order to supply power to the electrode. The first power source plug is installed at an upstream of a path in which the electrostatic chuck is moved by the carrier. The second power source plug is installed to be attachable to and detachable from another of the power source holes in order to supply power to the electrode. The second power source plug is installed in the path to be downstream to the first power source plug with respect to the path.
摘要翻译：一种薄膜沉积装置和使用该薄膜沉积装置的有机发光显示装置。薄膜沉积设备包括静电卡盘，多个腔室; 至少一个薄膜沉积组件; 承运人第一个电源插头; 和第二电源插头。静电卡盘包括具有与基板接触以支撑基板的支撑表面的主体，其中基板是沉积靶; 电极，其嵌入到所述主体中并向所述支撑表面施加静电力; 以及形成为暴露电极并形成在身体上的不同位置处的多个电源孔。多个室保持在真空状态。所述至少一个薄膜沉积组件位于所述多个室中的至少一个室中，与所述衬底分离预定距离，并且用于在由所述静电吸盘支撑的所述衬底上形成薄膜。载体用于移动静电卡盘以通过多个室。第一电源插头被安装成可以从电源孔之一附接和拆卸，以向电极供电。第一电源插头安装在静电卡盘由载体移动的路径的上游。第二电源插头被安装成可以与另一个电源孔相连接和拆卸，以向电极供电。第二电源插头安装在相对于路径到第一电源插头的下游的路径中。

6. 发明申请

US20110053301A1 THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME 审中-公开
标题翻译：薄膜沉积装置及使用其制造有机发光显示装置的方法
公开(公告)号：US20110053301A1
公开(公告)日：2011-03-03
申请号：US12868099
申请日：2010-08-25
申请人： Hee-Cheol KANG , Jong-Heon Kim , Ji-Sook Oh , Sang-Soo Kim
发明人： Hee-Cheol KANG , Jong-Heon Kim , Ji-Sook Oh , Sang-Soo Kim
IPC分类号： H01L51/30
CPC分类号： C23C14/50 , C23C14/12 , C23C14/24 , C23C14/56
摘要： A thin film deposition apparatus that is suitable for production of large-sized substrates with fine patterns includes: an electrostatic chuck including a body that contacts a substrate that constitutes a deposition target and including a supporting surface supporting the substrate, an electrode installed in the body to generate an electrostatic force on the supporting surface, and a battery that is electrically connected to the electrode in the body; a plurality of chambers that are maintained in vacuum states; at least one thin film deposition assembly disposed in one of the plurality of chambers, separated by a predetermined distance from the substrate, and forming a thin film on the substrate supported by the electrostatic chuck; and a carrier moving the electrostatic chuck through the chambers.
摘要翻译：适合于生产具有精细图案的大尺寸基板的薄膜沉积装置包括：静电卡盘，其包括与构成沉积靶的基板接触并包括支撑基板的支撑表面的主体，安装在主体中的电极在所述支撑面上产生静电力，以及与所述电极电连接的电池; 维持在真空状态的多个室; 至少一个薄膜沉积组件，其设置在与所述基板隔开预定距离的多个室之一中，并且在由所述静电卡盘支撑的所述基板上形成薄膜; 以及将静电卡盘移动通过室的载体。

7. 发明申请

US20110045617A1 THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME 有权
标题翻译：薄膜沉积装置及使用其制造有机发光显示装置的方法
公开(公告)号：US20110045617A1
公开(公告)日：2011-02-24
申请号：US12862153
申请日：2010-08-24
申请人： Hee-Cheol KANG , Hyun-Sook Park , Jae-Kwang Ryu , Yong-Sup Chol , Yun-Ml Lee , Sang-Soo Kim
发明人： Hee-Cheol KANG , Hyun-Sook Park , Jae-Kwang Ryu , Yong-Sup Chol , Yun-Ml Lee , Sang-Soo Kim
IPC分类号： H01L33/26 , C23C16/44
CPC分类号： C23C14/044 , C23C14/12 , C23C14/243 , C23C14/568 , H01L51/001 , H01L51/0081 , H01L51/56 , Y10S414/135 , Y10T279/23
摘要： A thin film deposition apparatus and an organic light-emitting display device by using the same. The thin film deposition apparatus includes an electrostatic chuck, an a plurality of chambers; at least one thin film deposition assembly; a carrier; a first power source plug; and a second power source plug. The electrostatic chuck includes a body having a supporting surface that contacts a substrate to support the substrate, wherein the substrate is a deposition target; an electrode embedded into the body and applying an electrostatic force to the supporting surface; and a plurality of power source holes formed to expose the electrode and formed at different locations on the body. The plurality of chambers are maintained in a vacuum state. The at least one thin film deposition assembly is located in at least one of the plurality of chambers, is separated from the substrate by a predetermined distance, and is used to form a thin film on the substrate supported by the electrostatic chuck. The carrier is used to move the electrostatic chuck to pass through the plurality of chambers. The first power source plug is installed to be attachable to and detachable from one of the power source holes in order to supply power to the electrode. The first power source plug is installed at an upstream of a path in which the electrostatic chuck is moved by the carrier. The second power source plug is installed to be attachable to and detachable from another of the power source holes in order to supply power to the electrode. The second power source plug is installed in the path to be downstream to the first power source plug with respect to the path.
摘要翻译：一种薄膜沉积装置和使用该薄膜沉积装置的有机发光显示装置。薄膜沉积设备包括静电卡盘，多个腔室; 至少一个薄膜沉积组件; 承运人第一个电源插头; 和第二电源插头。静电卡盘包括具有与基板接触以支撑基板的支撑表面的主体，其中基板是沉积靶; 电极，其嵌入到所述主体中并向所述支撑表面施加静电力; 以及形成为暴露电极并形成在身体上的不同位置处的多个电源孔。多个室保持在真空状态。所述至少一个薄膜沉积组件位于所述多个室中的至少一个室中，与所述衬底分离预定距离，并且用于在由所述静电吸盘支撑的所述衬底上形成薄膜。载体用于移动静电卡盘以通过多个室。第一电源插头被安装成可以从电源孔之一附接和拆卸，以向电极供电。第一电源插头安装在静电卡盘由载体移动的路径的上游。第二电源插头被安装成可以与另一个电源孔相连接和拆卸，以向电极供电。第二电源插头安装在相对于路径到第一电源插头的下游的路径中。

8. 发明申请

US20110168986A1 THIN FILM DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE APPARATUS, AND ORGANIC LIGHT-EMITTING DISPLAY DEVICE MANUFACTURED BY USING THE METHOD 有权
标题翻译：薄膜沉积装置，使用装置制造有机发光显示装置的方法，以及使用该方法制造的有机发光显示装置
公开(公告)号：US20110168986A1
公开(公告)日：2011-07-14
申请号：US12987569
申请日：2011-01-10
申请人： Yun-Mi Lee , Sang-Soo Kim , Chang Mog Jo , Hyun-Sook Park
发明人： Yun-Mi Lee , Sang-Soo Kim , Chang Mog Jo , Hyun-Sook Park
IPC分类号： H01L51/52 , H01L51/56
CPC分类号： H01L51/001 , C23C14/042 , C23C14/243 , C23C14/568 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus, a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus, and an organic light-emitting display device manufactured by using the method. The thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits having different lengths arranged in the first direction; and a barrier plate assembly disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and including a plurality of barrier plates that partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces, wherein the thin film deposition apparatus is separated from the substrate by a predetermined distance, and the thin film deposition apparatus and the substrate are movable relative to each other.
摘要翻译：薄膜沉积装置，使用薄膜沉积装置制造有机发光显示装置的方法以及使用该方法制造的有机发光显示装置。薄膜沉积设备包括：放电沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的具有不同长度的多个图案化缝隙; 以及阻挡板组件，其在所述第一方向上设置在所述沉积源喷嘴单元和所述图案化缝隙片之间，并且包括将所述沉积源喷嘴单元和所述图案化缝隙片之间的空间分隔成多个子区域的多个阻挡板，沉积空间，其中所述薄膜沉积设备与所述基板分离预定距离，并且所述薄膜沉积设备和所述基板可相对于彼此移动。

9. 发明授权

US08859325B2 Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method 有权
标题翻译：薄膜沉积装置，使用该装置的有机发光显示装置的制造方法以及使用该方法制造的有机发光显示装置
公开(公告)号：US08859325B2
公开(公告)日：2014-10-14
申请号：US12987569
申请日：2011-01-10
申请人： Yun-Mi Lee , Sang-Soo Kim , Chang Mog Jo , Hyun-Sook Park
发明人： Yun-Mi Lee , Sang-Soo Kim , Chang Mog Jo , Hyun-Sook Park
IPC分类号： H01L51/40 , H01L51/00 , C23C14/24 , C23C14/56 , C23C14/04 , H01L51/56
CPC分类号： H01L51/001 , C23C14/042 , C23C14/243 , C23C14/568 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus, a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus, and an organic light-emitting display device manufactured by using the method. The thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits having different lengths arranged in the first direction; and a barrier plate assembly disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and including a plurality of barrier plates that partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces, wherein the thin film deposition apparatus is separated from the substrate by a predetermined distance, and the thin film deposition apparatus and the substrate are movable relative to each other.
摘要翻译：薄膜沉积装置，使用薄膜沉积装置制造有机发光显示装置的方法以及使用该方法制造的有机发光显示装置。薄膜沉积设备包括：放电沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的具有不同长度的多个图案化缝隙; 以及阻挡板组件，其在所述第一方向上设置在所述沉积源喷嘴单元和所述图案化缝隙片之间，并且包括将所述沉积源喷嘴单元和所述图案化缝隙片之间的空间分隔成多个子区域的多个阻挡板，沉积空间，其中所述薄膜沉积设备与所述基板分离预定距离，并且所述薄膜沉积设备和所述基板可相对于彼此移动。

10. 发明授权

US09450140B2 Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same 有权
标题翻译：薄膜沉积装置及使用其的有机发光显示装置的制造方法
公开(公告)号：US09450140B2
公开(公告)日：2016-09-20
申请号：US12869830
申请日：2010-08-27
申请人： Chang-Mog Jo , Jong-Heon Kim , Yong-Sup Choi , Sang-Soo Kim , Hee-Cheol Kang , Young-Mook Choi
发明人： Chang-Mog Jo , Jong-Heon Kim , Yong-Sup Choi , Sang-Soo Kim , Hee-Cheol Kang , Young-Mook Choi
IPC分类号： B05D5/06 , C23C16/00 , B05D1/32 , H01L21/00 , H01L33/00 , C23C14/04 , C23C14/12 , C23C14/24 , C23C14/56 , H01L21/67 , H01L21/683 , H01L51/00 , H01L51/56 , H01L27/32
CPC分类号： H01L33/005 , C23C14/042 , C23C14/12 , C23C14/243 , C23C14/246 , C23C14/568 , H01L21/67173 , H01L21/67225 , H01L21/67236 , H01L21/6831 , H01L27/3211 , H01L51/001 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus used to manufacture large substrates on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus using the same, the apparatus includes a loading unit fixing a substrate onto an electrostatic chuck; a deposition unit including a chamber maintained in a vacuum state and a thin film deposition assembly disposed in the chamber, separated from the substrate by a predetermined distance, to deposit a thin film on the substrate fixed on the electrostatic chuck; an unloading unit separating the substrate on which a deposition process is completed, from the electrostatic chuck; a first circulation unit sequentially moving the electrostatic chuck on which the substrate is fixed, to the loading unit, the deposition unit, and the unloading unit; and a second circulation unit returning the electrostatic chuck separated from the substrate to the loading unit from the unloading unit, wherein the first circulation unit passes through the chamber when passing through the deposition unit.
摘要翻译：一种薄膜沉积装置，用于大规模制造大型基板并允许高分辨率图案化，以及制造使用其的有机发光显示装置的方法，该装置包括将基板固定在静电上的装载单元卡盘沉积单元，其包括保持在真空状态的室和设置在所述室中的薄膜沉积组件，其与所述基板隔开预定距离，以在固定在所述静电卡盘上的所述基板上沉积薄膜; 从所述静电卡盘将分离完成了沉积处理的基板的卸载单元; 顺序地将固定有基板的静电卡盘移动到加载单元，沉积单元和卸载单元的第一循环单元; 以及第二循环单元，其将从所述基板分离的所述静电卡盘从所述卸载单元返回到所述装载单元，其中所述第一循环单元在通过所述沉积单元时通过所述室。

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