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    • 6. 发明授权
    • Trench poly ESD formation for trench MOS and SGT
    • 沟槽MOS和SGT的沟槽聚合物ESD形成
    • US08772828B2
    • 2014-07-08
    • US13911871
    • 2013-06-06
    • Hong ChangJohn Chen
    • Hong ChangJohn Chen
    • H01L29/78
    • H01L29/7393H01L27/0259H01L29/7827
    • A semiconductor device includes a semiconductor material disposed in a trench with polysilicon lining at least the bottom of the trench. The semiconductor material includes differently doped regions configured as a PNP or NPN structure formed in the trench with differently doped regions located side by side across a width of the trench. It is emphasized that this abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
    • 半导体器件包括设置在具有至少沟槽底部的多晶硅衬底的沟槽中的半导体材料。 半导体材料包括不同的掺杂区域,其被配置为在沟槽中形成的PNP或NPN结构,其中不同的掺杂区域跨越沟槽的宽度并排设置。 要强调的是,提供这个摘要是为了符合要求摘要的规则,允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是,它不会用于解释或限制权利要求的范围或含义。
    • 9. 发明授权
    • Silicon germanium and polysilicon gate structure for strained silicon transistors
    • 用于应变硅晶体管的硅锗和多晶硅栅极结构
    • US08551831B2
    • 2013-10-08
    • US12234393
    • 2008-09-19
    • Da Wei GaoBei ZhuHanming WuJohn ChenPaolo Bonfanti
    • Da Wei GaoBei ZhuHanming WuJohn ChenPaolo Bonfanti
    • H01L21/8238
    • H01L21/823807H01L21/823814H01L21/823828H01L29/66545H01L29/66636H01L29/7845H01L29/7848
    • An integrated circuit semiconductor device, e.g., MOS, CMOS. The device has a semiconductor substrate. The device also has a dielectric layer overlying the semiconductor substrate and a gate structure overlying the dielectric layer. A dielectric layer forms sidewall spacers on edges of the gate structure. A recessed region is within a portion of the gate structure within the sidewall spacer structures. An epitaxial fill material is within the recessed region. The device has a source recessed region and a drain recessed region within the semiconductor substrate and coupled to the gate structure. The device has an epitaxial fill material within the source recessed region and within the drain recessed region. A channel region is between the source region and the drain region is in a strain characteristic from at least the fill material formed in the source region and the drain region. Depending upon the embodiment, the fill material can be any suitable species such as silicon germanium, silicon carbide, and others.
    • 集成电路半导体器件,例如MOS,CMOS。 该器件具有半导体衬底。 该器件还具有覆盖半导体衬底的电介质层和覆盖在介电层上的栅极结构。 电介质层在栅极结构的边缘上形成侧壁间隔物。 凹陷区域在侧壁间隔结构内的栅极结构的一部分内。 外延填充材料在凹陷区域内。 该器件在半导体衬底内具有源极凹陷区域和漏极凹陷区域,并且耦合到栅极结构。 该器件在源极凹陷区域内和漏极凹陷区域内具有外延填充材料。 源极区域和漏极区域之间的沟道区域至少从形成在源极区域和漏极区域中的填充材料的应变特性中得到。 根据实施例,填充材料可以是任何合适的物质,例如硅锗,碳化硅等。