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1. 发明授权

EP1079003B1 Electrolytic machining method and apparatus 有权
标题翻译：用于电解处理的方法和装置
公开(公告)号：EP1079003B1
公开(公告)日：2007-05-16
申请号：EP00118511.5
申请日：2000-08-25
申请人： Mori, Yuzo , EBARA CORPORATION
发明人： Mori, Yuzo , Shirakashi, Mitsuhiko , Saito, Takayuki , Toma, Yasushi , Fukunaga, Akira , Kobata, Itsuki
IPC分类号： C23F3/00 , B23H3/08
CPC分类号： C25F3/00 , B23H3/08

2. 发明公开

EP1170083A2 Electrochemical machining method and apparatus 有权
标题翻译：用于电化学治疗的方法和装置
公开(公告)号：EP1170083A2
公开(公告)日：2002-01-09
申请号：EP01116344.1
申请日：2001-07-05
申请人： EBARA CORPORATION , Mori, Yuzo
发明人： Mori, Yuzo , Kobata, Itsuki , Shirakashi, Mitsuhiko , Saito, Takayuki , Toma, Yasushi
IPC分类号： B23H3/08 , C25F3/00
CPC分类号： B23H3/08
摘要： An electrochemical machining apparatus comprises a machining chamber for holding ultrapure water, a cathode/anode immersed in the ultrapure water held in the machining chamber, and a workpiece holding portion for holding a workpiece at a predetermined distance from the cathode/anode so that a surface, to be machined, of the workpiece is brought into contact with the ultrapure water. The electrochemical machining apparatus further comprises an anode/cathode contact brought into contact with the workpiece held by the workpiece holding portion so that the workpiece serves as an anode/cathode, a catalyst having a strongly basic anion exchange function or a strongly acidic cation exchange function, a power source for applying a voltage between the cathode/anode and the workpiece, and a moving mechanism for relatively moving the workpiece and the catalyst. The catalyst is disposed between the cathode/anode and the workpiece held by the workpiece holding portion.

3. 发明授权

EP1170083B1 Electrochemical machining method and apparatus 有权
标题翻译：用于电化学治疗的方法和装置
公开(公告)号：EP1170083B1
公开(公告)日：2008-09-10
申请号：EP01116344.1
申请日：2001-07-05
申请人： EBARA CORPORATION , Mori, Yuzo
发明人： Mori, Yuzo , Kobata, Itsuki , Shirakashi, Mitsuhiko , Saito, Takayuki , Toma, Yasushi
IPC分类号： B23H3/08 , C25F3/00
CPC分类号： B23H3/08

4. 发明公开

EP1170083A3 Electrochemical machining method and apparatus 有权
标题翻译：电化学加工方法和设备
公开(公告)号：EP1170083A3
公开(公告)日：2002-09-04
申请号：EP01116344.1
申请日：2001-07-05
申请人： EBARA CORPORATION , Mori, Yuzo
发明人： Mori, Yuzo , Kobata, Itsuki , Shirakashi, Mitsuhiko , Saito, Takayuki , Toma, Yasushi
IPC分类号： B23H3/08 , C25F3/00
CPC分类号： B23H3/08
摘要： An electrochemical machining apparatus comprises a machining chamber for holding ultrapure water, a cathode/anode immersed in the ultrapure water held in the machining chamber, and a workpiece holding portion for holding a workpiece at a predetermined distance from the cathode/anode so that a surface, to be machined, of the workpiece is brought into contact with the ultrapure water. The electrochemical machining apparatus further comprises an anode/cathode contact brought into contact with the workpiece held by the workpiece holding portion so that the workpiece serves as an anode/cathode, a catalyst having a strongly basic anion exchange function or a strongly acidic cation exchange function, a power source for applying a voltage between the cathode/anode and the workpiece, and a moving mechanism for relatively moving the workpiece and the catalyst. The catalyst is disposed between the cathode/anode and the workpiece held by the workpiece holding portion.
摘要翻译：一种电解加工装置，其特征在于，包括：保持超纯水的加工室;浸渍在保持在加工室内的超纯水中的阴极/阳极;以及保持工件的工件保持部，该工件保持部与阴极/阳极隔开规定的距离，待加工的工件与超纯水接触。电化学加工设备还包括与由工件保持部分保持的工件接触的阳极/阴极触点，使得工件用作阳极/阴极，具有强碱性阴离子交换功能或强酸性阳离子交换功能的催化剂，用于在阴极/阳极和工件之间施加电压的电源，以及用于使工件和催化剂相对移动的移动机构。催化剂布置在阴极/阳极和由工件保持部分保持的工件之间。

5. 发明公开

EP1079003A3 Electrolytic machining method and apparatus 有权
标题翻译：维尔法赫恩（Vfrichtung zur elektrolytischen）熊贝通
公开(公告)号：EP1079003A3
公开(公告)日：2004-01-21
申请号：EP00118511.5
申请日：2000-08-25
申请人： Mori, Yuzo , EBARA CORPORATION
发明人： Mori, Yuzo , Shirakashi, Mitsuhiko , Saito, Takayuki , Toma, Yasushi , Fukunaga, Akira , Kobata, Itsuki
IPC分类号： C23F3/00 , B23H3/08
CPC分类号： C25F3/00 , B23H3/08
摘要： An anode (2) as a workpiece, and a cathode (1) opposed to the anode with a predetermined spacing are placed in ultrapure water. A catalytic material (3) promoting dissociation of the ultrapure water and having water permeability is disposed between the workpiece and the cathode. A flow of the ultrapure water is formed inside the catalytic material, with a voltage being applied between the workpiece and the cathode, to decompose water molecules in the ultrapure water into hydrogen ions and hydroxide ions, and supply the resulting hydroxide ions to a surface of the workpiece, thereby performing removal processing of or oxide film formation on the workpiece through a chemical dissolution reaction or an oxidation reaction mediated by the hydroxide ions. Thus, clean processing can be performed by use of hydroxide ions in ultrapure water, with no impurities left behind on the processed surface of the workpiece.
摘要翻译：将作为工件的阳极（2）和与阳极相对的具有预定间隔的阴极（1）放置在超纯水中。在工件和阴极之间设置促进超纯水的离解并具有透水性的催化材料（3）。在催化材料内部形成有超纯水的流动，在工件和阴极之间施加电压，将超纯水中的水分子分解为氢离子和氢氧根离子，并将得到的氢氧根离子供给到从而通过化学溶解反应或由氢氧根离子介导的氧化反应进行工件的去除处理或氧化膜形成。因此，可以通过在超纯水中使用氢氧根离子进行清洁处理，在工件的加工表面上不会留下杂质。

6. 发明公开

EP1079003A2 Electrolytic machining method and apparatus 有权
标题翻译：用于电解处理的方法和装置
公开(公告)号：EP1079003A2
公开(公告)日：2001-02-28
申请号：EP00118511.5
申请日：2000-08-25
申请人： Mori, Yuzo , EBARA CORPORATION
发明人： Mori, Yuzo , Shirakashi, Mitsuhiko , Saito, Takayuki , Toma, Yasushi , Fukunaga, Akira , Kobata, Itsuki
IPC分类号： C23F3/00 , B23H3/08
CPC分类号： C25F3/00 , B23H3/08
摘要： An anode as a workpiece, and a cathode opposed to the anode with a predetermined spacing are placed in ultrapure water. A catalytic material promoting dissociation of the ultrapure water and having water permeability is disposed between the workpiece and the cathode. A flow of the ultrapure water is formed inside the catalytic material, with a voltage being applied between the workpiece and the cathode, to decompose water molecules in the ultrapure water into hydrogen ions and hydroxide ions, and supply the resulting hydroxide ions to a surface of the workpiece, thereby performing removal processing of or oxide film formation on the workpiece through a chemical dissolution reaction or an oxidation reaction mediated by the hydroxide ions. Thus, clean processing can be performed by use of hydroxide ions in ultrapure water, with no impurities left behind on the processed surface of the workpiece.

7. 发明公开

EP1894656A2 Electrolytic liquid for electrolytic polishing and electrolytic polishing method 审中-公开
标题翻译：导电液体进行电解抛光和电解抛光方法
公开(公告)号：EP1894656A2
公开(公告)日：2008-03-05
申请号：EP07017294.5
申请日：2007-09-04
申请人： EBARA CORPORATION
发明人： Kodera, Akira , Toma, Yasushi , Suzuki, Tsukuru , Saito, Takayuki , Kobata, Itsuki
IPC分类号： B23H5/08 , B23H5/12 , C25F7/00 , C25F3/16
CPC分类号： B23H5/08 , B23H5/12 , C25F3/16 , C25F3/22
摘要： An electrolytic liquid is used for electrolytic polishing which can provide a processed surface having high flattening characteristics with a low voltage applied while ensuring a higher processing rate for an conductive material, and can remove an unnecessary conductive material and expose a barrier film without causing dishing, erosion, or etching at the interface between the barrier film and a metal (conductive material) . The electrolytic liquid for use in electrolytic polishing of a surface conductive material of a workpiece comprises an aqueous solution containing at least one organic acid or its salt, at least one strong acid having a sulfonic acid group, a corrosion inhibitor and a water-soluble polymeric compound.
摘要翻译：电解液用于电解抛光，可以提供具有高平坦特性的加工面与同时确保导电材料的速率更高的处理施加的低电压，并且可以在不必要的导电材料除去并露出的阻挡膜，而不会引起表面凹陷，糜烂，或蚀刻在阻挡膜和金属（导电材料）之间的界面。含有至少一种有机酸或其盐，其具有磺酸基，腐蚀抑制剂和水溶性聚合物的至少一种强酸wässrige溶液的用于在工件的表面上的导电材料的电解抛光使用的电解液包含化合物。

8. 发明公开

EP2508903A2 Inspection device using secondary charged particle detection 有权
标题翻译： Prüfgerät，basierend auf der Detektion geladenerSekundärteilchen
公开(公告)号：EP2508903A2
公开(公告)日：2012-10-10
申请号：EP12001774.4
申请日：2012-03-15
申请人： EBARA CORPORATION
发明人： Hatakeyama, Masahiro , Yoshikawa, Shoji , Murakami, Takeshi , Watanabe, Kenji , Naito, Yoshihiko , Toma, Yasushi , Karimata, Tsutomu , Hayashi, Takehide , Tsukamoto, Kiwamu , Kohama, Tatsuya , Kobayashi, Noboru
IPC分类号： G01R31/305 , G01R31/308 , H01J37/244 , H01J37/252 , H01J37/304
CPC分类号： H01J37/09 , G01N23/22 , G01N23/223 , G01N23/2251 , G01N2223/611 , H01J37/10 , H01J37/20 , H01J37/222 , H01J37/244 , H01J37/265 , H01J37/28 , H01J37/29 , H01J2237/0048 , H01J2237/022 , H01J2237/032 , H01J2237/038 , H01J2237/045 , H01J2237/0458 , H01J2237/0473 , H01J2237/0492 , H01J2237/061 , H01J2237/06333 , H01J2237/166 , H01J2237/186 , H01J2237/2002 , H01J2237/2007 , H01J2237/2008 , H01J2237/2448 , H01J2237/2482 , H01J2237/2485 , H01J2237/2817 , H01J2237/2855 , H01J2237/2857
摘要： An inspection device for inspecting a surface of an inspection object using a beam includes a beam generator (10000) which is capable of generating one of either charge particles or an electromagnetic wave as a beam (10000A), a primary optical system (72) which is capable of guiding and irradiating the beam to the inspection object supported within a working chamber, a secondary optical system (74) which is capable of including a first movable numerical aperture (10008) and a first detector (761;76) which detects secondary charge particles generated from the inspection object (W), the secondary charge particles passing through the first movable numerical aperture, an image processing system (763) which is capable of forming an image based on the secondary charge particles detected by the first detector; and a second detector (76-2) arranged between the first movable numerical aperture (10008) and the first detector (76) and which detects a location and shape at a cross over location of the secondary charge particles generated from the inspection object (W).
摘要翻译：用于使用光束检查检查对象的表面的检查装置包括能够产生作为光束（10000A）的电荷粒子或电磁波之一的光束发生器（10000），主光学系统（72），其能够将梁引导和照射到支撑在工作室内的检查对象物，能够包括第一可移动数值孔径（10008）和第二检测器（761; 76）的辅助光学系统（74），其检测次级从检查对象（W）产生的充电微粒，通过第一可移动数值孔径的二次电荷粒子，能够基于由第一检测器检测的二次电荷粒子形成图像的图像处理系统（763）以及布置在所述第一可移动数值孔径（10008）和所述第一检测器（76）之间的第二检测器（76-2），并且检测在从所述检查对象（W）产生的所述次级电荷颗粒的交叉位置处的位置和形状）。

9. 发明公开

EP1772536A1 Electrolytic processing apparatus and method 审中-公开
标题翻译： Apparat und Methode zur elektrolytischen Behandlung
公开(公告)号：EP1772536A1
公开(公告)日：2007-04-11
申请号：EP06021548.0
申请日：2002-09-11
申请人： EBARA CORPORATION
发明人： Kobata, Itsuki , Shirakashi, Mitsuhiko , Kumekawa, Masayuki , Saito, Takayuki , Toma, Yasushi , Suzuki, Tsukuru , Yamada, Kaoru , Makita, Yuji , Yasuda, Hozumi , Noji, Ikutaro , Fujiwara, Kunio , Nabeya, Osamu
IPC分类号： C25F1/00 , C25F7/00 , C25F3/00 , H01L21/3213
CPC分类号： B23H5/08 , C23F3/00 , C25F1/00 , C25F3/00 , C25F7/00 , H01L21/32115 , H01L21/32125 , H01L21/32134
摘要： There is provided an electrolytic processing apparatus and method which, while omitting a CMP treatment entirely or reducing a load upon a CMP treatment to the least possible extent, can process a conductive material formed in the surface of a substrate to flatten the material, or can remove (clean) extraneous matter adhering to the surface of a workpiece such as a substrate. The electrolytic processing apparatus includes: a pair of electrodes disposed at a given distance; an ion exchange disposed between the pair of electrodes; and a liquid supply section for supplying a liquid between the pair of electrodes. The electrolytic processing method includes: providing an electrode section having a pair of electrodes disposed at a given distance with an ion exchanger being interposed; and bringing the electrode into contact with or close to a workpiece while supplying a fluid to the ion exchanger, thereby processing the surface of the workpiece.
摘要翻译：提供了一种电解处理装置和方法，其尽可能地完全省略CMP处理或减少CMP处理时的负载，但可以处理形成在基板的表面中的导电材料以使材料变平，或者可以去除（清洁）附着在诸如基板的工件的表面上的外来物质。所述电解处理装置包括：以一定距离设置的一对电极; 设置在所述一对电极之间的离子交换器; 以及用于在一对电极之间供应液体的液体供应部。电解处理方法包括：提供具有一对电极的电极部分，所述电极部分设置在与离子交换器相隔一定距离的位置; 并且使电极与工件接触或接近工件，同时向离子交换器供应流体，从而处理工件的表面。

10. 发明授权

EP0790757B1 Fast atomic beam source 失效
标题翻译：源快速原子束
公开(公告)号：EP0790757B1
公开(公告)日：2003-07-02
申请号：EP97102532.5
申请日：1997-02-17
申请人： EBARA CORPORATION
发明人： Hatakeyama, Masahiro , Ichiki, Katsunori , Toma, Yasushi , Saitoh, Masao
IPC分类号： H05H3/02
CPC分类号： H05H3/02

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