专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2012177663A3 AUTOFOCUS SYSTEM WITH REFERENCE CONFIGURATION 审中-公开
公开(公告)号：WO2012177663A3
公开(公告)日：2012-12-27
申请号：PCT/US2012/043186
申请日：2012-06-19
申请人： NIKON CORPORATION , SOGARD, Michael, R. , SMITH, Daniel, Gene , GOODWIN, Eric, Peter
发明人： SOGARD, Michael, R. , SMITH, Daniel, Gene , GOODWIN, Eric, Peter
IPC分类号： G03B3/00
摘要： A system (222) for measuring the position of a work piece (200) includes a redirector assembly (244), a light source assembly (240), a detector assembly (242), and a control system (224). The redirector assembly (244) is positioned near and spaced apart from the working surface (200A). The light source assembly (240) directs a measurement beam (246A) and a reference beam (246B) at the redirector assembly (244). The detector assembly (242) detects the measurement beam (246A) reflected off of the work piece (200) and generates a measurement signal, and detects the reference beam (246B) reflected off of the redirector assembly (244) and generates a reference signal. The control system (24) uses the measurement signal and the reference signal to determine the position of the work piece (200).

2. 发明申请

WO2010008993A1 ADAPTIVE FLY-EYE AND OTHER MIRRORS FOR EXTREME ULTRAVIOLET AND OTHER OPTICAL SYSTEMS 审中-公开
标题翻译：自适应荧光眼镜和其他超级紫外线和其他光学系统的镜子
公开(公告)号：WO2010008993A1
公开(公告)日：2010-01-21
申请号：PCT/US2009/050030
申请日：2009-07-09
申请人： NIKON CORPORATION , SOGARD, Michael, R.
发明人： SOGARD, Michael, R.
IPC分类号： G03F7/20 , G02B26/00
CPC分类号： G03F7/70141 , G02B26/0833 , G03F7/70075 , G03F7/70116
摘要： Segmented mirrors and adaptive mirrors are disclosed, along with methods involving use of same. An exemplary segmented mirror (150, 150b) includes an array of multiple mirror elements and a monitoring device (160a-166a). The mirror elements have respective reflective surfaces and are respectively movable. The elements reflect respective portions of a beam of utility light incident on the array. The monitoring device is situated relative to the array and includes a source of sensor light (160a) and a Shack-Hartmann sensor (164a). The source is situated to direct the sensor light onto at least some of the elements, and the Shack-Hartmann sensor (164a) is situated to receive sensor light reflected from the elements. The sensor can determine, from detected locations of focal spots of sensor light produced by the sensor, information concerning an optical result desirably being obtained by use of the segmented mirror.
摘要翻译：公开了分段反射镜和自适应反射镜，以及涉及使用它们的方法。示例性分段镜（150,150b）包括多个镜子元件阵列和监视装置（160a-166a）。镜子元件具有各自的反射表面并且分别可移动。这些元件反射入射在阵列上的实用光束的各个部分。监测装置相对于阵列设置，并且包括传感器光源（160a）和Shack-Hartmann传感器（164a）。该源被定位成将传感器光引导到至少一些元件上，并且Shack-Hartmann传感器（164a）被定位成接收从元件反射的传感器光。传感器可以从传感器产生的传感器光的焦点的检测位置确定关于期望通过使用分段镜获得的光学结果的信息。

3. 发明申请

WO2007118014A2 INCIDENCE SURFACES AND OPTICAL WINDOWS THAT ARE SOLVOPHOBIC TO IMMERSION LIQUIDS 审中-公开
标题翻译：易渗透液体的渗透表面和光学窗口
公开(公告)号：WO2007118014A2
公开(公告)日：2007-10-18
申请号：PCT/US2007/065381
申请日：2007-03-28
申请人： NIKON CORPORATION , SOGARD, Michael, R. , WATSON, Douglas, C.
发明人： SOGARD, Michael, R. , WATSON, Douglas, C.
IPC分类号： G02B1/10
CPC分类号： G02B1/18 , G02B1/10 , G02B5/00 , G02B5/1809 , G02B21/33 , G03F7/70341 , G03F7/70616 , G03F7/70958 , G03F9/7088 , G03F9/7096 , Y10T428/24355
摘要： Optical windows are provided that transmit light such as deep-UV (DUV) light. An exemplary window includes a window substrate that is transmissive to at least one wavelength of the light. The window substrate has an incidence surface decorated with sub-wavelength asperities arranged so as to render the incidence surface solvophobic to the light-transmissive liquid. The arrangement of sub- wavelength asperities can be configured to render the incidence surface super- solvophobic to the liquid. The sub-wavelength asperities can have any of various shapes and combinations thereof, and can be regularly or irregularly arranged.
摘要翻译：提供透光（例如深紫外线（DUV））光的光学窗口。示例性窗口包括透光的至少一个波长的窗口基板。窗口基板具有用亚波长粗糙度布置的入射表面，以使得入射表面对透光液体具有疏油性。亚波长粗糙度的布置可以被配置为使得入射表面对液体具有反作用力。亚波长粗糙度可以具有各种形状和组合的任何形状，并且可以规则地或不规则地布置。

4. 发明申请

WO2005047981A2 THERMOPHORETIC TECHNIQUES FOR PROTECTING RETICLES FROM CONTAMINANTS 审中-公开
标题翻译：用于保护污染物中的反应物的热化学技术
公开(公告)号：WO2005047981A2
公开(公告)日：2005-05-26
申请号：PCT/US2004/037542
申请日：2004-11-10
申请人： NIKON CORPORATION , ALTON, Phillips, H. , SOGARD, Michael, R. , WATSON, Douglas, C. , TANAKA, Keiichi
发明人： ALTON, Phillips, H. , SOGARD, Michael, R. , WATSON, Douglas, C. , TANAKA, Keiichi
IPC分类号： G03F7/20
CPC分类号： G03F7/70741 , G03B27/52 , G03F1/82 , G03F7/70875 , G03F7/70916
摘要： Thermophoresis within lithography systems for protecting reticles from contaminants (e.g., floating particles). Generally, thermophoretic protection is implemented by maintaining the reticle at a higher temperature than its surrounding environment. Thermophoretic protection can be maintained throughout a reticle's use in a lithography system. For example, a reticle can be thermophoretically protected while in storage, through various stages of transportation via a reticle handler (also referred to as an end-effector), to its period of use while attached to a reticle chuck.
摘要翻译：在光刻系统内进行热电泳以保护掩模版免受污染物（例如浮动颗粒）的影响。通常，通过将掩模版保持在比周围环境更高的温度下来实现热保护。在光刻系统中使用的掩模版可以保持热保护。例如，在通过分划板处理器（也称为末端执行器）的各种运输阶段到存储期间，在将光罩保持在其使用期间，同时附着在标线盘卡盘上的情况下，可以热掩膜保护。

5. 发明公开

EP2005222A2 INCIDENCE SURFACES AND OPTICAL WINDOWS THAT ARE SOLVOPHOBIC TO IMMERSION LIQUIDS 审中-公开
标题翻译：反对浸液疏溶的入射面与光学窗口
公开(公告)号：EP2005222A2
公开(公告)日：2008-12-24
申请号：EP07759594.0
申请日：2007-03-28
申请人： Nikon Corporation
发明人： SOGARD, Michael, R.
IPC分类号： G02B1/10
CPC分类号： G02B1/18 , G02B1/10 , G02B5/00 , G02B5/1809 , G02B21/33 , G03F7/70341 , G03F7/70616 , G03F7/70958 , G03F9/7088 , G03F9/7096 , Y10T428/24355
摘要： Optical windows are provided that transmit light such as deep-UV (DUV) light. An exemplary window includes a window substrate that is transmissive to at least one wavelength of the light. The window substrate has an incidence surface decorated with sub-wavelength asperities arranged so as to render the incidence surface solvophobic to the light-transmissive liquid. The arrangement of sub- wavelength asperities can be configured to render the incidence surface super- solvophobic to the liquid. The sub-wavelength asperities can have any of various shapes and combinations thereof, and can be regularly or irregularly arranged.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式