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    • 10. 发明申请
    • CONTROL SYSTEM FOR CONTROLLING A FLUID ACTUATOR
    • 控制流体致动器的控制系统
    • WO2017210450A1
    • 2017-12-07
    • PCT/US2017/035488
    • 2017-06-01
    • NIKON CORPORATIONYANG, Pai-hsueh
    • YANG, Pai-hsuehCHOI, Yeong-junCHANG, Ping-weiSAKATA, KoichiLEE, Sandy
    • F15B9/08F15B11/028
    • F15B11/042F15B13/0442F15B19/007F15B2211/30575F15B2211/327F15B2211/351F15B2211/353F15B2211/665F15B2211/6654
    • A stage assembly (10) for positioning a workpiece (22) includes a stage (14), a base (12), a fluid actuator assembly (24), and a control system (20). The fluid actuator assembly (24) moves the stage (14) along the movement axis (30) relative to the base (12). The fluid actuator assembly (24) includes a piston housing (32) that defines a piston chamber (34), a piston (36) that is positioned within and moves relative to the piston chamber (34) along a piston axis (36A), and a valve assembly (38) that controls the flow of a piston fluid into the piston chamber (34). The valve assembly (38) includes an inlet valve (38C) having an inlet valve characteristic. The control system (20) controls the valve assembly (38) to control the flow of the piston fluid into the piston chamber (34). The control system (20) can utilize an inverse of the inlet valve characteristic to control the valve assembly (38).
    • 用于定位工件(22)的平台组件(10)包括平台(14),基座(12),流体致动器组件(24)和控制系统(20)。 流体致动器组件(24)使台架(14)沿着移动轴线(30)相对于基座(12)移动。 流体致动器组件(24)包括限定活塞室(34)的活塞壳体(32),位于活塞轴线(36A)内并且相对于活塞室(34)相对于活塞室(34)移动的活塞(36) 和控制活塞流体流入活塞室(34)的阀组件(38)。 阀组件(38)包括具有入口阀特性的入口阀(38C)。 控制系统(20)控制阀组件(38)以控制活塞流体流入活塞室(34)。 控制系统(20)可以利用入口阀特性的倒数来控制阀组件(38)。