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1. 发明申请

WO2012061163A2 APPARATUS, OPTICAL ASSEMBLY, METHOD FOR INSPECTION OR MEASUREMENT OF AN OBJECT AND METHOD FOR MANUFACTURING A STRUCTURE 审中-公开
标题翻译：装置，光学组件，检查或测量物体的方法以及制造结构的方法
公开(公告)号：WO2012061163A2
公开(公告)日：2012-05-10
申请号：PCT/US2011057758
申请日：2011-10-25
申请人： NIPPON KOGAKU KK , GOODWIN ERIC PETER , WILLIAMSON DAVID MICHAEL , SMITH DANIEL GENE , PHARAND MICHEL , COOPER ALEXANDER , ROBERTSON ALEC , STAMPER BRIAN L
发明人： GOODWIN ERIC PETER , WILLIAMSON DAVID MICHAEL , SMITH DANIEL GENE , PHARAND MICHEL , COOPER ALEXANDER , ROBERTSON ALEC , STAMPER BRIAN L
IPC分类号： G06T7/40
CPC分类号： G01N21/01 , G01B11/026 , G01N2021/1793 , G01S7/4814 , G01S7/4817 , G01S7/4818
摘要： An optical assembly for a system for inspecting or measuring of an object is provided that is configured to move as a unit with a system, as the system is pointed at a target, and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the system. The optical assembly comprises catadioptric optics configured to fold the optical path of the pointing beam and measurement beam that are being directed through the outlet of the system, to compress the size of the optical assembly.
摘要翻译：提供了一种用于检查或测量物体的系统的光学组件，该系统被配置为当系统指向目标时作为一个单元与系统一起移动，并且不需要大型扫描（指向）反射镜相对于系统的其他部分可移动。该光学组件包括反射折射型光学器件，该反射折射型光学器件被构造成折叠正被引导通过系统的出口的指向光束和测量光束的光路，以压缩光学组件的尺寸。

2. 发明申请

WO2012029998A2 MICROCHANNEL-COOLED COILS OF ELECTROMAGNETIC ACTUATORS EXHIBITING REDUCED EDDY-CURRENT DRAG 审中-公开
标题翻译：电磁驱动器的微通道冷却线圈显示降低的涡流电流
公开(公告)号：WO2012029998A2
公开(公告)日：2012-03-08
申请号：PCT/JP2011070669
申请日：2011-09-05
申请人： NIPPON KOGAKU KK , BINNARD MICHAEL B , COAKLEY SCOTT , POON ALEX , TOTSU MASAHIRO , COON DEREK , KHO LEONARD , KESWANI GAURAV , COOPER ALEXANDER , PHARAND MICHEL , BJORK MATT
发明人： BINNARD MICHAEL B , COAKLEY SCOTT , POON ALEX , TOTSU MASAHIRO , COON DEREK , KHO LEONARD , KESWANI GAURAV , COOPER ALEXANDER , PHARAND MICHEL , BJORK MATT
IPC分类号： H02K3/24
CPC分类号： H02K9/22 , G03F7/70758 , G03F7/70875 , H02K9/19 , H02K41/031 , H02K2201/18
摘要： Linear and planar motors, as exemplary electromagnetic actuators, are disclosed that have at least one actively cooled coil assembly. An exemplary assembly includes a coil having first and second main surfaces. Also included is a respective thermally conductive cooling plate in thermal contact with at least one main surface of the coil. A coolant passageway is defined in or on each cooling plate, and a liquid coolant passes through the coolant passageway. The coolant passageway has a primary pattern that is coextensive with at least part of the main surface of the coil. The primary pattern can include a secondary pattern producing coolant flow through the coolant passageway in a manner that reduces eddy-current losses in the cooling plate. The coolant passageway desirably includes. An exemplary secondary pattern is serpentine. An exemplary primary pattern is radial or has a radial aspect, such as an X-shaped pattern. The devices provide more effective cooling, with better reliability and ease of maintenance, and reduced eddy-current drag than conventional actuators.
摘要翻译：作为示例性电磁致动器，公开了线性和平面电机，其具有至少一个主动冷却的线圈组件。示例性组件包括具有第一和第二主表面的线圈。还包括与线圈的至少一个主表面热接触的相应导热冷却板。冷却剂通路限定在每个冷却板中或上，并且液体冷却剂穿过冷却剂通路。冷却剂通道具有与线圈的主表面的至少一部分共同延伸的主要图案。主要模式可以包括次要模式，以减少冷却板中的涡流损失的方式产生通过冷却剂通道的冷却剂流。冷却剂通道理想地包括。示例性的次级模式是蛇形。示例性主要图案是径向或具有径向方面，诸如X形图案。该设备提供更有效的冷却，具有更好的可靠性和易于维护，并且比传统执行器减少了涡流阻力。

3. 发明申请

WO2013070568A3 SYSTEM AND METHOD FOR CONTROLLING A TEMPERATURE OF A REACTION ASSEMBLY 审中-公开
标题翻译：用于控制反应组件温度的系统和方法
公开(公告)号：WO2013070568A3
公开(公告)日：2015-06-11
申请号：PCT/US2012063646
申请日：2012-11-06
申请人： NIPPON KOGAKU KK , PHARAND MICHEL , MAHADESWARASWAMY CHETAN , BINNARD MICHAEL B
发明人： PHARAND MICHEL , MAHADESWARASWAMY CHETAN , BINNARD MICHAEL B
IPC分类号： G05D23/275
CPC分类号： G03F7/70716 , B01J19/0093 , B01J2219/00783 , B01J2219/00873 , G03F7/70758 , G03F7/70858 , G03F7/70875 , H01L21/682
摘要： A stage assembly (10) that includes (i) a stage (14) that retains a device (26); (ii) a reaction assembly (18) that is spaced apart from the stage (14); (iii) a stage mover (16) that moves the stage (14), the stage mover (16) including a magnet array (38) that is coupled to the stage (14) and a conductor array (36) that is coupled to the reaction assembly (18); (iv) a temperature adjuster (20); and (v) a control system (22) that selectively controls the temperature adjuster (20). The conductor array (36) includes a set of first zone conductor units (250), and a set of second zone conductor units (252). The temperature adjuster (20) independently adjusts the temperature of the set of first zone conductor units (250), and the set of second zone conductor units (252).
摘要翻译：一种舞台组件（10），包括（i）保持装置（26）的舞台（14）; （ii）与所述载物台（14）间隔开的反应组件（18）; （iii）移动所述载物台（14）的载物台移动器（16），所述载物台移动器（16）包括联接到所述载物台（14）的磁体阵列（38）和导体阵列（36），所述导体阵列反应组件（18）; （iv）温度调节器（20）; 和（v）选择性地控制温度调节器（20）的控制系统（22）。导体阵列（36）包括一组第一区导体单元（250）和一组第二区导体单元（252）。温度调节器（20）独立地调节该组第一区导体单元（250）和该组第二区导体单元（252）的温度。

4. 发明申请

WO2004095477A3 HIGH-PERFORMANCE ELECTROSTATIC CLAMP COMPRISING A RESISTIVE LAYER, MICRO-GROOVES, AND DIELECTRIC LAYER 审中-公开
标题翻译：包含电阻层，微孔和电介质层的高性能静电夹
公开(公告)号：WO2004095477A3
公开(公告)日：2005-02-10
申请号：PCT/US2004012549
申请日：2004-04-21
申请人： AXCELIS TECH INC , KELLERMAN PETER , BENVENISTE VICTOR , PHARAND MICHEL , STONE DALE
发明人： KELLERMAN PETER , BENVENISTE VICTOR , PHARAND MICHEL , STONE DALE
IPC分类号： H01L21/683 , H02N13/00 , H01L21/67
CPC分类号： H01L21/6833 , H02N13/00
摘要： An electrostatic clamp for securing a semiconductor wafer during processing. The electrostatic clamp comprises a base member, a resistive layer, a dielectric layer including a gas pressure distribution micro-groove network, a gas gap positioned between a backside of a semiconductor wafer and the dielectric layer, and a pair of high voltage electrodes positioned between the resistive layer and the dielectric layer. The electrostatic clamp can further comprise at least one ground electrode positioned between the resistive layer and the dielectric layer that provides shielding for the gas pressure distribution micro-groove network. The electrostatic clamp is characterized by a heat transfer coefficient of greater than or about 200 mW/Kcm , a response time of less than or about 1 second, and gas leakage of less than or about 0.5 sccm. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims. .
摘要翻译：一种用于在加工过程中固定半导体晶片的静电夹。静电夹具包括基底构件，电阻层，包括气体压力分布微槽网络的电介质层，位于半导体晶片的背面与电介质层之间的气隙，以及一对位于电阻层和电介质层。静电夹具还可以包括位于电阻层和电介质层之间的至少一个接地电极，其为气体压力分布微槽网络提供屏蔽。静电夹具的特征在于传热系数大于或约200mW / Kcm 2，响应时间小于或约1秒，气体泄漏小于或约0.5sccm。要强调的是，该摘要被提供以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。提交它的理解是，它不会用于解释或限制权利要求的范围或含义。。

5. 发明申请

WO2008070876A3 ENVIRONMENTAL ISOLATION SYSTEM FOR FLAT PANEL DISPLAYS 审中-公开
公开(公告)号：WO2008070876A3
公开(公告)日：2008-10-02
申请号：PCT/US2007087034
申请日：2007-12-10
申请人： ASYST TECHNOLOGIES , BONORA ANTHONY C , PHARAND MICHEL , GOULD ROBERT
发明人： BONORA ANTHONY C , PHARAND MICHEL , GOULD ROBERT
IPC分类号： B65D85/48 , G02F1/13
CPC分类号： B65D81/2076 , B65D85/30 , B65D2585/6837 , H01L21/67017 , H01L21/6734 , H01L21/67363 , H01L21/67379 , H01L21/67383 , H01L21/67393 , H01L21/67772 , H01L21/67775
摘要： The present invention generally comprises a system for FPD material storage and transport. The FPD system may contain environmental protection, material tracking and/or workstation loading capabilities. One of the components of the system includes a transportable, sealable container. Another component of the system includes a sealable load port against which a container is docked so that the substrates may be processed.

6. 发明公开

EP2633364A4 APPARATUS, OPTICAL ASSEMBLY, METHOD FOR INSPECTION OR MEASUREMENT OF AN OBJECT AND METHOD FOR MANUFACTURING A STRUCTURE 审中-公开
标题翻译：设备，光学布置，其方法为讯问或测量物体及其制造方法的结构
公开(公告)号：EP2633364A4
公开(公告)日：2014-07-02
申请号：EP11838550
申请日：2011-10-25
申请人： NIPPON KOGAKU KK
发明人： GOODWIN ERIC PETER , WILLIAMSON DAVID MICHAEL , SMITH DANIEL GENE , PHARAND MICHEL , COOPER ALEXANDER , ROBERTSON ALEC , STAMPER BRIAN L
IPC分类号： G01S7/481 , G01B11/02 , G01N21/01 , G02B19/00 , G02B26/10
CPC分类号： G01N21/01 , G01B11/026 , G01N2021/1793 , G01S7/4814 , G01S7/4817 , G01S7/4818
摘要： An optical assembly for a system for inspecting or measuring of an object is provided that is configured to move as a unit with a system, as the system is pointed at a target, and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the system. The optical assembly comprises catadioptric optics configured to fold the optical path of the pointing beam and measurement beam that are being directed through the outlet of the system, to compress the size of the optical assembly.

7. 发明申请

WO2008051369A3 LOW-COST ELECTROSTATIC CLAMP WITH FAST DECLAMP TIME AND THE MANUFACTURE 审中-公开
标题翻译：低成本的静电夹具具有快速减速时间和制造
公开(公告)号：WO2008051369A3
公开(公告)日：2008-07-31
申请号：PCT/US2007021614
申请日：2007-10-10
申请人： AXCELIS TECH INC , LAFONTAINE MARVIN , PHARAND MICHEL , RUBIN LEONARD , BECKER KLAUS
发明人： LAFONTAINE MARVIN , PHARAND MICHEL , RUBIN LEONARD , BECKER KLAUS
IPC分类号： H01L21/683 , H02N13/00
CPC分类号： H01L21/6833 , H02N13/00
摘要： A method for manufacturing a semiconductor wafer electrostatic clamp, comprising providing a mounting plate, forming an insulative layer on an insulating portion of the mounting plate, forming a first electrode on a first portion of the mounting plate, forming a second electrode on a second portion of the mounting plate, forming a first segment having a first conductivity over the first electrode, forming a first region having a second conductivity over the first segment that creates an n-p type composite, forming a second segment having a third conductivity formed over the over the second electrode, forming a second region having a fourth conductivity formed over the second region that creates an p-n type composite.
摘要翻译：一种制造半导体晶片静电夹的方法，包括提供安装板，在安装板的绝缘部分上形成绝缘层，在安装板的第一部分上形成第一电极，在第二部分上形成第二电极在所述第一电极上形成具有第一导电性的第一区段，在所述第一区段上形成具有第二导电性的第一区域，所述第一区域在所述第一区段上形成np型复合材料，形成具有第三导电性的第二区段，形成具有形成在第二区域上的第四导电性的第二区域，形成pn型复合材料的第二区域。

8. 发明申请

WO2008021340A3 WORKPIECE HANDLING SCAN ARM FOR ION IMPLANTATION SYSTEM 审中-公开
标题翻译：用于离子注入系统的工件处理扫描臂
公开(公告)号：WO2008021340A3
公开(公告)日：2008-07-17
申请号：PCT/US2007017942
申请日：2007-08-13
申请人： AXCELIS TECH INC , BECKEL DONOVAN , EIRIKSSON ARI , MITCHELL ROBERT , PHARAND MICHEL , LAFONTAINE MARVIN , PUROHIT ASHWIN , WEED STEVE , ARSENAULT WAYNE , PATHAK SHANTANU
发明人： EIRIKSSON ARI , MITCHELL ROBERT , PHARAND MICHEL , LAFONTAINE MARVIN , PUROHIT ASHWIN , WEED STEVE , ARSENAULT WAYNE , PATHAK SHANTANU
IPC分类号： H01L21/683 , H01L21/687
CPC分类号： H01L21/6831 , H01L21/68764
摘要： An ion implantation apparatus, system, and method are provided for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating members associated with one or more of the twist head and electrostatic chuck have one or more dynamic fluid seals associated therewith. The electrostatic chuck is further operable to be removed from the twist head without disconnecting the one or more dynamic fluid seals.
摘要翻译：提供了一种离子注入设备，系统和方法，用于连接和断开扫描臂上的工件支架。提供一种扭头，其中可操作地安装静电吸盘，其中与扭头和静电吸盘中的一个或多个相关联的一个或多个旋转和非旋转构件具有与其相关联的一个或多个动态流体密封件。静电吸盘可进一步操作以在不断开一个或多个动态流体密封件的情况下从扭动头部移除。

9. 发明申请

WO2008070876A9 ENVIRONMENTAL ISOLATION SYSTEM FOR FLAT PANEL DISPLAYS 审中-公开
标题翻译：平板显示器的环境隔离系统
公开(公告)号：WO2008070876A9
公开(公告)日：2008-08-21
申请号：PCT/US2007087034
申请日：2007-12-10
申请人： ASYST TECHNOLOGIES , BONORA ANTHONY C , PHARAND MICHEL , GOULD ROBERT
发明人： BONORA ANTHONY C , PHARAND MICHEL , GOULD ROBERT
IPC分类号： B65D85/48 , G02F1/13
CPC分类号： B65D81/2076 , B65D85/30 , B65D2585/6837 , H01L21/67017 , H01L21/6734 , H01L21/67363 , H01L21/67379 , H01L21/67383 , H01L21/67393 , H01L21/67772 , H01L21/67775
摘要： The present invention generally comprises a system for FPD material storage and transport. The FPD system may contain environmental protection, material tracking and/or workstation loading capabilities. One of the components of the system includes a transportable, sealable container. Another component of the system includes a sealable load port against which a container is docked so that the substrates may be processed.
摘要翻译：本发明一般包括用于FPD材料存储和运输的系统。 FPD系统可能包含环境保护，材料跟踪和/或工作站加载功能。该系统的一个组成部分包括一个可移动的可密封容器。该系统的另一个组件包括一个可密封的装载口，一个容器靠着该装载口对接以便可以处理基材。

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