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    • 1. 发明公开
    • TAPE POLISH METHOD AND APPARATUS
    • 胶带抛光方法和装置
    • KR20070092619A
    • 2007-09-13
    • KR20070020974
    • 2007-03-02
    • NTN TOYO BEARING CO LTD
    • YAMAZAKI SHIZUKAYADA YUUJIOHBA HIROAKI
    • B24B21/04B24B21/00
    • B24B21/04B24B49/00
    • A method for grinding a tape, and a device thereof are provided to adjust the force exerting on a projection unit by a head pin, adequately and to process the projection unit with high accuracy by limiting the variation of the force on exerted on the projection unit. A device for grinding a tape comprises a head pin, a tape grinding unit, a measuring unit, and a control unit. The front end portion of the head pin contacts with the other surface of the tape and moves along the vertical coordinate shaft of a substrate surface. The tape grinding unit is installed to grind a projection unit(22) by the surface of the grinding tape. The measuring unit is installed to measure the height of the projection unit. The control unit is installed to divide the height of the projection unit into the process range over two step and to vary the force exerting on the projection unit.
    • 提供了一种研磨带的方法及其装置,以适当地调节由头销施加在投影单元上的力,并且通过限制施加在投影单元上的力的变化,以高精度来处理投影单元 。 用于研磨带的装置包括头针,带磨削单元,测量单元和控制单元。 头针的前端部与带的另一表面相接触,并沿衬底表面的垂直坐标轴移动。 胶带研磨单元被安装成通过研磨带的表面研磨投影单元(22)。 安装测量单元以测量投影单元的高度。 安装控制单元将投影单元的高度分成两步的过程范围,并改变在投影单元上施加的力。
    • 6. 发明专利
    • Externally pressurized bearing spindle
    • GB2308411B
    • 2000-03-29
    • GB9616167
    • 1996-08-01
    • NTN TOYO BEARING CO LTD
    • FUJII SHOJIYAMAZAKI SHIZUKAFUKIKAWA YOSHIO
    • F16C32/06
    • An externally pressurized air bearing spindle comprises: a first cylindrical bearing portion having a journal bearing surface opposing an outer circumferential surface of a main shaft with a small journal bearing clearance therebetween, a thrust bearing surface opposing one end surface of a thrust plate disposed on the main shaft with a small thrust bearing clearance therebetween, and plural bearing nozzles formed in the journal bearing surface and the thrust bearing surface and arranged in planes perpendicular to an axis thereof; and a second cylindrical bearing portion having a thrust bearing surface opposing the other end surface of the thrust plate with a small thrust bearing clearance therebetween and plural bearing nozzles formed in the thrust bearing surface and arranged in a plane perpendicular to an axis thereof; the arrangement being such that the main shaft is supported on the bearing surfaces without contact by the action of compressed air fed through the bearing nozzles into the bearing clearances, and that an annular groove is formed between an outer wall of at least one of the first and second bearing portions and an inner wall of an outer case for that one bearing portion so that the bearing nozzles are fed with compressed air from a bearing air feed port formed in the outer case through the annular groove.