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    • 2. 发明专利
    • Vertical type light emitting diode and its manufacture
    • 垂直型发光二极管及其制造
    • JP2007081360A
    • 2007-03-29
    • JP2006000118
    • 2006-01-04
    • Shi-Ming ChenEpitech Technology Corpエピテック テクノロジー コーポレーションシーミン チェン
    • CHEN SHI-MING
    • H01L33/32
    • H01L33/0079
    • PROBLEM TO BE SOLVED: To provide a vertical type light emitting diode at a reduced cost by reinforcing an operation reliability of a device and improving a production yield, and a method for manufacturing it. SOLUTION: This method comprises following steps. A sapphire substrate 200 is prepared. A light emitting epitaxial structure 202 is formed on the sapphire substrate 200. Then a first conductive type electrode 204 is formed on the surface of the light emitting epitaxial structure 202. Then, a local removing step is performed to remove a part of the sapphire substrate from the surface of the light emitting epitaxial structure 202 so that a part of the surface is exposed. Then a second conductive type electrode 210 is formed on the exposed part of the surface of the light emitting epitaxial structure 202. The conductive type of the first conductive type electrode 204 is opposite to that of the second conductive type electrode 210. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:通过增强装置的操作可靠性和提高生产成本,以降低的成本提供垂直型发光二极管及其制造方法。

      解决方案:该方法包括以下步骤。 制备蓝宝石衬底200。 在蓝宝石衬底200上形成发光外延结构202.然后在发光外延结构202的表面上形成第一导电型电极204.然后,执行局部去除步骤以去除蓝宝石衬底的一部分 从发光外延结构202的表面,使得表面的一部分露出。 然后在发光外延结构202的表面的暴露部分上形成第二导电型电极210.第一导电类型电极204的导电类型与第二导电类型电极210的导电类型相反。 (C)2007,JPO&INPIT